BE284991A - - Google Patents

Info

Publication number
BE284991A
BE284991A BE284991DA BE284991A BE 284991 A BE284991 A BE 284991A BE 284991D A BE284991D A BE 284991DA BE 284991 A BE284991 A BE 284991A
Authority
BE
Belgium
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Publication of BE284991A publication Critical patent/BE284991A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
BE284991D 1966-11-09 BE284991A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE1966J0032191 DE1275229B (de) 1966-11-09 1966-11-09 Verfahren zur UEberwachung des elektrischen Verhaltens einer stromstarken Glimmentladung fuer metallurgische Verfahren und Einrichtung dazu

Publications (1)

Publication Number Publication Date
BE284991A true BE284991A (fr)

Family

ID=7204390

Family Applications (2)

Application Number Title Priority Date Filing Date
BE284991D BE284991A (fr) 1966-11-09
BE705914D BE705914A (fr) 1966-11-09 1967-10-31

Family Applications After (1)

Application Number Title Priority Date Filing Date
BE705914D BE705914A (fr) 1966-11-09 1967-10-31

Country Status (8)

Country Link
AT (1) AT284991B (fr)
BE (2) BE705914A (fr)
CH (1) CH475366A (fr)
DE (1) DE1275229B (fr)
FR (1) FR1561958A (fr)
GB (1) GB1202917A (fr)
LU (1) LU54744A1 (fr)
NL (1) NL6715171A (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2232832A1 (en) * 1973-06-06 1975-01-03 Radiotechnique Compelec Discharge control in cathodic sputtering - using voltage variation on auxiliary insulated electrode to adjust gas supply
US4115828A (en) * 1977-04-05 1978-09-19 Gte Sylvania Incorporated Arc detection and control apparatus
GB8404173D0 (en) * 1984-02-17 1984-03-21 Ti Group Services Ltd Controlling current density
DE19521548A1 (de) * 1995-06-13 1996-12-19 Ipsen Ind Int Gmbh Verfahren und Vorrichtung zur Steuerung der elektrischen Stromdichte über einem Werkstück bei der Wärmebehandlung im Plasma

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL193023A (fr) * 1953-12-09
AT219733B (de) * 1954-11-06 1962-02-12 Berghaus Elektrophysik Anst Einrichtung zur Durchführung von Prozessen mittels elektrischer Glimmentladungen

Also Published As

Publication number Publication date
CH475366A (de) 1969-07-15
NL6715171A (fr) 1968-05-10
DE1275229B (de) 1968-08-14
BE705914A (fr) 1968-03-01
LU54744A1 (fr) 1968-01-29
AT284991B (de) 1970-10-12
FR1561958A (fr) 1969-04-04
GB1202917A (en) 1970-08-19

Similar Documents

Publication Publication Date Title
AT281852B (fr)
AU5917865A (fr)
AU428063B2 (fr)
AU424443B2 (fr)
AU414526B2 (fr)
AU433222B2 (fr)
AU421822B2 (fr)
AU417216B2 (fr)
AU415165B1 (fr)
AU1144366A (fr)
AU6703465A (fr)
AU612166A (fr)
AU1111066A (fr)
AU5895065A (fr)
AU218666A (fr)
AU433620A (fr)
BE618801A (fr)
AU2390066A (fr)
AU407778B2 (fr)
AU415780B2 (fr)
BE674882A (fr)
AU411645B2 (fr)
AU6852465A (fr)
AU855865A (fr)
AU92366A (fr)