MX163264B - Composicion fotorresistente de tipo positivo - Google Patents

Composicion fotorresistente de tipo positivo

Info

Publication number
MX163264B
MX163264B MX200530A MX20053084A MX163264B MX 163264 B MX163264 B MX 163264B MX 200530 A MX200530 A MX 200530A MX 20053084 A MX20053084 A MX 20053084A MX 163264 B MX163264 B MX 163264B
Authority
MX
Mexico
Prior art keywords
photorresistant
composition
positive type
positive
type
Prior art date
Application number
MX200530A
Other languages
English (en)
Inventor
Akihiro Furuta
Makoto Hanabata
Seimei Yasui
Osamu Hiroaki
Naoyoshi Jinno
Original Assignee
Sumitomo Chemical Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP3631883A external-priority patent/JPS59162542A/ja
Priority claimed from JP1625884A external-priority patent/JPS60159846A/ja
Application filed by Sumitomo Chemical Co filed Critical Sumitomo Chemical Co
Publication of MX163264B publication Critical patent/MX163264B/es

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/22—Exposing sequentially with the same light pattern different positions of the same surface
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides
    • G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
    • G03F7/0233—Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides
    • G03F7/0236—Condensation products of carbonyl compounds and phenolic compounds, e.g. novolak resins
MX200530A 1983-03-04 1984-03-02 Composicion fotorresistente de tipo positivo MX163264B (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP3631883A JPS59162542A (ja) 1983-03-04 1983-03-04 ポジ型フオトレジスト組成物
JP1625884A JPS60159846A (ja) 1984-01-31 1984-01-31 ポジ型フオトレジスト組成物

Publications (1)

Publication Number Publication Date
MX163264B true MX163264B (es) 1992-03-30

Family

ID=26352549

Family Applications (1)

Application Number Title Priority Date Filing Date
MX200530A MX163264B (es) 1983-03-04 1984-03-02 Composicion fotorresistente de tipo positivo

Country Status (7)

Country Link
US (1) US4863829A (es)
EP (1) EP0118291B1 (es)
KR (1) KR920003435B1 (es)
CA (1) CA1255952A (es)
DE (1) DE3482665D1 (es)
MX (1) MX163264B (es)
SG (1) SG9892G (es)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0196031A3 (en) * 1985-03-22 1987-12-23 Fuji Photo Film Co., Ltd. Light-sensitive compositions and light-sensitive materials
JPH0654384B2 (ja) * 1985-08-09 1994-07-20 東京応化工業株式会社 ポジ型ホトレジスト組成物
JPH0650396B2 (ja) * 1985-08-09 1994-06-29 東京応化工業株式会社 ポジ型ホトレジスト組成物
CA1279430C (en) * 1985-12-06 1991-01-22 Takashi Kubota High-molecular-weight soluble novolak resin and process for preparation thereof
DE3751743T2 (de) * 1986-03-28 1996-11-14 Japan Synthetic Rubber Co Ltd Positiv arbeitende photoempfindliche Kunststoffzusammensetzung
JPH0654388B2 (ja) * 1986-05-02 1994-07-20 東京応化工業株式会社 ポジ型ホトレジスト組成物
US5128230A (en) * 1986-12-23 1992-07-07 Shipley Company Inc. Quinone diazide containing photoresist composition utilizing mixed solvent of ethyl lactate, anisole and amyl acetate
US5238776A (en) * 1986-12-23 1993-08-24 Shipley Company Inc. Photoresist composition containing block copolymer resin and positive-working o-quinone diazide or negative-working azide sensitizer compound
US5130410A (en) * 1986-12-23 1992-07-14 Shipley Company Inc. Alternating and block copolymer resins
US4873176A (en) * 1987-08-28 1989-10-10 Shipley Company Inc. Reticulation resistant photoresist coating
US5419995A (en) * 1987-10-13 1995-05-30 Shipley Company Inc. Photoresist composition with alternating or block copolymer resins and positive-working o-quinone diazide or negative-working azide sensitizer compound
JP2645587B2 (ja) * 1989-03-29 1997-08-25 富士写真フイルム株式会社 微細パターン形成材料及び微細パターン形成方法
US5132376A (en) * 1989-09-08 1992-07-21 Ocg Microelectronic Materials, Inc. Process for selective removal of dimeric species from phenolic polymers
US5151339A (en) * 1989-09-08 1992-09-29 Ocg Microelectronic Materials, Inc. Photoresist composition containing diazoquinone photosensitizer and novalak resin characterized by the complete and selective removal of dimeric species from the novolak resin
DE4013575C2 (de) * 1990-04-27 1994-08-11 Basf Ag Verfahren zur Herstellung negativer Reliefkopien
US5268256A (en) * 1990-08-02 1993-12-07 Ppg Industries, Inc. Photoimageable electrodepositable photoresist composition for producing non-tacky films
DE69130691T2 (de) * 1990-08-02 1999-07-22 Ppg Industries Inc Lichtempfindliche, elektroabscheidbare Photoresistzusammensetzung
EP0677182B1 (en) * 1992-12-29 2000-03-08 Clariant Finance (BVI) Limited Method for forming a novolak resin for photoresist applications
US5413894A (en) * 1993-05-07 1995-05-09 Ocg Microelectronic Materials, Inc. High ortho-ortho bonded novolak binder resins and their use in radiation-sensitive compositions
EP0720052A1 (en) * 1994-12-27 1996-07-03 Mitsubishi Chemical Corporation Photosensitive composition and photosensitive lithographic printing plate
US5589553A (en) * 1995-03-29 1996-12-31 Shipley Company, L.L.C. Esterification product of aromatic novolak resin with quinone diazide sulfonyl group
US5932389A (en) * 1998-02-20 1999-08-03 Shipley Company, L.L.C. Controlled alternating and block copolymer resins
KR100447950B1 (ko) * 2001-11-22 2004-09-08 한솔제지주식회사 포지티브형 포토레지스트 조성물
JP2003279705A (ja) * 2002-03-25 2003-10-02 Sanyo Electric Co Ltd 反射防止部材
TW200523298A (en) 2003-08-04 2005-07-16 Honeywell Int Inc Coating composition optimization for via fill and photolithography applications and methods of preparation thereof
US8053159B2 (en) 2003-11-18 2011-11-08 Honeywell International Inc. Antireflective coatings for via fill and photolithography applications and methods of preparation thereof
US8642246B2 (en) 2007-02-26 2014-02-04 Honeywell International Inc. Compositions, coatings and films for tri-layer patterning applications and methods of preparation thereof
US7955782B2 (en) * 2008-09-22 2011-06-07 Honeywell International Inc. Bottom antireflective coatings exhibiting enhanced wet strip rates, bottom antireflective coating compositions for forming bottom antireflective coatings, and methods for fabricating the same
US8557877B2 (en) 2009-06-10 2013-10-15 Honeywell International Inc. Anti-reflective coatings for optically transparent substrates
US8864898B2 (en) 2011-05-31 2014-10-21 Honeywell International Inc. Coating formulations for optical elements
EP3194502A4 (en) 2015-04-13 2018-05-16 Honeywell International Inc. Polysiloxane formulations and coatings for optoelectronic applications

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1022005B (de) * 1953-06-16 1958-01-02 Distillers Co Yeast Ltd Verfahren zur Herstellung von Novolakharzen
US3634082A (en) * 1967-07-07 1972-01-11 Shipley Co Light-sensitive naphthoquinone diazide composition containing a polyvinyl ether
GB1227602A (es) * 1967-11-24 1971-04-07
US3759711A (en) * 1970-09-16 1973-09-18 Eastman Kodak Co Er compositions and elements nitrogen linked apperding quinone diazide light sensitive vinyl polym
US4022942A (en) * 1972-02-17 1977-05-10 Monsanto Company Process of preparing fibrous sheet from high-ortho phenolic resole resin varnish
DE2616992A1 (de) * 1976-04-17 1977-11-03 Agfa Gevaert Ag Lichtempfindliches material zur herstellung von druckformen und aetzresistagen
US4097463A (en) * 1977-01-10 1978-06-27 Monsanto Company Process for preparing high ortho novolac resins
DE3009873A1 (de) * 1979-03-16 1980-09-25 Daicel Chem Photoempfindliche masse
JPS55155013A (en) * 1979-05-21 1980-12-03 Sumitomo Bakelite Co Ltd Preparation of quick-curing phenol resin
JPS5660442A (en) * 1979-10-23 1981-05-25 Fuji Photo Film Co Ltd Photosensitive lithographic plate and method for making lithographic plate
US4299947A (en) * 1980-06-11 1981-11-10 Sumitomo Bakelite Company Limited Process for producing quick-curing phenolic resin
US4377631A (en) * 1981-06-22 1983-03-22 Philip A. Hunt Chemical Corporation Positive novolak photoresist compositions
US4529682A (en) * 1981-06-22 1985-07-16 Philip A. Hunt Chemical Corporation Positive photoresist composition with cresol-formaldehyde novolak resins
DE3274354D1 (en) * 1981-06-22 1987-01-08 Hunt Chem Corp Philip A Novolak resin and a positive photoresist composition containing the same

Also Published As

Publication number Publication date
EP0118291A2 (en) 1984-09-12
KR920003435B1 (ko) 1992-05-01
EP0118291B1 (en) 1990-07-11
DE3482665D1 (de) 1990-08-16
CA1255952A (en) 1989-06-20
KR840008381A (ko) 1984-12-14
EP0118291A3 (en) 1986-08-20
SG9892G (en) 1992-03-20
US4863829A (en) 1989-09-05

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