NL6814460A - - Google Patents
Info
- Publication number
- NL6814460A NL6814460A NL6814460A NL6814460A NL6814460A NL 6814460 A NL6814460 A NL 6814460A NL 6814460 A NL6814460 A NL 6814460A NL 6814460 A NL6814460 A NL 6814460A NL 6814460 A NL6814460 A NL 6814460A
- Authority
- NL
- Netherlands
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B23/00—Machines, plants or systems, with a single mode of operation not covered by groups F25B1/00 - F25B21/00, e.g. using selective radiation effect
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Separation By Low-Temperature Treatments (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH1265168A CH476215A (de) | 1968-08-20 | 1968-08-20 | Verfahren zum Betrieb einer kryogenen Pumpstufe und Hochvakuumpumpanordnung zur Durchführung des Verfahrens |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL6814460A true NL6814460A (OSRAM) | 1970-02-24 |
Family
ID=4385104
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL6814460A NL6814460A (OSRAM) | 1968-08-20 | 1968-10-09 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US3585807A (OSRAM) |
| CH (1) | CH476215A (OSRAM) |
| DE (1) | DE1934938C3 (OSRAM) |
| FR (1) | FR2015963A1 (OSRAM) |
| GB (1) | GB1256632A (OSRAM) |
| NL (1) | NL6814460A (OSRAM) |
Families Citing this family (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4150549A (en) * | 1977-05-16 | 1979-04-24 | Air Products And Chemicals, Inc. | Cryopumping method and apparatus |
| US4219588A (en) * | 1979-01-12 | 1980-08-26 | Air Products And Chemicals, Inc. | Method for coating cryopumping apparatus |
| DE3216591A1 (de) * | 1982-05-04 | 1983-11-10 | Leybold-Heraeus GmbH, 5000 Köln | Kryopumpe mit jalousieartigem baffle |
| DE3330146A1 (de) * | 1982-09-17 | 1984-03-22 | Balzers Hochvakuum Gmbh, 6200 Wiesbaden | Vorrichtung und verfahren zur schnellen regeneration von autonomen kryopumpen |
| JPS60161702A (ja) * | 1984-01-27 | 1985-08-23 | Seiko Instr & Electronics Ltd | 真空用冷却トラツプ |
| US4667477A (en) * | 1985-03-28 | 1987-05-26 | Hitachi, Ltd. | Cryopump and method of operating same |
| DE3512614A1 (de) * | 1985-04-06 | 1986-10-16 | Leybold-Heraeus GmbH, 5000 Köln | Verfahren zur inbetriebnahme und/oder regenerierung einer kryopumpe und fuer dieses verfahren geeignete kryopumpe |
| DE3518283C2 (de) * | 1985-05-22 | 1994-09-22 | Messer Griesheim Gmbh | Verfahren zur Entfernung leichter flüchtiger Verunreinigungen aus Gasen |
| US4679401A (en) * | 1985-07-03 | 1987-07-14 | Helix Technology Corporation | Temperature control of cryogenic systems |
| DE3680335D1 (de) * | 1986-06-23 | 1991-08-22 | Leybold Ag | Kryopumpe und verfahren zum betrieb dieser kryopumpe. |
| US4763483A (en) * | 1986-07-17 | 1988-08-16 | Helix Technology Corporation | Cryopump and method of starting the cryopump |
| US4724677A (en) * | 1986-10-09 | 1988-02-16 | Foster Christopher A | Continuous cryopump with a device for regenerating the cryosurface |
| US4907413A (en) * | 1988-06-02 | 1990-03-13 | Grumman Aerospace Corporation | Regenerable cryosorption pump with movable physical barrier and physical barrier thereof |
| US4873833A (en) * | 1988-11-23 | 1989-10-17 | American Telephone Telegraph Company, At&T Bell Laboratories | Apparatus comprising a high-vacuum chamber |
| JP3123126B2 (ja) * | 1991-07-15 | 2001-01-09 | 株式会社日立製作所 | 冷却機付き真空容器 |
| US5386708A (en) * | 1993-09-02 | 1995-02-07 | Ebara Technologies Incorporated | Cryogenic vacuum pump with expander speed control |
| US5520002A (en) * | 1995-02-01 | 1996-05-28 | Sony Corporation | High speed pump for a processing vacuum chamber |
| DE19632123A1 (de) * | 1996-08-09 | 1998-02-12 | Leybold Vakuum Gmbh | Kryopumpe |
| WO2005075826A1 (de) * | 2004-02-03 | 2005-08-18 | Universität Regensburg | Vakuumpumpe und verfahren zum betrieb derselben |
| DE202023107255U1 (de) * | 2023-12-07 | 2024-01-09 | Vat Holding Ag | Anordnung umfassend eine Kammer |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3262279A (en) * | 1964-10-09 | 1966-07-26 | Little Inc A | Extreme high vacuum apparatus |
| US3256706A (en) * | 1965-02-23 | 1966-06-21 | Hughes Aircraft Co | Cryopump with regenerative shield |
| US3485054A (en) * | 1966-10-27 | 1969-12-23 | Cryogenic Technology Inc | Rapid pump-down vacuum chambers incorporating cryopumps |
| US3472039A (en) * | 1968-02-19 | 1969-10-14 | Varian Associates | Hemispheric cryogenic vacuum trap and vacuum system using same |
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1968
- 1968-08-20 CH CH1265168A patent/CH476215A/de not_active IP Right Cessation
- 1968-10-09 NL NL6814460A patent/NL6814460A/xx unknown
-
1969
- 1969-07-10 DE DE1934938A patent/DE1934938C3/de not_active Expired
- 1969-07-23 GB GB1256632D patent/GB1256632A/en not_active Expired
- 1969-08-18 US US850755A patent/US3585807A/en not_active Expired - Lifetime
- 1969-08-18 FR FR6928173A patent/FR2015963A1/fr not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| DE1934938C3 (de) | 1974-05-30 |
| CH476215A (de) | 1969-07-31 |
| FR2015963A1 (OSRAM) | 1970-04-30 |
| DE1934938B2 (de) | 1973-10-25 |
| US3585807A (en) | 1971-06-22 |
| GB1256632A (OSRAM) | 1971-12-08 |
| DE1934938A1 (de) | 1970-03-05 |