GB1417361A - Electron gun assembly - Google Patents

Electron gun assembly

Info

Publication number
GB1417361A
GB1417361A GB945174A GB945174A GB1417361A GB 1417361 A GB1417361 A GB 1417361A GB 945174 A GB945174 A GB 945174A GB 945174 A GB945174 A GB 945174A GB 1417361 A GB1417361 A GB 1417361A
Authority
GB
United Kingdom
Prior art keywords
gun
switches
cable
electron
march
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB945174A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Publication of GB1417361A publication Critical patent/GB1417361A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/248—Components associated with high voltage supply

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
GB945174A 1973-03-03 1974-03-01 Electron gun assembly Expired GB1417361A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2545273A JPS5212055B2 (nl) 1973-03-03 1973-03-03

Publications (1)

Publication Number Publication Date
GB1417361A true GB1417361A (en) 1975-12-10

Family

ID=12166404

Family Applications (1)

Application Number Title Priority Date Filing Date
GB945174A Expired GB1417361A (en) 1973-03-03 1974-03-01 Electron gun assembly

Country Status (4)

Country Link
JP (1) JPS5212055B2 (nl)
FR (1) FR2220089B1 (nl)
GB (1) GB1417361A (nl)
NL (1) NL177057C (nl)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5366151A (en) * 1976-11-26 1978-06-13 Hitachi Ltd Electron gun unit of electron microscope and equivalent unit
JPS58141554U (ja) * 1982-03-17 1983-09-24 日本電子株式会社 電子銃

Also Published As

Publication number Publication date
JPS5212055B2 (nl) 1977-04-04
NL177057C (nl) 1985-07-16
DE2408719B2 (de) 1977-06-02
NL7402296A (nl) 1974-09-05
JPS49115467A (nl) 1974-11-05
FR2220089A1 (nl) 1974-09-27
NL177057B (nl) 1985-02-18
FR2220089B1 (nl) 1979-03-02
DE2408719A1 (de) 1974-09-12

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19930301