MY201686A - Trapezoidal cmp groove pattern - Google Patents

Trapezoidal cmp groove pattern

Info

Publication number
MY201686A
MY201686A MYPI2018001181A MYPI2018001181A MY201686A MY 201686 A MY201686 A MY 201686A MY PI2018001181 A MYPI2018001181 A MY PI2018001181A MY PI2018001181 A MYPI2018001181 A MY PI2018001181A MY 201686 A MY201686 A MY 201686A
Authority
MY
Malaysia
Prior art keywords
polishing
series
polishing pad
adjacent
radial feeder
Prior art date
Application number
MYPI2018001181A
Inventor
John Vu Nguyen Mr
Tony Quan Tran Mr
Jeffrey James Hendron Mr
Jeffrey Robert Stack Mr
Original Assignee
Rohm & Haas Elect Materials Cmp Holdings Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rohm & Haas Elect Materials Cmp Holdings Inc filed Critical Rohm & Haas Elect Materials Cmp Holdings Inc
Priority to MYPI2018001181A priority Critical patent/MY201686A/en
Publication of MY201686A publication Critical patent/MY201686A/en

Links

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  • Mechanical Treatment Of Semiconductor (AREA)

Abstract

The polishing pad is suitable for polishing or planarizing a wafer of at least one of semiconductor, optical and magnetic substrates. The polishing pad includes a polishing layer having a polymeric matrix and radial feeder grooves in the polishing layer separating the polishing layer into polishing regions. The radial feeder grooves extend at least from a location adjacent the center to a location adjacent the outer edge of the polishing pad. Each polishing region includes a series of spaced non-isosceles trapezoid groove structures having parallel base segments connecting two adjacent radial feeder grooves to form leg segments. The series of non-isosceles trapezoid groove structures extend from adjacent the outer edge toward the center of the polishing pad with the perimeter of the series of trapezoid structures also being a trapezoid.
MYPI2018001181A 2018-06-28 2018-06-28 Trapezoidal cmp groove pattern MY201686A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
MYPI2018001181A MY201686A (en) 2018-06-28 2018-06-28 Trapezoidal cmp groove pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
MYPI2018001181A MY201686A (en) 2018-06-28 2018-06-28 Trapezoidal cmp groove pattern

Publications (1)

Publication Number Publication Date
MY201686A true MY201686A (en) 2024-03-13

Family

ID=90885549

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI2018001181A MY201686A (en) 2018-06-28 2018-06-28 Trapezoidal cmp groove pattern

Country Status (1)

Country Link
MY (1) MY201686A (en)

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