NL6515706A - - Google Patents
Info
- Publication number
- NL6515706A NL6515706A NL6515706A NL6515706A NL6515706A NL 6515706 A NL6515706 A NL 6515706A NL 6515706 A NL6515706 A NL 6515706A NL 6515706 A NL6515706 A NL 6515706A NL 6515706 A NL6515706 A NL 6515706A
- Authority
- NL
- Netherlands
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/14—Feed and outlet means for the gases; Modifying the flow of the reactive gases
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DES94785A DE1262244B (de) | 1964-12-23 | 1964-12-23 | Verfahren zum epitaktischen Abscheiden einer kristallinen Schicht, insbesondere aus Halbleitermaterial |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL6515706A true NL6515706A (xx) | 1966-06-24 |
Family
ID=7518937
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL6515706A NL6515706A (xx) | 1964-12-23 | 1965-12-02 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US3486933A (xx) |
| AT (3) | AT263082B (xx) |
| CH (1) | CH451886A (xx) |
| DE (1) | DE1262244B (xx) |
| FR (1) | FR1461829A (xx) |
| GB (1) | GB1124328A (xx) |
| NL (1) | NL6515706A (xx) |
| SE (1) | SE334865B (xx) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1900116C3 (de) * | 1969-01-02 | 1978-10-19 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Verfahren zum Herstellen hxxochreiner, aus Silicium bestehender einkristalliner Schichten |
| US4020791A (en) * | 1969-06-30 | 1977-05-03 | Siemens Aktiengesellschaft | Apparatus for indiffusing dopants into semiconductor material |
| US4496609A (en) * | 1969-10-15 | 1985-01-29 | Applied Materials, Inc. | Chemical vapor deposition coating process employing radiant heat and a susceptor |
| DE2033444C3 (de) * | 1970-07-06 | 1979-02-15 | Siemens Ag | Vorrichtung zum Eindiffundieren von Dotierstoffen in Scheiben aus Halbleitermaterial |
| NL7209297A (xx) * | 1972-07-01 | 1974-01-03 | ||
| DE2908288B1 (de) * | 1979-03-03 | 1980-01-17 | Heraeus Schott Quarzschmelze | Glocke aus Quarzglas fuer halbleitertechnologische Zwecke |
| US5414927A (en) * | 1993-03-30 | 1995-05-16 | Union Oil Co | Furnace elements made from graphite sheets |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1048638B (de) * | 1957-07-02 | 1959-01-15 | Siemens &. Halske Aktiengesellschaft, Berlin und München | Verfahren zur Herstellung von Halbleitereinkristallen, insbesondere von Silizium durch thermische Zersetzung oder Reduktion |
| NL238464A (xx) * | 1958-05-29 | |||
| NL256255A (xx) * | 1959-11-02 | |||
| US3096209A (en) * | 1960-05-18 | 1963-07-02 | Ibm | Formation of semiconductor bodies |
| BE607571A (xx) * | 1960-09-09 | |||
| NL270516A (xx) * | 1960-11-30 | |||
| NL271345A (xx) * | 1960-11-30 | |||
| US3243323A (en) * | 1962-06-11 | 1966-03-29 | Motorola Inc | Gas etching |
| US3177100A (en) * | 1963-09-09 | 1965-04-06 | Rca Corp | Depositing epitaxial layer of silicon from a vapor mixture of sih4 and h3 |
| US3381114A (en) * | 1963-12-28 | 1968-04-30 | Nippon Electric Co | Device for manufacturing epitaxial crystals |
-
1964
- 1964-12-23 DE DES94785A patent/DE1262244B/de not_active Withdrawn
-
1965
- 1965-12-02 NL NL6515706A patent/NL6515706A/xx unknown
- 1965-12-20 FR FR42978A patent/FR1461829A/fr not_active Expired
- 1965-12-21 AT AT1150065A patent/AT263082B/de active
- 1965-12-21 CH CH1763665A patent/CH451886A/de unknown
- 1965-12-21 AT AT06860/68A patent/AT278096B/de not_active IP Right Cessation
- 1965-12-21 AT AT840467A patent/AT269948B/de active
- 1965-12-21 GB GB54236/65A patent/GB1124328A/en not_active Expired
- 1965-12-21 US US515304A patent/US3486933A/en not_active Expired - Lifetime
- 1965-12-22 SE SE16700/65A patent/SE334865B/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| AT269948B (de) | 1969-04-10 |
| FR1461829A (fr) | 1966-12-09 |
| CH451886A (de) | 1968-05-15 |
| AT278096B (de) | 1970-01-26 |
| GB1124328A (en) | 1968-08-21 |
| AT263082B (de) | 1968-07-10 |
| SE334865B (xx) | 1971-05-10 |
| DE1262244B (de) | 1968-03-07 |
| US3486933A (en) | 1969-12-30 |