NL6701975A - - Google Patents
Info
- Publication number
- NL6701975A NL6701975A NL6701975A NL6701975A NL6701975A NL 6701975 A NL6701975 A NL 6701975A NL 6701975 A NL6701975 A NL 6701975A NL 6701975 A NL6701975 A NL 6701975A NL 6701975 A NL6701975 A NL 6701975A
- Authority
- NL
- Netherlands
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
- C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
- C22F1/16—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of other metals or alloys based thereon
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
- C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
- C30B31/10—Reaction chambers; Selection of materials therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S118/00—Coating apparatus
- Y10S118/90—Semiconductor vapor doping
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Mechanical Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Silicon Compounds (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DES0102224 | 1966-02-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL6701975A true NL6701975A (fi) | 1967-08-28 |
Family
ID=7524285
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL6701975A NL6701975A (fi) | 1966-02-25 | 1967-02-09 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US3492969A (fi) |
| BE (1) | BE694600A (fi) |
| CH (1) | CH497200A (fi) |
| DE (1) | DE1521494B1 (fi) |
| FR (1) | FR1511998A (fi) |
| GB (1) | GB1178765A (fi) |
| NL (1) | NL6701975A (fi) |
| SE (1) | SE388215B (fi) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1916818A1 (de) * | 1968-06-28 | 1970-03-12 | Euratom | Verfahren und Vorrichtung zur Vakuumaufdampfung monokristalliner Schichten |
| US3868924A (en) * | 1969-06-30 | 1975-03-04 | Siemens Ag | Apparatus for indiffusing dopants into semiconductor material |
| US4020791A (en) * | 1969-06-30 | 1977-05-03 | Siemens Aktiengesellschaft | Apparatus for indiffusing dopants into semiconductor material |
| DE2033444C3 (de) * | 1970-07-06 | 1979-02-15 | Siemens Ag | Vorrichtung zum Eindiffundieren von Dotierstoffen in Scheiben aus Halbleitermaterial |
| US3805735A (en) * | 1970-07-27 | 1974-04-23 | Siemens Ag | Device for indiffusing dopants into semiconductor wafers |
| DE2131722A1 (de) * | 1971-06-25 | 1972-12-28 | Siemens Ag | Anordnung zum Eindiffundieren von Dotierstoffen |
| US3823685A (en) * | 1971-08-05 | 1974-07-16 | Ncr Co | Processing apparatus |
| DE2324365C3 (de) * | 1973-05-14 | 1978-05-11 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Reaktionsgefäß zum Abscheiden von Halbleitermaterial auf erhitzte Trägerkörper |
| BE817066R (fr) * | 1973-11-29 | 1974-10-16 | Enceinte de reaction pour le depot de matiere semi-concuctrice sur des corps de support chauffes | |
| DE2518853C3 (de) * | 1975-04-28 | 1979-03-22 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Vorrichtung zum Abscheiden von elementarem Silicium aus einem Reaktionsgas |
| DE2730212A1 (de) * | 1977-07-04 | 1979-01-25 | Siemens Ag | Anordnung zur aufnahme von in stapelform zu diffundierenden halbleiterkristallscheiben |
| DE2849240C2 (de) * | 1978-11-13 | 1983-01-13 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | CVD-Beschichtungsvorrichtung für Kleinteile und ihre Verwendung |
| DE3208381A1 (de) * | 1982-03-09 | 1983-09-15 | Heraeus Quarzschmelze Gmbh, 6450 Hanau | Glocke aus quarzgut |
| US4592307A (en) * | 1985-02-28 | 1986-06-03 | Rca Corporation | Vapor phase deposition apparatus |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US263830A (en) * | 1882-09-05 | Edward weston | ||
| US1584728A (en) * | 1922-04-18 | 1926-05-18 | Case Res Lab Inc | Method of manufacturing mirrors |
| AT185893B (de) * | 1952-04-19 | 1956-06-11 | Ibm | Verfahren zur Herstellung von P-N-Schichten in Halbleitern |
| US2686212A (en) * | 1953-08-03 | 1954-08-10 | Gen Electric | Electric heating apparatus |
| NL105573C (fi) * | 1955-08-25 | |||
| NL210216A (fi) * | 1955-12-02 | |||
| US3001892A (en) * | 1958-03-26 | 1961-09-26 | Gen Electric | Evaporation method and apparatus |
| US3244141A (en) * | 1958-07-09 | 1966-04-05 | Chrysler Corp | Apparatus for obtaining metal carbide coating on base materials |
| DE1154693B (de) * | 1959-03-07 | 1963-09-19 | Siemens Ag | Verfahren zur Herstellung von Halbleiteranordnungen |
| US3036888A (en) * | 1959-12-29 | 1962-05-29 | Norton Co | Process for producing titanium nitride |
| US3243174A (en) * | 1960-03-08 | 1966-03-29 | Chilean Nitrate Sales Corp | Dissociation-deposition apparatus for the production of metals |
| DE1137807B (de) * | 1961-06-09 | 1962-10-11 | Siemens Ag | Verfahren zur Herstellung von Halbleiteranordnungen durch einkristalline Abscheidung von Halbleitermaterial aus der Gasphase |
| US3140965A (en) * | 1961-07-22 | 1964-07-14 | Siemens Ag | Vapor deposition onto stacked semiconductor wafers followed by particular cooling |
| US3227431A (en) * | 1961-11-22 | 1966-01-04 | Nat Res Corp | Crucible externally lined with filamentary carbon |
| US3213826A (en) * | 1962-03-05 | 1965-10-26 | Sperry Rand Corp | Electrostatic direction of exploded vapors |
| US3211128A (en) * | 1962-05-31 | 1965-10-12 | Roy F Potter | Vacuum evaporator apparatus |
| DE1244733B (de) * | 1963-11-05 | 1967-07-20 | Siemens Ag | Vorrichtung zum Aufwachsen einkristalliner Halbleitermaterialschichten auf einkristallinen Grundkoerpern |
-
1966
- 1966-02-25 DE DE19661521494 patent/DE1521494B1/de not_active Withdrawn
-
1967
- 1967-01-25 SE SE6701091A patent/SE388215B/xx unknown
- 1967-02-02 CH CH154167A patent/CH497200A/de not_active IP Right Cessation
- 1967-02-09 NL NL6701975A patent/NL6701975A/xx unknown
- 1967-02-20 FR FR95660A patent/FR1511998A/fr not_active Expired
- 1967-02-23 GB GB8768/67A patent/GB1178765A/en not_active Expired
- 1967-02-24 US US618530A patent/US3492969A/en not_active Expired - Lifetime
- 1967-02-24 BE BE694600D patent/BE694600A/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| FR1511998A (fr) | 1968-02-02 |
| DE1521494B1 (de) | 1970-11-26 |
| BE694600A (fi) | 1967-08-24 |
| US3492969A (en) | 1970-02-03 |
| GB1178765A (en) | 1970-01-21 |
| CH497200A (de) | 1970-10-15 |
| SE388215B (sv) | 1976-09-27 |