MY127672A - High speed ge channel heterostructures for field effect devices - Google Patents

High speed ge channel heterostructures for field effect devices

Info

Publication number
MY127672A
MY127672A MYPI20000966A MYPI20000966A MY127672A MY 127672 A MY127672 A MY 127672A MY PI20000966 A MYPI20000966 A MY PI20000966A MY PI20000966 A MYPI20000966 A MY PI20000966A MY 127672 A MY127672 A MY 127672A
Authority
MY
Malaysia
Prior art keywords
channel
mobility
field effect
low temperatures
compressively strained
Prior art date
Application number
MYPI20000966A
Inventor
Jack O Chu
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Publication of MY127672A publication Critical patent/MY127672A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/778—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface
    • H01L29/7782—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with confinement of carriers by at least two heterojunctions, e.g. DHHEMT, quantum well HEMT, DHMODFET

Landscapes

  • Microelectronics & Electronic Packaging (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Junction Field-Effect Transistors (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Thin Film Transistor (AREA)
  • Recrystallisation Techniques (AREA)
  • Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)
  • Acyclic And Carbocyclic Compounds In Medicinal Compositions (AREA)

Abstract

A METHOD AND A LAYERED HETEROSTRUCTURE FOR FORMING HIGH MOBILITY GE CHANNEL FIELD EFFECT TRANSISTORS IS DESCRIBED INCORPORATING A PLURALITY OF SEMICONDUCTOR LAYERS ON A SEMICONDUCTOR SUBSTRATE, AND A CHANNEL STRUCTURE OF A COMPRESSIVELY STRAINED EPITAXIAL GE LAYER HAVING A HIGHER BARRIER OR A DEEPER CONFINING QUANTUM WELL AND HAVING EXTREMELY HIGH HOLE MOBILITY FOR COMPLEMENTARY MODFETS AND MOSFETS. THE INVENTION OVERCOMES THE PROBLEM OF A LIMITED HOLE MOBILITY DUE TO ALLOY SCATTERING FOR A P-CHANNEL DEVICE WITH ONLY A SINGLE COMPRESSIVELY STRAINED SIGE CHANNEL LAYER. THIS INVENTION FURTHER PROVIDES IMPROVEMENTS IN MOBILITY AND TRANSCONDUCTANCE OVER DEEP SUBMICRON STATE-OF-THE ART SI PMOSFETS IN ADDITION TO HAVING A BROAD TEMPERATURE OPERATION REGIME FROM ABOVE ROOM TEMPERATURE (425 K) DOWN TO CRYOGENIC LOW TEMPERATURES (0.4 K) WHERE AT LOW TEMPERATURES EVEN HIGH DEVICE PERFORMANCES ARE ACHIEVABLE.
MYPI20000966A 1999-03-12 2000-03-11 High speed ge channel heterostructures for field effect devices MY127672A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US12429999P 1999-03-12 1999-03-12

Publications (1)

Publication Number Publication Date
MY127672A true MY127672A (en) 2006-12-29

Family

ID=22414018

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI20000966A MY127672A (en) 1999-03-12 2000-03-11 High speed ge channel heterostructures for field effect devices

Country Status (9)

Country Link
EP (1) EP1169737B1 (en)
JP (2) JP3974329B2 (en)
KR (1) KR100441469B1 (en)
CN (1) CN1331240C (en)
AT (1) ATE394794T1 (en)
DE (1) DE60038793D1 (en)
MY (1) MY127672A (en)
TW (1) TW477025B (en)
WO (1) WO2000054338A1 (en)

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Also Published As

Publication number Publication date
JP2002539613A (en) 2002-11-19
EP1169737B1 (en) 2008-05-07
KR100441469B1 (en) 2004-07-23
TW477025B (en) 2002-02-21
JP4912123B2 (en) 2012-04-11
JP2007165867A (en) 2007-06-28
DE60038793D1 (en) 2008-06-19
WO2000054338A1 (en) 2000-09-14
CN1331240C (en) 2007-08-08
EP1169737A1 (en) 2002-01-09
JP3974329B2 (en) 2007-09-12
KR20010102557A (en) 2001-11-15
CN1343374A (en) 2002-04-03
ATE394794T1 (en) 2008-05-15

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