NL177057B - Elektronenkanon van het veldemissie-type. - Google Patents

Elektronenkanon van het veldemissie-type.

Info

Publication number
NL177057B
NL177057B NL7402296A NL7402296A NL177057B NL 177057 B NL177057 B NL 177057B NL 7402296 A NL7402296 A NL 7402296A NL 7402296 A NL7402296 A NL 7402296A NL 177057 B NL177057 B NL 177057B
Authority
NL
Netherlands
Prior art keywords
field emission
electron gun
emission type
type
gun
Prior art date
Application number
NL7402296A
Other languages
English (en)
Other versions
NL177057C (nl
NL7402296A (nl
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Publication of NL7402296A publication Critical patent/NL7402296A/xx
Publication of NL177057B publication Critical patent/NL177057B/nl
Application granted granted Critical
Publication of NL177057C publication Critical patent/NL177057C/nl

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/248—Components associated with high voltage supply

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
NL7402296A 1973-03-03 1974-02-20 Elektronenkanon van het veldemissie-type. NL177057C (nl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2545273A JPS5212055B2 (nl) 1973-03-03 1973-03-03

Publications (3)

Publication Number Publication Date
NL7402296A NL7402296A (nl) 1974-09-05
NL177057B true NL177057B (nl) 1985-02-18
NL177057C NL177057C (nl) 1985-07-16

Family

ID=12166404

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7402296A NL177057C (nl) 1973-03-03 1974-02-20 Elektronenkanon van het veldemissie-type.

Country Status (4)

Country Link
JP (1) JPS5212055B2 (nl)
FR (1) FR2220089B1 (nl)
GB (1) GB1417361A (nl)
NL (1) NL177057C (nl)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5366151A (en) * 1976-11-26 1978-06-13 Hitachi Ltd Electron gun unit of electron microscope and equivalent unit
JPS58141554U (ja) * 1982-03-17 1983-09-24 日本電子株式会社 電子銃

Also Published As

Publication number Publication date
JPS5212055B2 (nl) 1977-04-04
NL177057C (nl) 1985-07-16
DE2408719B2 (de) 1977-06-02
NL7402296A (nl) 1974-09-05
JPS49115467A (nl) 1974-11-05
FR2220089A1 (nl) 1974-09-27
FR2220089B1 (nl) 1979-03-02
DE2408719A1 (de) 1974-09-12
GB1417361A (en) 1975-12-10

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Legal Events

Date Code Title Description
BC A request for examination has been filed
A85 Still pending on 85-01-01
V1 Lapsed because of non-payment of the annual fee