MY134851A - Process for ashing organic materials from substrates - Google Patents
Process for ashing organic materials from substratesInfo
- Publication number
- MY134851A MY134851A MYPI99000277A MYPI9900277A MY134851A MY 134851 A MY134851 A MY 134851A MY PI99000277 A MYPI99000277 A MY PI99000277A MY PI9900277 A MYPI9900277 A MY PI9900277A MY 134851 A MY134851 A MY 134851A
- Authority
- MY
- Malaysia
- Prior art keywords
- gas
- sulfur trioxide
- supplemental
- substrates
- organic materials
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31127—Etching organic layers
- H01L21/31133—Etching organic layers by chemical means
- H01L21/31138—Etching organic layers by chemical means by dry-etching
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/42—Stripping or agents therefor
- G03F7/427—Stripping or agents therefor using plasma means only
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/26—Cleaning or polishing of the conductive pattern
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Plasma & Fusion (AREA)
- Drying Of Semiconductors (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
Abstract
ASHING OF AN ORGANIC FILM FROM A SUBSTRATE IS CARRIED OUT BY PROVIDING A PLASMA.COMPRISING A GAS OR GAS MIXTURE SELECTED FROM THE FOLLOWING GROUPS: (A) SULFUR TRIOXIDE ALONE; (2) SULFUR TRIOXIDE PLUS ONE SUPPLEMENTAL GAS; AND (3) SULFUR TRIOXIDE PLUS AT LEAST TWO SUPPLEMENTAL GASES. ANY OF THE FOLLOWING GASES MAY BE EMPLOYED AS THE SUPPLEMENTAL GAS: WATER VAPOR, OZONE, HYDROGEN, NITROGEN, NITROGEN OXIDES, OR A HALOGENIDE SUCH AS TETRAFLUOROMETHANE, CHLORINE, NITROGEN TRIFLUORIDE. HEXAFLUOROETHANE, OR METHYLTRIFLUORIDE.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US1469598A | 1998-01-28 | 1998-01-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
MY134851A true MY134851A (en) | 2007-12-31 |
Family
ID=21767120
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
MYPI99000277A MY134851A (en) | 1998-01-28 | 1999-01-26 | Process for ashing organic materials from substrates |
Country Status (9)
Country | Link |
---|---|
EP (1) | EP1074043A4 (en) |
JP (1) | JP3358808B2 (en) |
KR (1) | KR100377711B1 (en) |
CN (1) | CN1154159C (en) |
CA (1) | CA2319018C (en) |
IL (1) | IL137513A (en) |
MY (1) | MY134851A (en) |
TW (1) | TWI239994B (en) |
WO (1) | WO1999039382A1 (en) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6231775B1 (en) * | 1998-01-28 | 2001-05-15 | Anon, Inc. | Process for ashing organic materials from substrates |
US20050136681A1 (en) * | 2003-12-23 | 2005-06-23 | Tokyo Electron Limited | Method and apparatus for removing photoresist from a substrate |
KR100559947B1 (en) * | 2004-08-18 | 2006-03-13 | 동부아남반도체 주식회사 | Method for post treatment of metal wiring of semiconductor device |
US7387968B2 (en) | 2005-11-08 | 2008-06-17 | Tokyo Electron Limited | Batch photoresist dry strip and ash system and process |
US7381651B2 (en) * | 2006-03-22 | 2008-06-03 | Axcelis Technologies, Inc. | Processes for monitoring the levels of oxygen and/or nitrogen species in a substantially oxygen and nitrogen-free plasma ashing process |
US8043434B2 (en) * | 2008-10-23 | 2011-10-25 | Lam Research Corporation | Method and apparatus for removing photoresist |
CN104599962A (en) * | 2014-12-29 | 2015-05-06 | 上海华虹宏力半导体制造有限公司 | Thick aluminum etching polymer removing method |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59163826A (en) * | 1983-03-08 | 1984-09-14 | Toshiba Corp | Dry etching method |
EP0368732B1 (en) * | 1988-11-04 | 1995-06-28 | Fujitsu Limited | Process for forming resist mask pattern |
JPH0475323A (en) * | 1990-07-17 | 1992-03-10 | Seiko Epson Corp | Removal method of resist |
US5037506A (en) * | 1990-09-06 | 1991-08-06 | Subhash Gupta | Method of stripping layers of organic materials |
FR2673763A1 (en) * | 1991-03-06 | 1992-09-11 | Centre Nat Rech Scient | Method of anisotropic etching of polymers by plasma |
JP3084910B2 (en) * | 1992-03-18 | 2000-09-04 | ヤマハ株式会社 | Wiring formation method |
JPH05304089A (en) * | 1992-04-28 | 1993-11-16 | Dainippon Screen Mfg Co Ltd | Method and device of removing resist from surface of substrate |
JP2572924B2 (en) * | 1992-09-04 | 1997-01-16 | 醇 西脇 | Surface treatment method of metal by atmospheric pressure plasma |
US5550007A (en) * | 1993-05-28 | 1996-08-27 | Lucent Technologies Inc. | Surface-imaging technique for lithographic processes for device fabrication |
JP3391410B2 (en) * | 1993-09-17 | 2003-03-31 | 富士通株式会社 | How to remove resist mask |
US5824604A (en) * | 1996-01-23 | 1998-10-20 | Mattson Technology, Inc. | Hydrocarbon-enhanced dry stripping of photoresist |
US5763016A (en) * | 1996-12-19 | 1998-06-09 | Anon, Incorporated | Method of forming patterns in organic coatings films and layers |
-
1999
- 1999-01-26 KR KR10-2000-7008217A patent/KR100377711B1/en not_active IP Right Cessation
- 1999-01-26 CN CNB99802399XA patent/CN1154159C/en not_active Expired - Fee Related
- 1999-01-26 CA CA002319018A patent/CA2319018C/en not_active Expired - Fee Related
- 1999-01-26 JP JP2000529750A patent/JP3358808B2/en not_active Expired - Fee Related
- 1999-01-26 IL IL13751399A patent/IL137513A/en not_active IP Right Cessation
- 1999-01-26 MY MYPI99000277A patent/MY134851A/en unknown
- 1999-01-26 WO PCT/US1999/001560 patent/WO1999039382A1/en not_active Application Discontinuation
- 1999-01-26 EP EP99904261A patent/EP1074043A4/en not_active Ceased
- 1999-03-23 TW TW088101212A patent/TWI239994B/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
TWI239994B (en) | 2005-09-21 |
EP1074043A4 (en) | 2002-11-06 |
JP3358808B2 (en) | 2002-12-24 |
CA2319018A1 (en) | 1999-08-05 |
IL137513A0 (en) | 2001-07-24 |
IL137513A (en) | 2004-05-12 |
EP1074043A1 (en) | 2001-02-07 |
CA2319018C (en) | 2004-08-24 |
JP2002502125A (en) | 2002-01-22 |
CN1154159C (en) | 2004-06-16 |
WO1999039382A1 (en) | 1999-08-05 |
KR20010040431A (en) | 2001-05-15 |
CN1289452A (en) | 2001-03-28 |
KR100377711B1 (en) | 2003-03-26 |
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