NL136984C - - Google Patents

Info

Publication number: NL136984C
Authority: NL; Netherlands

Application number

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1964-06-04

Publication of NL136984C publication Critical patent/NL136984C/xx

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors

Landscapes

Chemical & Material Sciences (AREA)
Engineering & Computer Science (AREA)
Organic Chemistry (AREA)
Materials Engineering (AREA)
Mechanical Engineering (AREA)
Metallurgy (AREA)
Chemical Kinetics & Catalysis (AREA)
Health & Medical Sciences (AREA)
Toxicology (AREA)
Physics & Mathematics (AREA)
Plasma & Fusion (AREA)
Analytical Chemistry (AREA)
Physical Vapour Deposition (AREA)
Photovoltaic Devices (AREA)
Manufacturing Of Magnetic Record Carriers (AREA)

NL136984D 1964-06-04 NL136984C (enrdf_load_html_response)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
US37253764A	1964-06-04	1964-06-04

Publications (1)

Publication Number	Publication Date
NL136984C true NL136984C (enrdf_load_html_response)

Family

ID=23468560

Family Applications (2)

Application Number	Title	Priority Date	Filing Date
NL136984D NL136984C (enrdf_load_html_response)	1964-06-04
NL6506292A NL6506292A (enrdf_load_html_response)	1964-06-04	1965-05-18

Family Applications After (1)

Application Number	Title	Priority Date	Filing Date
NL6506292A NL6506292A (enrdf_load_html_response)	1964-06-04	1965-05-18

Country Status (9)

Country	Link
AT (1)	AT255226B (enrdf_load_html_response)
BE (1)	BE664061A (enrdf_load_html_response)
DE (1)	DE1515322C3 (enrdf_load_html_response)
ES (1)	ES313735A1 (enrdf_load_html_response)
FR (1)	FR1434758A (enrdf_load_html_response)
GB (1)	GB1104487A (enrdf_load_html_response)
IL (1)	IL23185A (enrdf_load_html_response)
NL (2)	NL6506292A (enrdf_load_html_response)
SE (1)	SE314269B (enrdf_load_html_response)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3617459A (en) *	1967-09-15	1971-11-02	Ibm	Rf sputtering method and apparatus for producing insulating films of varied physical properties
MX145314A (es) *	1975-12-17	1982-01-27	Coulter Systems Corp	Mejoras a un aparato chisporroteador para producir pelicula electrofotografica

0
- NL NL136984D patent/NL136984C/xx active
1965
- 1965-03-19 IL IL2318565A patent/IL23185A/xx unknown
- 1965-04-05 AT AT307465A patent/AT255226B/de active
- 1965-05-17 BE BE664061D patent/BE664061A/xx unknown
- 1965-05-18 DE DE1965W0039172 patent/DE1515322C3/de not_active Expired
- 1965-05-18 NL NL6506292A patent/NL6506292A/xx unknown
- 1965-05-21 GB GB2157965A patent/GB1104487A/en not_active Expired
- 1965-05-24 FR FR18205A patent/FR1434758A/fr not_active Expired
- 1965-05-26 ES ES0313735A patent/ES313735A1/es not_active Expired
- 1965-06-03 SE SE728665A patent/SE314269B/xx unknown

Also Published As

Publication number	Publication date
BE664061A (enrdf_load_html_response)	1965-09-16
AT255226B (de)	1967-06-26
DE1515322C3 (de)	1974-05-02
FR1434758A (fr)	1966-04-08
NL6506292A (enrdf_load_html_response)	1965-12-06
GB1104487A (en)	1968-02-28
SE314269B (enrdf_load_html_response)	1969-09-01
ES313735A1 (es)	1965-07-16
DE1515322B2 (de)	1973-10-04
DE1515322A1 (de)	1972-03-02
IL23185A (en)	1968-08-22

Publication	Publication Date	Title
AU442366B2 (enrdf_load_html_response)	1970-07-16
BE642458A (enrdf_load_html_response)	1964-05-04
BE642508A (enrdf_load_html_response)	1964-07-14
BE660778A (enrdf_load_html_response)	1965-07-01
BE659860A (enrdf_load_html_response)	1965-06-16
BE659469A (enrdf_load_html_response)	1965-08-09
BE659245A (enrdf_load_html_response)	1965-05-28
BE658422A (enrdf_load_html_response)	1965-05-17
BE658390A (enrdf_load_html_response)	1965-07-15
BE658354A (enrdf_load_html_response)	1965-04-30
NL136984C (enrdf_load_html_response)
BE655836A (enrdf_load_html_response)	1965-05-17
BE654277A (enrdf_load_html_response)	1965-02-01
BE649679A (enrdf_load_html_response)
BE649215A (enrdf_load_html_response)
BE642974A (enrdf_load_html_response)	1964-07-24
BE642797A (enrdf_load_html_response)	1964-05-15
BE642770A (enrdf_load_html_response)	1964-05-15
BE642741A (enrdf_load_html_response)	1964-05-15
BE642735A (enrdf_load_html_response)
BE642654A (enrdf_load_html_response)	1964-05-15
BE642652A (enrdf_load_html_response)	1964-05-15
BE642589A (enrdf_load_html_response)
BE642588A (enrdf_load_html_response)	1964-05-15
BE642530A (enrdf_load_html_response)	1964-05-04