MY180642A - Ultra-responsive phase shifters for depletion mode silicon modulators - Google Patents

Ultra-responsive phase shifters for depletion mode silicon modulators

Info

Publication number
MY180642A
MY180642A MYPI2015704103A MYPI2015704103A MY180642A MY 180642 A MY180642 A MY 180642A MY PI2015704103 A MYPI2015704103 A MY PI2015704103A MY PI2015704103 A MYPI2015704103 A MY PI2015704103A MY 180642 A MY180642 A MY 180642A
Authority
MY
Malaysia
Prior art keywords
low
ultra
phase shifters
modulators
phase shifter
Prior art date
Application number
MYPI2015704103A
Other languages
English (en)
Inventor
Yang Liu
Tom Baehr-Jones
Original Assignee
Coriant Advanced Tech Llc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Coriant Advanced Tech Llc filed Critical Coriant Advanced Tech Llc
Publication of MY180642A publication Critical patent/MY180642A/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
    • G02F1/025—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction in an optical waveguide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference
    • G02F1/225—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference in an optical waveguide structure
    • G02F1/2257—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference in an optical waveguide structure the optical waveguides being made of semiconducting material
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/011—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  in optical waveguides, not otherwise provided for in this subclass
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/011—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  in optical waveguides, not otherwise provided for in this subclass
    • G02F1/0113—Glass-based, e.g. silica-based, optical waveguides
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
    • G02F1/0151—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction modulating the refractive index
    • G02F1/0152—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction modulating the refractive index using free carrier effects, e.g. plasma effect
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure
    • G02F1/0353—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure involving an electro-optic TE-TM mode conversion
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure
    • G02F1/0356—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure controlled by a high-frequency electromagnetic wave component in an electric waveguide structure

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
MYPI2015704103A 2013-05-14 2013-10-22 Ultra-responsive phase shifters for depletion mode silicon modulators MY180642A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US201361823344P 2013-05-14 2013-05-14

Publications (1)

Publication Number Publication Date
MY180642A true MY180642A (en) 2020-12-04

Family

ID=51895837

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI2015704103A MY180642A (en) 2013-05-14 2013-10-22 Ultra-responsive phase shifters for depletion mode silicon modulators

Country Status (7)

Country Link
US (6) US9158138B2 (enExample)
EP (1) EP2997415B1 (enExample)
JP (1) JP2016524722A (enExample)
CN (1) CN105474077A (enExample)
MY (1) MY180642A (enExample)
SG (1) SG11201509355SA (enExample)
WO (1) WO2014185951A1 (enExample)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SG192778A1 (en) * 2011-02-15 2013-09-30 Luxmux Technology Corp A fully integrated complementary metal oxide semiconductor (cmos) fourier transform infrared (ftir) spectrometer and raman spectrometer
US9372381B2 (en) * 2012-10-18 2016-06-21 Acacia Communications, Inc. Robust modulator circuits using lateral doping junctions
SG11201509355SA (en) * 2013-05-14 2015-12-30 Coriant Advanced Technology Llc Ultra-responsive phase shifters for depletion mode silicon modulators
US10216016B2 (en) * 2014-07-25 2019-02-26 Cornell University Linear optical phase modulators
US11054674B2 (en) 2018-10-24 2021-07-06 Rockley Photonics Limited PN-junction phase modulator in a large silicon waveguide platform
CN106154680A (zh) * 2015-04-14 2016-11-23 中兴通讯股份有限公司 一种硅基调制器及其制备方法
JP2017045009A (ja) * 2015-08-28 2017-03-02 日本電信電話株式会社 光変調器
US9520467B1 (en) * 2015-08-31 2016-12-13 Taiwan Semiconductor Manufacturing Company Ltd. Field effect transistor structure and manufacturing method thereof
US10514503B2 (en) 2016-03-04 2019-12-24 The Governing Council Of The University Of Toronto System and method for manufacturing a semiconductor junction
JP6457440B2 (ja) 2016-07-06 2019-01-23 株式会社フジクラ 光変調器および光変調素子の製造方法
GB2559458B (en) 2016-12-02 2020-06-03 Rockley Photonics Ltd Waveguide device and method of doping a waveguide device
GB2559252B (en) 2016-12-02 2020-06-03 Rockley Photonics Ltd Waveguide optoelectronic device
GB2549606B (en) * 2017-03-24 2019-09-04 Rockley Photonics Ltd Optical modulator
JP2019113660A (ja) 2017-12-22 2019-07-11 ルネサスエレクトロニクス株式会社 半導体装置
JP7371013B2 (ja) 2018-01-26 2023-10-30 シエナ コーポレーション 最適化されたドーピングプロファイルおよび異なる遷移領域の厚さを有するシリコンベース変調器
FR3078437B1 (fr) * 2018-02-23 2022-02-04 St Microelectronics Crolles 2 Sas Jonction pn
US10838282B2 (en) * 2018-05-04 2020-11-17 Mitsubishi Electric Research Laboratories, Inc. Optical ring circuit with electrical filter
US11269201B2 (en) 2019-04-19 2022-03-08 Source Photonics, Inc. Multi-layer p-n junction based phase shifter and methods of manufacturing and using the same
GB2586881B (en) 2019-09-09 2023-08-16 Rockley Photonics Ltd Optoelectronic device and method of manufacturing an optoelectronic device
US11086189B1 (en) * 2020-01-10 2021-08-10 Inphi Corporation Silicon optical modulator, method for making the same
CN111579571B (zh) * 2020-06-02 2022-11-25 中国工程物理研究院核物理与化学研究所 一种基于峰形拟合的逐步逼近刻度γ能谱高能区的方法
CN111999917B (zh) * 2020-08-18 2022-03-25 华中科技大学 一种电光移相器掺杂结构、制备方法及电光调制器
US11874538B2 (en) * 2020-09-30 2024-01-16 Taiwan Semiconductor Manufacturing Company Limited Apparatus and method for generating an optical signal
CN115185111B (zh) * 2021-04-07 2025-06-13 华为技术有限公司 Pn结制备的方法、pn结和调制器
CN114217459B (zh) * 2021-12-16 2025-03-04 武汉光谷信息光电子创新中心有限公司 微环调制器及其制备方法
JP7697398B2 (ja) * 2022-04-15 2025-06-24 株式会社デンソー 光位相変調器
US12386211B2 (en) 2022-10-20 2025-08-12 Nokia Solutions And Networks Oy Silicon optical phase shifter with a series of P—N junctions
WO2024129162A1 (en) * 2022-12-14 2024-06-20 X Development Llc Phase shifter for low optical loss in optical communications systems

Family Cites Families (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1463886A (en) 1973-06-29 1977-02-09 Hughes Aircraft Co Processes for fabricating monolithic optoelectronic semicon ductor devices
US5771257A (en) 1996-12-26 1998-06-23 Mitsubishi Denki Kabushiki Kaisha Light absorption modulator and integrated semiconductor laser and modulator
GB2348293A (en) * 1999-03-25 2000-09-27 Bookham Technology Ltd Optical phase modulator
US6190979B1 (en) * 1999-07-12 2001-02-20 International Business Machines Corporation Method for fabricating dual workfunction devices on a semiconductor substrate using counter-doping and gapfill
JP2001358153A (ja) 2000-06-15 2001-12-26 Fuji Electric Co Ltd 半導体装置
US6556610B1 (en) 2001-04-12 2003-04-29 E20 Communications, Inc. Semiconductor lasers
US6846729B2 (en) * 2001-10-01 2005-01-25 International Rectifier Corporation Process for counter doping N-type silicon in Schottky device Ti silicide barrier
US6912079B2 (en) 2003-02-14 2005-06-28 Intel Corporation Method and apparatus for phase shifting an optical beam in an optical device
US6845198B2 (en) * 2003-03-25 2005-01-18 Sioptical, Inc. High-speed silicon-based electro-optic modulator
EP2253991B1 (en) * 2003-06-19 2012-03-14 Nippon Telegraph And Telephone Corporation Optical modulation apparatus
US7085443B1 (en) * 2003-08-15 2006-08-01 Luxtera, Inc. Doping profiles in PN diode optical modulators
US7116853B2 (en) 2003-08-15 2006-10-03 Luxtera, Inc. PN diode optical modulators fabricated in rib waveguides
US20060133754A1 (en) * 2004-12-21 2006-06-22 Vipulkumar Patel Ultra low-loss CMOS compatible silicon waveguides
WO2007086888A2 (en) * 2005-03-04 2007-08-02 Cornell Research Foundation, Inc. Electro-optic modulation
JP2007324474A (ja) * 2006-06-02 2007-12-13 Sumitomo Electric Ind Ltd 光集積素子及びその製造方法
US8188563B2 (en) * 2006-07-21 2012-05-29 The Regents Of The University Of California Shallow-trench-isolation (STI)-bounded single-photon CMOS photodetector
JP5185537B2 (ja) * 2007-01-19 2013-04-17 富士通株式会社 光半導体装置およびその製造方法
US7651920B2 (en) * 2007-06-29 2010-01-26 Infineon Technologies Ag Noise reduction in semiconductor device using counter-doping
JP2009128694A (ja) * 2007-11-26 2009-06-11 Sharp Corp 光スイッチ素子
US8019185B2 (en) * 2008-02-14 2011-09-13 Hrl Laboratories, Llc Unit-cell array optical signal processor
US8149493B2 (en) * 2008-09-06 2012-04-03 Sifotonics Technologies (Usa) Inc. Electro-optic silicon modulator
US7747122B2 (en) * 2008-09-30 2010-06-29 Intel Corporation Method and apparatus for high speed silicon optical modulation using PN diode
WO2010098248A1 (ja) * 2009-02-25 2010-09-02 日本電気株式会社 光変調構造および光変調器
US8380016B1 (en) * 2009-06-09 2013-02-19 University Of Washington Through Its Center For Commercialization Geometries for electrooptic modulation with χ2 materials in silicon waveguides
US9002144B2 (en) 2009-09-10 2015-04-07 Nec Corporation Electro-optical modulator
GB2477935A (en) 2010-02-17 2011-08-24 Univ Surrey Electro-optic device with a waveguide rib
US8737772B2 (en) 2010-02-19 2014-05-27 Kotura, Inc. Reducing optical loss in an optical modulator using depletion region
JP5300807B2 (ja) * 2010-09-03 2013-09-25 株式会社東芝 光変調素子
US9110314B2 (en) * 2010-12-29 2015-08-18 Agency For Science, Technology And Research Optical modulator and a method of forming the same
US9159810B2 (en) * 2012-08-22 2015-10-13 Advanced Ion Beam Technology, Inc. Doping a non-planar semiconductor device
US8994107B2 (en) * 2012-08-27 2015-03-31 GlobalFoundries, Inc. Semiconductor devices and methods of forming the semiconductor devices including a retrograde well
CN103226252B (zh) * 2013-05-06 2016-05-18 中国科学院半导体研究所 一种提高耗尽型硅基电光调制器调制效率的掺杂结构
SG11201509355SA (en) * 2013-05-14 2015-12-30 Coriant Advanced Technology Llc Ultra-responsive phase shifters for depletion mode silicon modulators
US9939666B2 (en) * 2013-06-06 2018-04-10 Acacia Communications, Inc. Silicon electro-optical modulator
EP2829906B1 (en) * 2013-07-23 2018-11-28 IMEC vzw Carrier-depletion based silicon waveguide resonant cavity modulator with integrated optical power monitor

Also Published As

Publication number Publication date
US9638942B2 (en) 2017-05-02
JP2016524722A (ja) 2016-08-18
US20190265520A1 (en) 2019-08-29
US9158138B2 (en) 2015-10-13
EP2997415A4 (en) 2017-01-04
US20180364502A1 (en) 2018-12-20
US10908439B2 (en) 2021-02-02
SG11201509355SA (en) 2015-12-30
US9910302B2 (en) 2018-03-06
CN105474077A (zh) 2016-04-06
WO2014185951A1 (en) 2014-11-20
EP2997415A1 (en) 2016-03-23
US20170276971A1 (en) 2017-09-28
US20160062156A1 (en) 2016-03-03
US20180143464A1 (en) 2018-05-24
US10317710B2 (en) 2019-06-11
EP2997415B1 (en) 2019-09-18
US10082686B2 (en) 2018-09-25
US20140341497A1 (en) 2014-11-20

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