JPS5212055B2 - - Google Patents
Info
- Publication number
- JPS5212055B2 JPS5212055B2 JP2545273A JP2545273A JPS5212055B2 JP S5212055 B2 JPS5212055 B2 JP S5212055B2 JP 2545273 A JP2545273 A JP 2545273A JP 2545273 A JP2545273 A JP 2545273A JP S5212055 B2 JPS5212055 B2 JP S5212055B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/248—Components associated with high voltage supply
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2545273A JPS5212055B2 (ja) | 1973-03-03 | 1973-03-03 | |
| NL7402296A NL177057C (nl) | 1973-03-03 | 1974-02-20 | Elektronenkanon van het veldemissie-type. |
| DE19742408719 DE2408719C3 (de) | 1973-03-03 | 1974-02-22 | Feldemissionselektronenquelle |
| FR7406180A FR2220089B1 (ja) | 1973-03-03 | 1974-02-22 | |
| GB945174A GB1417361A (en) | 1973-03-03 | 1974-03-01 | Electron gun assembly |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2545273A JPS5212055B2 (ja) | 1973-03-03 | 1973-03-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS49115467A JPS49115467A (ja) | 1974-11-05 |
| JPS5212055B2 true JPS5212055B2 (ja) | 1977-04-04 |
Family
ID=12166404
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2545273A Expired JPS5212055B2 (ja) | 1973-03-03 | 1973-03-03 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS5212055B2 (ja) |
| FR (1) | FR2220089B1 (ja) |
| GB (1) | GB1417361A (ja) |
| NL (1) | NL177057C (ja) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5366151A (en) * | 1976-11-26 | 1978-06-13 | Hitachi Ltd | Electron gun unit of electron microscope and equivalent unit |
| JPS58141554U (ja) * | 1982-03-17 | 1983-09-24 | 日本電子株式会社 | 電子銃 |
-
1973
- 1973-03-03 JP JP2545273A patent/JPS5212055B2/ja not_active Expired
-
1974
- 1974-02-20 NL NL7402296A patent/NL177057C/xx not_active IP Right Cessation
- 1974-02-22 FR FR7406180A patent/FR2220089B1/fr not_active Expired
- 1974-03-01 GB GB945174A patent/GB1417361A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| FR2220089A1 (ja) | 1974-09-27 |
| JPS49115467A (ja) | 1974-11-05 |
| DE2408719B2 (de) | 1977-06-02 |
| NL7402296A (ja) | 1974-09-05 |
| GB1417361A (en) | 1975-12-10 |
| NL177057C (nl) | 1985-07-16 |
| DE2408719A1 (de) | 1974-09-12 |
| FR2220089B1 (ja) | 1979-03-02 |
| NL177057B (nl) | 1985-02-18 |