NL1024366A1 - Werkwijze voor de vervaardiging van een halftoonfasemasker. - Google Patents
Werkwijze voor de vervaardiging van een halftoonfasemasker.Info
- Publication number
- NL1024366A1 NL1024366A1 NL1024366A NL1024366A NL1024366A1 NL 1024366 A1 NL1024366 A1 NL 1024366A1 NL 1024366 A NL1024366 A NL 1024366A NL 1024366 A NL1024366 A NL 1024366A NL 1024366 A1 NL1024366 A1 NL 1024366A1
- Authority
- NL
- Netherlands
- Prior art keywords
- manufacture
- phase mask
- halftone phase
- halftone
- mask
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3607—Coatings of the type glass/inorganic compound/metal
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
- C03C17/3435—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a nitride, oxynitride, boronitride or carbonitride
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3626—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer at least containing a nitride, oxynitride, boronitride or carbonitride
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/26—Phase shift masks [PSM]; PSM blanks; Preparation thereof
- G03F1/32—Attenuating PSM [att-PSM], e.g. halftone PSM or PSM having semi-transparent phase shift portion; Preparation thereof
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/30—Aspects of methods for coating glass not covered above
- C03C2218/32—After-treatment
- C03C2218/328—Partly or completely removing a coating
- C03C2218/33—Partly or completely removing a coating by etching
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/30—Aspects of methods for coating glass not covered above
- C03C2218/34—Masking
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
- G03F1/80—Etching
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Inorganic Chemistry (AREA)
- Drying Of Semiconductors (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US25440502 | 2002-09-25 | ||
US10/254,405 US6919147B2 (en) | 2002-09-25 | 2002-09-25 | Production method for a halftone phase mask |
Publications (2)
Publication Number | Publication Date |
---|---|
NL1024366A1 true NL1024366A1 (nl) | 2004-03-29 |
NL1024366C2 NL1024366C2 (nl) | 2008-02-14 |
Family
ID=31993363
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NL1024366A NL1024366C2 (nl) | 2002-09-25 | 2003-09-24 | Werkwijze voor de vervaardiging van een halftoonfasemasker. |
Country Status (2)
Country | Link |
---|---|
US (1) | US6919147B2 (nl) |
NL (1) | NL1024366C2 (nl) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7575692B2 (en) * | 2003-04-11 | 2009-08-18 | Hoya Corporation | Method for etching chromium thin film and method for producing photomask |
KR100944846B1 (ko) * | 2006-10-30 | 2010-03-04 | 어플라이드 머티어리얼스, 인코포레이티드 | 마스크 에칭 프로세스 |
JP5795992B2 (ja) | 2012-05-16 | 2015-10-14 | 信越化学工業株式会社 | フォトマスクブランク及びフォトマスクの製造方法 |
JP5739375B2 (ja) * | 2012-05-16 | 2015-06-24 | 信越化学工業株式会社 | ハーフトーン位相シフトマスクブランク及びハーフトーン位相シフトマスクの製造方法 |
CN104078724B (zh) * | 2014-07-04 | 2016-08-24 | 芜湖航飞科技股份有限公司 | 一种等离子体数字移相器 |
EP3125041B1 (en) | 2015-07-27 | 2020-08-19 | Shin-Etsu Chemical Co., Ltd. | Method for preparing a photomask |
CN111106063A (zh) * | 2020-01-08 | 2020-05-05 | Tcl华星光电技术有限公司 | 阵列基板及其制作方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4232475C2 (de) * | 1992-09-28 | 1998-07-02 | Siemens Ag | Verfahren zum plasmachemischen Trockenätzen von Si¶3¶N¶4¶-Schichten hochselektiv zu SiO¶2¶-Schichten |
US6045954A (en) * | 1998-06-12 | 2000-04-04 | Industrial Technology Research Institute | Formation of silicon nitride film for a phase shift mask at 193 nm |
DE10100822C2 (de) * | 2001-01-10 | 2003-04-10 | Infineon Technologies Ag | Plasmaätzverfahren für MoSi(ON)-Schichten |
-
2002
- 2002-09-25 US US10/254,405 patent/US6919147B2/en not_active Expired - Fee Related
-
2003
- 2003-09-24 NL NL1024366A patent/NL1024366C2/nl not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
NL1024366C2 (nl) | 2008-02-14 |
US6919147B2 (en) | 2005-07-19 |
US20040058252A1 (en) | 2004-03-25 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
NL1028855A1 (nl) | Werkwijze voor het coderen van een film. | |
NL1027673A1 (nl) | Werkwijze voor genereren van resultaatbeelden van een onderzoeksobject. | |
NL300305I1 (nl) | Werkwijze voor de bereiding van gesubstitueerde octanoylamides. | |
NL1025961A1 (nl) | Verbindingen die ppar-activiteit moduleren en werkwijzen voor de bereiding daarvan. | |
NL1022018A1 (nl) | Belichtingswerkwijze. | |
NL1026671A1 (nl) | Balanceersysteem voor een portaal van een CT-systeem. | |
AU2003253674A1 (en) | Ue assisted system database update | |
ES1050210Y (es) | Plataforma de ducha. | |
NL1026203A1 (nl) | Verbindingen toepasbaar voor de behandeling van ziekten. | |
BR0315742B1 (pt) | conjunto de filtro. | |
NO20041150L (no) | Fremgangsmate for a danne en sammenfoyning. | |
NL1024870A1 (nl) | Onvertraagd maskeringssysteem en werkwijze voor beelden. | |
NL1021490A1 (nl) | Werkwijze voor de bereiding van een fluorpolymeer. | |
DE60323584D1 (de) | Lithographischer Projektionsapparat | |
NL1024366A1 (nl) | Werkwijze voor de vervaardiging van een halftoonfasemasker. | |
NL1026544A1 (nl) | Systemen en werkwijzen voor fasecoderingsplaatsing. | |
NL1025769A1 (nl) | Projectiesysteem. | |
NL1018865A1 (nl) | Kathode en werkwijze voor de vervaardiging ervan. | |
AU2002368535A1 (en) | Method for forming photocatalyst apatite film | |
NL1022544A1 (nl) | Lithografiewerkwijze met meervoudige belichting en systeem voor het verschaffen van een verbeterde overlappingsnauwkeurigheid. | |
NL1022900A1 (nl) | Meerlaagse spiegel voor een luminescerende inrichting en werkwijze voor de vervaardiging daarvan. | |
NL1026737A1 (nl) | Plafondinbouwdeel voor een plafondinbouwlamp. | |
NL1023656A1 (nl) | Werkwijze voor het structureren van een lithografiemasker. | |
NO20052392L (no) | Fremgangsmate for fremstilling av acetylenforbindelser. | |
BR0016991B1 (pt) | mÉtodo para a sÍntese de hidrazodicarbonamida. |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AD1A | A request for search or an international type search has been filed | ||
RD2N | Patents in respect of which a decision has been taken or a report has been made (novelty report) |
Effective date: 20071213 |
|
PD2B | A search report has been drawn up | ||
VD1 | Lapsed due to non-payment of the annual fee |
Effective date: 20090401 |