NL6715171A - - Google Patents
Info
- Publication number
- NL6715171A NL6715171A NL6715171A NL6715171A NL6715171A NL 6715171 A NL6715171 A NL 6715171A NL 6715171 A NL6715171 A NL 6715171A NL 6715171 A NL6715171 A NL 6715171A NL 6715171 A NL6715171 A NL 6715171A
- Authority
- NL
- Netherlands
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32018—Glow discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE1966J0032191 DE1275229B (de) | 1966-11-09 | 1966-11-09 | Verfahren zur UEberwachung des elektrischen Verhaltens einer stromstarken Glimmentladung fuer metallurgische Verfahren und Einrichtung dazu |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL6715171A true NL6715171A (fr) | 1968-05-10 |
Family
ID=7204390
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL6715171A NL6715171A (fr) | 1966-11-09 | 1967-11-08 |
Country Status (8)
| Country | Link |
|---|---|
| AT (1) | AT284991B (fr) |
| BE (2) | BE705914A (fr) |
| CH (1) | CH475366A (fr) |
| DE (1) | DE1275229B (fr) |
| FR (1) | FR1561958A (fr) |
| GB (1) | GB1202917A (fr) |
| LU (1) | LU54744A1 (fr) |
| NL (1) | NL6715171A (fr) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2232832A1 (en) * | 1973-06-06 | 1975-01-03 | Radiotechnique Compelec | Discharge control in cathodic sputtering - using voltage variation on auxiliary insulated electrode to adjust gas supply |
| US4115828A (en) * | 1977-04-05 | 1978-09-19 | Gte Sylvania Incorporated | Arc detection and control apparatus |
| GB8404173D0 (en) * | 1984-02-17 | 1984-03-21 | Ti Group Services Ltd | Controlling current density |
| DE19521548A1 (de) * | 1995-06-13 | 1996-12-19 | Ipsen Ind Int Gmbh | Verfahren und Vorrichtung zur Steuerung der elektrischen Stromdichte über einem Werkstück bei der Wärmebehandlung im Plasma |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE543129A (fr) * | 1953-12-09 | |||
| AT219733B (de) * | 1954-11-06 | 1962-02-12 | Berghaus Elektrophysik Anst | Einrichtung zur Durchführung von Prozessen mittels elektrischer Glimmentladungen |
-
0
- BE BE284991D patent/BE284991A/xx unknown
-
1966
- 1966-11-09 DE DE1966J0032191 patent/DE1275229B/de active Pending
-
1967
- 1967-10-23 FR FR1561958D patent/FR1561958A/fr not_active Expired
- 1967-10-25 CH CH1493967A patent/CH475366A/de not_active IP Right Cessation
- 1967-10-26 LU LU54744D patent/LU54744A1/xx unknown
- 1967-10-31 BE BE705914D patent/BE705914A/xx unknown
- 1967-11-03 AT AT992467A patent/AT284991B/de not_active IP Right Cessation
- 1967-11-08 NL NL6715171A patent/NL6715171A/xx unknown
- 1967-11-08 GB GB5077967A patent/GB1202917A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| FR1561958A (fr) | 1969-04-04 |
| BE705914A (fr) | 1968-03-01 |
| AT284991B (de) | 1970-10-12 |
| GB1202917A (en) | 1970-08-19 |
| LU54744A1 (fr) | 1968-01-29 |
| CH475366A (de) | 1969-07-15 |
| BE284991A (fr) | |
| DE1275229B (de) | 1968-08-14 |