NL6913234A - - Google Patents
Info
- Publication number
- NL6913234A NL6913234A NL6913234A NL6913234A NL6913234A NL 6913234 A NL6913234 A NL 6913234A NL 6913234 A NL6913234 A NL 6913234A NL 6913234 A NL6913234 A NL 6913234A NL 6913234 A NL6913234 A NL 6913234A
- Authority
- NL
- Netherlands
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US75618668A | 1968-08-29 | 1968-08-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL6913234A true NL6913234A (en) | 1970-03-03 |
Family
ID=25042380
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL6913234A NL6913234A (en) | 1968-08-29 | 1969-08-29 |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JPS4822659B1 (en) |
| DE (1) | DE1943029B2 (en) |
| FR (1) | FR2022140A1 (en) |
| GB (1) | GB1282322A (en) |
| NL (1) | NL6913234A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5426526Y2 (en) * | 1973-10-24 | 1979-09-01 | ||
| GB1502754A (en) * | 1975-12-22 | 1978-03-01 | Siemens Ag | Heat-treatment of semi-conductor wafers |
| US4479455A (en) * | 1983-03-14 | 1984-10-30 | Energy Conversion Devices, Inc. | Process gas introduction and channeling system to produce a profiled semiconductor layer |
-
1969
- 1969-07-23 GB GB3710669A patent/GB1282322A/en not_active Expired
- 1969-08-23 DE DE19691943029 patent/DE1943029B2/en not_active Withdrawn
- 1969-08-25 FR FR6928992A patent/FR2022140A1/fr not_active Withdrawn
- 1969-08-28 JP JP6766369A patent/JPS4822659B1/ja active Pending
- 1969-08-29 NL NL6913234A patent/NL6913234A/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| FR2022140A1 (en) | 1970-07-31 |
| DE1943029B2 (en) | 1972-01-13 |
| JPS4822659B1 (en) | 1973-07-07 |
| GB1282322A (en) | 1972-07-19 |
| DE1943029A1 (en) | 1970-03-26 |