NL1010688A1 - Werkwijze voor het vervaardigen van een oppervlakte-geluidsgolfinrichting. - Google Patents
Werkwijze voor het vervaardigen van een oppervlakte-geluidsgolfinrichting.Info
- Publication number
- NL1010688A1 NL1010688A1 NL1010688A NL1010688A NL1010688A1 NL 1010688 A1 NL1010688 A1 NL 1010688A1 NL 1010688 A NL1010688 A NL 1010688A NL 1010688 A NL1010688 A NL 1010688A NL 1010688 A1 NL1010688 A1 NL 1010688A1
- Authority
- NL
- Netherlands
- Prior art keywords
- manufacturing
- sound wave
- wave device
- surface sound
- wave
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/25—Constructional features of resonators using surface acoustic waves
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
- H03H3/10—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves for obtaining desired frequency or temperature coefficient
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/0023—Balance-unbalance or balance-balance networks
- H03H9/0028—Balance-unbalance or balance-balance networks using surface acoustic wave devices
- H03H9/0047—Balance-unbalance or balance-balance networks using surface acoustic wave devices having two acoustic tracks
- H03H9/0066—Balance-unbalance or balance-balance networks using surface acoustic wave devices having two acoustic tracks being electrically parallel
- H03H9/0071—Balance-unbalance or balance-balance networks using surface acoustic wave devices having two acoustic tracks being electrically parallel the balanced terminals being on the same side of the tracks
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02818—Means for compensation or elimination of undesirable effects
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/10—Mounting in enclosures
- H03H9/1064—Mounting in enclosures for surface acoustic wave [SAW] devices
- H03H9/1092—Mounting in enclosures for surface acoustic wave [SAW] devices the enclosure being defined by a cover cap mounted on an element forming part of the surface acoustic wave [SAW] device on the side of the IDT's
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
- H03H9/14538—Formation
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33057597 | 1997-12-01 | ||
| JP9330575A JPH11163655A (ja) | 1997-12-01 | 1997-12-01 | 弾性表面波装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| NL1010688A1 true NL1010688A1 (nl) | 1999-06-02 |
| NL1010688C2 NL1010688C2 (nl) | 2002-05-01 |
Family
ID=18234196
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL1010688A NL1010688C2 (nl) | 1997-12-01 | 1998-11-30 | Werkwijze voor het vervaardigen een oppervlakte-geluidsgolfinrichting. |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US6185801B1 (nl) |
| JP (1) | JPH11163655A (nl) |
| KR (1) | KR100302969B1 (nl) |
| CN (1) | CN1206751C (nl) |
| DE (1) | DE19854729C2 (nl) |
| NL (1) | NL1010688C2 (nl) |
| SG (1) | SG94318A1 (nl) |
| TW (1) | TW404090B (nl) |
Families Citing this family (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3712035B2 (ja) | 1999-04-28 | 2005-11-02 | 株式会社村田製作所 | 表面波装置の製造方法 |
| JP3317274B2 (ja) * | 1999-05-26 | 2002-08-26 | 株式会社村田製作所 | 弾性表面波装置及び弾性表面波装置の製造方法 |
| DE19949738A1 (de) * | 1999-10-15 | 2001-05-23 | Karlsruhe Forschzent | Verfahren zur Herstellung von Oberflächenwellensensoren und Oberflächenwellensensor |
| DE19949739C1 (de) * | 1999-10-15 | 2001-08-23 | Karlsruhe Forschzent | Massesensitiver Sensor |
| JP3435639B2 (ja) * | 2000-04-13 | 2003-08-11 | 株式会社村田製作所 | 弾性表面波装置の製造方法及び弾性表面波装置 |
| JP3485067B2 (ja) * | 2000-05-22 | 2004-01-13 | 株式会社村田製作所 | ラッピング加工方法およびラッピング装置 |
| JP2002217672A (ja) * | 2001-01-12 | 2002-08-02 | Murata Mfg Co Ltd | 弾性表面波装置およびそれを用いた通信機装置 |
| US6650205B2 (en) * | 2001-03-29 | 2003-11-18 | Clarisay, Inc. | Wafer-scale package for surface acoustic wave circuit and method of manufacturing the same |
| JP4063000B2 (ja) * | 2001-08-14 | 2008-03-19 | 株式会社村田製作所 | 端面反射型表面波フィルタ |
| JP3945363B2 (ja) * | 2001-10-12 | 2007-07-18 | 株式会社村田製作所 | 弾性表面波装置 |
| JP4704660B2 (ja) * | 2002-12-18 | 2011-06-15 | 株式会社日立製作所 | 記憶デバイス制御装置の制御方法、記憶デバイス制御装置、及びプログラム |
| JP3969311B2 (ja) * | 2003-01-20 | 2007-09-05 | 株式会社村田製作所 | 端面反射型弾性表面波装置 |
| JP2005033379A (ja) | 2003-07-09 | 2005-02-03 | Tdk Corp | 薄膜バルク波振動子およびその製造方法 |
| JP2009130806A (ja) * | 2007-11-27 | 2009-06-11 | Seiko Epson Corp | 弾性表面波素子及びその製造方法 |
| JP2009281887A (ja) * | 2008-05-22 | 2009-12-03 | Fujitsu Ltd | 気圧測定装置および気圧測定方法 |
| DE102009019523B4 (de) * | 2009-04-30 | 2014-02-13 | Epcos Ag | Verfahren zum Trimmen eines SAW Bauelements |
| JP2011023929A (ja) * | 2009-07-15 | 2011-02-03 | Panasonic Corp | 弾性波素子とこれを用いた電子機器 |
| US8959734B2 (en) | 2010-12-16 | 2015-02-24 | Palo Alto Research Center Incorporated | Method of fabricating a card with piezo-powered indicator by printed electronics processes |
| US8976093B2 (en) | 2010-12-16 | 2015-03-10 | Palo Alto Research Center Incorporated | Printed interactive card with piezo-powered indicator |
| US20180329271A1 (en) * | 2017-05-11 | 2018-11-15 | The Charles Stark Draper Laboratory, Inc. | Surface Acoustic Wave (SAW) Spatial Light Modulator Device Providing Varying SAW Speed |
| JP7195758B2 (ja) * | 2018-04-19 | 2022-12-26 | 株式会社ディスコ | Ｓａｗデバイスの製造方法 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4243960A (en) * | 1978-08-14 | 1981-01-06 | The United States Of America As Represented By The Secretary Of The Navy | Method and materials for tuning the center frequency of narrow-band surface-acoustic-wave (SAW) devices by means of dielectric overlays |
| US4442574A (en) * | 1982-07-26 | 1984-04-17 | General Electric Company | Frequency trimming of saw resonators |
| US4435441A (en) * | 1982-12-30 | 1984-03-06 | The United States Of America As Represented By The Secretary Of The Army | Method of frequency trimming surface acoustic wave devices |
| US4539847A (en) * | 1984-01-03 | 1985-09-10 | Texaco Inc. | Acoustic method and apparatus for measuring thickness of a coating layer on a substrate |
| JPH0763131B2 (ja) | 1985-03-13 | 1995-07-05 | 株式会社村田製作所 | 表面波装置の周波数調整方法 |
| FR2646309B1 (fr) * | 1989-04-24 | 1997-01-31 | Technomed Int Sa | Procede de fabrication d'un capteur acoustique et capteur acoustique ainsi obtenu, a couche de protection indecollable |
| JPH0832392A (ja) | 1994-07-19 | 1996-02-02 | Meidensha Corp | 弾性表面波素子及びその製造方法 |
-
1997
- 1997-12-01 JP JP9330575A patent/JPH11163655A/ja active Pending
-
1998
- 1998-11-16 US US09/192,774 patent/US6185801B1/en not_active Expired - Lifetime
- 1998-11-19 TW TW087119158A patent/TW404090B/zh not_active IP Right Cessation
- 1998-11-20 SG SG9804878A patent/SG94318A1/en unknown
- 1998-11-26 DE DE19854729A patent/DE19854729C2/de not_active Expired - Lifetime
- 1998-11-30 NL NL1010688A patent/NL1010688C2/nl not_active IP Right Cessation
- 1998-12-01 CN CNB981227805A patent/CN1206751C/zh not_active Expired - Lifetime
- 1998-12-01 KR KR1019980052193A patent/KR100302969B1/ko not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| JPH11163655A (ja) | 1999-06-18 |
| DE19854729C2 (de) | 2001-05-03 |
| KR100302969B1 (ko) | 2001-09-22 |
| KR19990062681A (ko) | 1999-07-26 |
| CN1221255A (zh) | 1999-06-30 |
| CN1206751C (zh) | 2005-06-15 |
| DE19854729A1 (de) | 1999-06-10 |
| US6185801B1 (en) | 2001-02-13 |
| SG94318A1 (en) | 2003-02-18 |
| TW404090B (en) | 2000-09-01 |
| NL1010688C2 (nl) | 2002-05-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| AD1A | A request for search or an international type search has been filed | ||
| RD2N | Patents in respect of which a decision has been taken or a report has been made (novelty report) |
Effective date: 20020226 |
|
| PD2B | A search report has been drawn up | ||
| MK | Patent expired because of reaching the maximum lifetime of a patent |
Effective date: 20181129 |