FR1561958A - - Google Patents

Info

Publication number
FR1561958A
FR1561958A FR1561958DA FR1561958A FR 1561958 A FR1561958 A FR 1561958A FR 1561958D A FR1561958D A FR 1561958DA FR 1561958 A FR1561958 A FR 1561958A
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Application granted granted Critical
Publication of FR1561958A publication Critical patent/FR1561958A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
FR1561958D 1966-11-09 1967-10-23 Expired FR1561958A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE1966J0032191 DE1275229B (de) 1966-11-09 1966-11-09 Verfahren zur UEberwachung des elektrischen Verhaltens einer stromstarken Glimmentladung fuer metallurgische Verfahren und Einrichtung dazu

Publications (1)

Publication Number Publication Date
FR1561958A true FR1561958A (fr) 1969-04-04

Family

ID=7204390

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1561958D Expired FR1561958A (fr) 1966-11-09 1967-10-23

Country Status (8)

Country Link
AT (1) AT284991B (fr)
BE (2) BE705914A (fr)
CH (1) CH475366A (fr)
DE (1) DE1275229B (fr)
FR (1) FR1561958A (fr)
GB (1) GB1202917A (fr)
LU (1) LU54744A1 (fr)
NL (1) NL6715171A (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2232832A1 (en) * 1973-06-06 1975-01-03 Radiotechnique Compelec Discharge control in cathodic sputtering - using voltage variation on auxiliary insulated electrode to adjust gas supply
US4115828A (en) * 1977-04-05 1978-09-19 Gte Sylvania Incorporated Arc detection and control apparatus
GB8404173D0 (en) * 1984-02-17 1984-03-21 Ti Group Services Ltd Controlling current density
DE19521548A1 (de) * 1995-06-13 1996-12-19 Ipsen Ind Int Gmbh Verfahren und Vorrichtung zur Steuerung der elektrischen Stromdichte über einem Werkstück bei der Wärmebehandlung im Plasma

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL112276C (fr) * 1953-12-09
AT219733B (de) * 1954-11-06 1962-02-12 Berghaus Elektrophysik Anst Einrichtung zur Durchführung von Prozessen mittels elektrischer Glimmentladungen

Also Published As

Publication number Publication date
CH475366A (de) 1969-07-15
AT284991B (de) 1970-10-12
GB1202917A (en) 1970-08-19
NL6715171A (fr) 1968-05-10
BE284991A (fr)
BE705914A (fr) 1968-03-01
LU54744A1 (fr) 1968-01-29
DE1275229B (de) 1968-08-14

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Legal Events

Date Code Title Description
ST Notification of lapse