MY201686A - Trapezoidal cmp groove pattern - Google Patents
Trapezoidal cmp groove patternInfo
- Publication number
- MY201686A MY201686A MYPI2018001181A MYPI2018001181A MY201686A MY 201686 A MY201686 A MY 201686A MY PI2018001181 A MYPI2018001181 A MY PI2018001181A MY PI2018001181 A MYPI2018001181 A MY PI2018001181A MY 201686 A MY201686 A MY 201686A
- Authority
- MY
- Malaysia
- Prior art keywords
- polishing
- series
- polishing pad
- adjacent
- radial feeder
- Prior art date
Links
- 238000005498 polishing Methods 0.000 abstract 10
- 239000011159 matrix material Substances 0.000 abstract 1
- 230000003287 optical effect Effects 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Landscapes
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
The polishing pad is suitable for polishing or planarizing a wafer of at least one of semiconductor, optical and magnetic substrates. The polishing pad includes a polishing layer having a polymeric matrix and radial feeder grooves in the polishing layer separating the polishing layer into polishing regions. The radial feeder grooves extend at least from a location adjacent the center to a location adjacent the outer edge of the polishing pad. Each polishing region includes a series of spaced non-isosceles trapezoid groove structures having parallel base segments connecting two adjacent radial feeder grooves to form leg segments. The series of non-isosceles trapezoid groove structures extend from adjacent the outer edge toward the center of the polishing pad with the perimeter of the series of trapezoid structures also being a trapezoid.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
MYPI2018001181A MY201686A (en) | 2018-06-28 | 2018-06-28 | Trapezoidal cmp groove pattern |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
MYPI2018001181A MY201686A (en) | 2018-06-28 | 2018-06-28 | Trapezoidal cmp groove pattern |
Publications (1)
Publication Number | Publication Date |
---|---|
MY201686A true MY201686A (en) | 2024-03-13 |
Family
ID=90885549
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
MYPI2018001181A MY201686A (en) | 2018-06-28 | 2018-06-28 | Trapezoidal cmp groove pattern |
Country Status (1)
Country | Link |
---|---|
MY (1) | MY201686A (en) |
-
2018
- 2018-06-28 MY MYPI2018001181A patent/MY201686A/en unknown
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