MXPA02010965A - Sistemas multiflexores opticos reconfigurables, monoliticos y metodos para su manufactura. - Google Patents

Sistemas multiflexores opticos reconfigurables, monoliticos y metodos para su manufactura.

Info

Publication number
MXPA02010965A
MXPA02010965A MXPA02010965A MXPA02010965A MXPA02010965A MX PA02010965 A MXPA02010965 A MX PA02010965A MX PA02010965 A MXPA02010965 A MX PA02010965A MX PA02010965 A MXPA02010965 A MX PA02010965A MX PA02010965 A MXPA02010965 A MX PA02010965A
Authority
MX
Mexico
Prior art keywords
silicon
optical
multiplexer
demultiplexer
switches
Prior art date
Application number
MXPA02010965A
Other languages
English (en)
Inventor
Jingkuang Chen
Original Assignee
Xerox Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xerox Corp filed Critical Xerox Corp
Publication of MXPA02010965A publication Critical patent/MXPA02010965A/es

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/356—Switching arrangements, i.e. number of input/output ports and interconnection types in an optical cross-connect device, e.g. routing and switching aspects of interconnecting different paths propagating different wavelengths to (re)configure the various input and output links
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
    • G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
    • G02B6/12019—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by the optical interconnection to or from the AWG devices, e.g. integration or coupling with lasers or photodiodes
    • G02B6/12021—Comprising cascaded AWG devices; AWG multipass configuration; Plural AWG devices integrated on a single chip
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
    • G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
    • G02B6/12033—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by means for configuring the device, e.g. moveable element for wavelength tuning
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29379—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device
    • G02B6/2938—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device for multiplexing or demultiplexing, i.e. combining or separating wavelengths, e.g. 1xN, NxM
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3596—With planar waveguide arrangement, i.e. in a substrate, regardless if actuating mechanism is outside the substrate
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12035—Materials
    • G02B2006/12061—Silicon
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12097—Ridge, rib or the like
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12107—Grating
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/12145—Switch
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/12164—Multiplexing; Demultiplexing
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3502—Optical coupling means having switching means involving direct waveguide displacement, e.g. cantilever type waveguide displacement involving waveguide bending, or displacing an interposed waveguide between stationary waveguides
    • G02B6/3508—Lateral or transverse displacement of the whole waveguides, e.g. by varying the distance between opposed waveguide ends, or by mutual lateral displacement of opposed waveguide ends
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Optical Integrated Circuits (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

Esta invencion se relaciona con un sistema de micromaquinado o microelectromecanico optico basado en multiplexores y metodos de multiplexion.
MXPA02010965A 2001-11-08 2002-11-07 Sistemas multiflexores opticos reconfigurables, monoliticos y metodos para su manufactura. MXPA02010965A (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/986,395 US6658179B2 (en) 2001-11-08 2001-11-08 Monolithic reconfigurable optical multiplexer systems and methods

Publications (1)

Publication Number Publication Date
MXPA02010965A true MXPA02010965A (es) 2005-02-17

Family

ID=25532371

Family Applications (1)

Application Number Title Priority Date Filing Date
MXPA02010965A MXPA02010965A (es) 2001-11-08 2002-11-07 Sistemas multiflexores opticos reconfigurables, monoliticos y metodos para su manufactura.

Country Status (7)

Country Link
US (2) US6658179B2 (es)
EP (1) EP1310808B1 (es)
JP (1) JP2003185856A (es)
BR (1) BR0204570A (es)
CA (1) CA2411012C (es)
DE (1) DE60221947T2 (es)
MX (1) MXPA02010965A (es)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020131683A1 (en) * 2001-03-15 2002-09-19 Doerr Christopher Richard Planar lightwave wavelength blocker devices using micromachines
JP4094407B2 (ja) * 2001-11-15 2008-06-04 セイコーインスツル株式会社 光スイッチ
US7054519B1 (en) * 2003-03-10 2006-05-30 Active Optical Networks, Inc. Reconfigurable optical add drop multiplexers with integrated power equalization
US6985651B2 (en) * 2003-08-05 2006-01-10 Xerox Corporation Thermal actuator with offset beam segment neutral axes and an optical waveguide switch including the same
US6985650B2 (en) * 2003-08-05 2006-01-10 Xerox Corporation Thermal actuator and an optical waveguide switch including the same
US6983088B2 (en) * 2003-08-05 2006-01-03 Xerox Corporation Thermal actuator and an optical waveguide switch including the same
US20060088242A1 (en) * 2003-12-31 2006-04-27 Vlad Novotny Optical switches with uniaxial mirrors
JP4422624B2 (ja) * 2004-03-03 2010-02-24 日本航空電子工業株式会社 微小可動デバイス及びその作製方法
JP2008511039A (ja) * 2004-08-24 2008-04-10 オークランド・ユニサーヴィシズ・リミテッド 光ファイバースイッチ
US7162112B2 (en) * 2004-11-23 2007-01-09 Xerox Corporation Microfabrication process for control of waveguide gap size
US7656569B2 (en) 2004-12-03 2010-02-02 Searete Llc Vision modification with reflected image
US7486988B2 (en) 2004-12-03 2009-02-03 Searete Llc Method and system for adaptive vision modification
US8104892B2 (en) 2004-12-03 2012-01-31 The Invention Science Fund I, Llc Vision modification with reflected image
US9155483B2 (en) 2004-12-03 2015-10-13 The Invention Science Fund I, Llc Vision modification with reflected image
US7931373B2 (en) 2004-12-03 2011-04-26 The Invention Science Fund I, Llc Vision modification with reflected image
US8244342B2 (en) 2004-12-03 2012-08-14 The Invention Science Fund I, Llc Method and system for adaptive vision modification
US20080058597A1 (en) * 2006-09-06 2008-03-06 Innurvation Llc Imaging and Locating Systems and Methods for a Swallowable Sensor Device
US20080112885A1 (en) 2006-09-06 2008-05-15 Innurvation, Inc. System and Method for Acoustic Data Transmission
WO2008030480A2 (en) * 2006-09-06 2008-03-13 Innurvation, Inc. Ingestible low power sensor device and system for communicating with same
US20090088618A1 (en) 2007-10-01 2009-04-02 Arneson Michael R System and Method for Manufacturing a Swallowable Sensor Device
US9197470B2 (en) 2007-10-05 2015-11-24 Innurvation, Inc. Data transmission via multi-path channels using orthogonal multi-frequency signals with differential phase shift keying modulation
WO2010005571A2 (en) 2008-07-09 2010-01-14 Innurvation, Inc. Displaying image data from a scanner capsule
US9192353B2 (en) * 2009-10-27 2015-11-24 Innurvation, Inc. Data transmission via wide band acoustic channels
US8647259B2 (en) 2010-03-26 2014-02-11 Innurvation, Inc. Ultrasound scanning capsule endoscope (USCE)
EP2771733B1 (en) 2011-10-28 2018-07-25 NeoPhotonics Corporation Scalable optical switches and switching modules
CN103754817B (zh) * 2014-01-28 2015-10-28 华进半导体封装先导技术研发中心有限公司 三维垂直互连硅基光电同传器件及其制作方法
EP2940500A1 (en) 2014-04-29 2015-11-04 Karlsruher Institut für Technologie An integrated optical circuit and methods for its manufacturing and reconfiguring
US9742520B1 (en) 2014-09-19 2017-08-22 Neophotonics Corporation Optical switching system with a colorless, directionless, and contentionless ROADM connected to unamplified drop channels
WO2019195220A1 (en) * 2018-04-03 2019-10-10 Corning Research & Development Corporation Waveguide substrates and waveguide substrate assemblies having waveguide routing schemes and methods for fabricating the same
EP3776035B1 (en) 2018-04-03 2022-11-09 Corning Research & Development Corporation Waveguide substrates and waveguide substrate connector assemblies having waveguides and alignment features and methods of fabricating the same
DE102020209122A1 (de) 2020-07-21 2022-01-27 Robert Bosch Gesellschaft mit beschränkter Haftung Herstellungsverfahren für ein mikrooptoelektromechanisches Bauelement und entsprechendes mikrooptoelektromechanisches Bauelement
US11609395B2 (en) 2021-01-11 2023-03-21 Corning Research & Development Corporation Waveguide substrates and assemblies including the same
KR102644811B1 (ko) * 2021-01-19 2024-03-08 한국과학기술원 Mems 광 스위치를 활용하는 광 위상 배열 칩 및 그 제조 방법

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4859022A (en) * 1988-07-11 1989-08-22 Gte Products Corporation Moving "S" fiber optical switch
US5002354A (en) 1989-10-16 1991-03-26 Gte Laboratories Incorporated High-extinction 2×2 integrated optical changeover switches
US5002350A (en) 1990-02-26 1991-03-26 At&T Bell Laboratories Optical multiplexer/demultiplexer
US5261015A (en) 1991-11-21 1993-11-09 Ametek, Inc. Magnetically-actuatable opto-mechanical on/off switch and systems for use therewith
FR2729232A1 (fr) 1995-01-10 1996-07-12 Commissariat Energie Atomique Dispositif optique pour application optomecanique
JPH10227986A (ja) * 1997-02-17 1998-08-25 Hitachi Ltd 光スイッチとその製造方法及び光スイッチを用いた光通信機器
US5828800A (en) * 1997-06-23 1998-10-27 Lucent Technologies Inc. Self-aligned mechanical M×N optical switch
FR2766920B1 (fr) * 1997-07-31 1999-08-27 Commissariat Energie Atomique Micromonochromateur et procede de realisation de celui-ci
FR2769380B1 (fr) * 1997-10-06 2000-12-01 Commissariat Energie Atomique Systeme de positionnement d'une microstructure optique
US5999290A (en) * 1997-10-27 1999-12-07 Lucent Technologies Inc. Optical add/drop multiplexer having complementary stages
JP3062881B2 (ja) * 1998-05-12 2000-07-12 株式会社日立製作所 光スイッチ
US6421477B1 (en) * 1998-07-13 2002-07-16 Mimaki Electronic Component Co., Ltd. Optical switch
US6148124A (en) * 1998-11-20 2000-11-14 Lucent Technologies Wavelength division multiplexed optical networks
US6192171B1 (en) * 1999-02-26 2001-02-20 Albert Goodman Dynamic fiber optic switch with artificial muscle
US6445841B1 (en) * 1999-05-28 2002-09-03 Omm, Inc. Optomechanical matrix switches including collimator arrays
JP2003508814A (ja) * 1999-09-08 2003-03-04 コーニング インコーポレイテッド ハイブリッド型集積光アドドロップマルチプレクサ
US6363183B1 (en) 2000-01-04 2002-03-26 Seungug Koh Reconfigurable and scalable intergrated optic waveguide add/drop multiplexing element using micro-opto-electro-mechanical systems and methods of fabricating thereof
US6574385B2 (en) * 2000-01-18 2003-06-03 Jds Uniphase Inc. M×N optical switch with improved stability
US6625356B2 (en) * 2000-04-12 2003-09-23 Lightwave Microsystems, Corp. Micro-mechanical waveguide optical devices
US6453087B2 (en) 2000-04-28 2002-09-17 Confluent Photonics Co. Miniature monolithic optical add-drop multiplexer
US6647168B2 (en) * 2000-09-19 2003-11-11 Newport Opticom, Inc. Low loss optical switching system

Also Published As

Publication number Publication date
BR0204570A (pt) 2004-06-08
JP2003185856A (ja) 2003-07-03
CA2411012C (en) 2007-08-07
US6990265B2 (en) 2006-01-24
DE60221947D1 (de) 2007-10-04
US20040114856A1 (en) 2004-06-17
EP1310808B1 (en) 2007-08-22
CA2411012A1 (en) 2003-05-08
US6658179B2 (en) 2003-12-02
US20030086641A1 (en) 2003-05-08
EP1310808A3 (en) 2004-11-03
EP1310808A2 (en) 2003-05-14
DE60221947T2 (de) 2007-12-20

Similar Documents

Publication Publication Date Title
MXPA02010965A (es) Sistemas multiflexores opticos reconfigurables, monoliticos y metodos para su manufactura.
CA2198836A1 (en) Optical Wavelength Multiplexer/Demultiplexer
WO2003079058A3 (en) Fiber optic devices having volume bragg grating elements
EP0887963A3 (en) Cascaded optical multiplexing devices
AU8672498A (en) Dynamically reconfigurable optical add-drop multiplexers for wdm optical communication systems
EP0731576A3 (en) Gain equalization using monolithic planar waveguide grating multiplexer and demultiplexer
CA2335498A1 (en) Segmented complex fiber gratings
EP0847158A3 (en) An optical wavelength multiplexing and demultiplexing device and an optical transmission system using the same
WO2002075999A3 (en) Method and apparatus for interconnecting a plurality of optical transducers with a wavelength division multiplexed optical switch
GB0116067D0 (en) Arrayed waveguide grating and optical communication system using arrayed waveguide grating
WO2004057376A3 (en) Optical multiplexing device
NO20010771D0 (no) Optisk kommunikasjonssystem
EP1102096A3 (en) Optical crossconnect using tilting mirror MEMS array
EP0296247A4 (en) Optical synthesizing/branching filter and optical module using the same
EP1244327A2 (en) Four-port wavelength selective crossbar switches
EP1148358A3 (en) An arrayed waveguide grating type optical multiplexer/demultiplexer
DE69836670D1 (de) Optischer Ein-/Ausfügemultiplexer
WO2003038501A3 (en) Arrayed waveguide grating
EP1437611B8 (en) Array waveguide diffraction grating type optical multiplexer/branching filter
EP1162856A3 (en) Free space optical switch with lenses for re-collimating the light
CA2328696A1 (en) Periodic arrayed waveguide grating multiplexer/demultiplexer
EP0902311A3 (en) Article comprising a photostrictive switching element
EP1231811A3 (en) Transparent optical-electronic-optical switch
US7330659B2 (en) Wavelength filter that operates on sets of wavelength channels
WO2002011339A3 (en) Multiplexer, demultiplexer and add/drop multiplexer for single mode optical fiber communication links

Legal Events

Date Code Title Description
FG Grant or registration