NL7402296A - - Google Patents

Info

Publication number
NL7402296A
NL7402296A NL7402296A NL7402296A NL7402296A NL 7402296 A NL7402296 A NL 7402296A NL 7402296 A NL7402296 A NL 7402296A NL 7402296 A NL7402296 A NL 7402296A NL 7402296 A NL7402296 A NL 7402296A
Authority
NL
Netherlands
Application number
NL7402296A
Other versions
NL177057C (nl
NL177057B (nl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL7402296A publication Critical patent/NL7402296A/xx
Publication of NL177057B publication Critical patent/NL177057B/nl
Application granted granted Critical
Publication of NL177057C publication Critical patent/NL177057C/nl

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/248—Components associated with high voltage supply

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
NL7402296A 1973-03-03 1974-02-20 Elektronenkanon van het veldemissie-type. NL177057C (nl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2545273A JPS5212055B2 (nl) 1973-03-03 1973-03-03

Publications (3)

Publication Number Publication Date
NL7402296A true NL7402296A (nl) 1974-09-05
NL177057B NL177057B (nl) 1985-02-18
NL177057C NL177057C (nl) 1985-07-16

Family

ID=12166404

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7402296A NL177057C (nl) 1973-03-03 1974-02-20 Elektronenkanon van het veldemissie-type.

Country Status (4)

Country Link
JP (1) JPS5212055B2 (nl)
FR (1) FR2220089B1 (nl)
GB (1) GB1417361A (nl)
NL (1) NL177057C (nl)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5366151A (en) * 1976-11-26 1978-06-13 Hitachi Ltd Electron gun unit of electron microscope and equivalent unit
JPS58141554U (ja) * 1982-03-17 1983-09-24 日本電子株式会社 電子銃

Also Published As

Publication number Publication date
NL177057C (nl) 1985-07-16
JPS49115467A (nl) 1974-11-05
JPS5212055B2 (nl) 1977-04-04
DE2408719A1 (de) 1974-09-12
DE2408719B2 (de) 1977-06-02
FR2220089B1 (nl) 1979-03-02
FR2220089A1 (nl) 1974-09-27
NL177057B (nl) 1985-02-18
GB1417361A (en) 1975-12-10

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Legal Events

Date Code Title Description
BC A request for examination has been filed
A85 Still pending on 85-01-01
V1 Lapsed because of non-payment of the annual fee