NL6618296A - - Google Patents

Info

Publication number
NL6618296A
NL6618296A NL6618296A NL6618296A NL6618296A NL 6618296 A NL6618296 A NL 6618296A NL 6618296 A NL6618296 A NL 6618296A NL 6618296 A NL6618296 A NL 6618296A NL 6618296 A NL6618296 A NL 6618296A
Authority
NL
Netherlands
Application number
NL6618296A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL6618296A publication Critical patent/NL6618296A/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
NL6618296A 1966-02-04 1966-12-28 NL6618296A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES0101807 1966-02-04

Publications (1)

Publication Number Publication Date
NL6618296A true NL6618296A (de) 1967-08-07

Family

ID=7524009

Family Applications (1)

Application Number Title Priority Date Filing Date
NL6618296A NL6618296A (de) 1966-02-04 1966-12-28

Country Status (4)

Country Link
DE (1) DE1515314C2 (de)
FR (1) FR1518811A (de)
GB (1) GB1169991A (de)
NL (1) NL6618296A (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2940369C2 (de) * 1979-10-05 1982-10-21 W.C. Heraeus Gmbh, 6450 Hanau Target
DE3030320A1 (de) * 1980-08-11 1982-03-11 W.C. Heraeus Gmbh, 6450 Hanau Verfahren zur herstellung eines targets fuer kathodenzerstaeubung
GB2102027A (en) * 1981-07-18 1983-01-26 Gen Eng Radcliffe 1979 Target for magnetically enhanced sputtering of chromium-iron alloy

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE465699C (de) * 1926-07-22 1928-09-21 Ernst Albers Schoenberg Dr Aus Stuecken verschiedener Metalle bestehende Kathode zur Herstellung elektrischer Widerstaende
DE542404C (de) * 1929-03-06 1932-01-23 Steatit Magnesia Akt Ges Verfahren zur Herstellung hochohmiger Widerstaende
GB830391A (en) * 1955-10-28 1960-03-16 Edwards High Vacuum Ltd Improvements in or relating to cathodic sputtering of metal and dielectric films

Also Published As

Publication number Publication date
GB1169991A (en) 1969-11-12
DE1515314C2 (de) 1973-12-13
FR1518811A (fr) 1968-03-29
DE1515314B1 (de) 1973-05-30

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