MD814C2 - Process for aluminum microarc anodizing - Google Patents

Process for aluminum microarc anodizing

Info

Publication number
MD814C2
MD814C2 MD96-0351A MD960351A MD814C2 MD 814 C2 MD814 C2 MD 814C2 MD 960351 A MD960351 A MD 960351A MD 814 C2 MD814 C2 MD 814C2
Authority
MD
Moldova
Prior art keywords
current density
aluminum
microarc
porosity
decrease
Prior art date
Application number
MD96-0351A
Other languages
Romanian (ro)
Russian (ru)
Other versions
MD814B1 (en
Inventor
Valeriu KAPLIN
Ефим БАДИНТЕР
Vladlen Vinogradov
Mihai Rotari
Ivan Grisanov
Ion Tanas
Cezar Canter
Leonid Spivac
Pavel Visokii
Filip Magalnic
Valerii Fedotov
Original Assignee
Сочиетате Пе Акциунь, Институтул Де Черчетэрь Штиинцифиче "Елири"
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Сочиетате Пе Акциунь, Институтул Де Черчетэрь Штиинцифиче "Елири" filed Critical Сочиетате Пе Акциунь, Институтул Де Черчетэрь Штиинцифиче "Елири"
Priority to MD96-0351A priority Critical patent/MD814C2/en
Publication of MD814B1 publication Critical patent/MD814B1/en
Publication of MD814C2 publication Critical patent/MD814C2/en

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Abstract

The invention relates to the aluminium anodization and may be applied in microelectronics for hybrid integrated circuit [ IC ] substrates manufacture.The purpose of the invention is the decrease of the coating roughness and porosity. The process is done in the microarc operation at the current density up to 15 A/dm2 and the labour voltage of 400-700 V. The decrease of the coating roughness and porosity is attained by anodization in the aqueous solution comprising 1,4-1,6 mass. % of hexametaphosphate, with the application of the pulsate voltage, which is raised up to the effective values within 5-8 min, then is reduced with 10-15% after decreasing the current density with 4-5 A/dm2 and is removed completely after reducing the current density up to 0,2-0,4 A/ dm2.
MD96-0351A 1986-03-18 1996-10-25 Process for aluminum microarc anodizing MD814C2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
MD96-0351A MD814C2 (en) 1986-03-18 1996-10-25 Process for aluminum microarc anodizing

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SU4057022 1986-03-18
MD96-0351A MD814C2 (en) 1986-03-18 1996-10-25 Process for aluminum microarc anodizing

Publications (2)

Publication Number Publication Date
MD814B1 MD814B1 (en) 1997-08-31
MD814C2 true MD814C2 (en) 1997-10-31

Family

ID=26640670

Family Applications (1)

Application Number Title Priority Date Filing Date
MD96-0351A MD814C2 (en) 1986-03-18 1996-10-25 Process for aluminum microarc anodizing

Country Status (1)

Country Link
MD (1) MD814C2 (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3293158A (en) * 1963-09-17 1966-12-20 Mcneill William Anodic spark reaction processes and articles
SU926083A1 (en) * 1980-01-04 1982-05-07 Институт Неорганической Химии Со Ан Ссср Method for electrolytically applying silicate coatings

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3293158A (en) * 1963-09-17 1966-12-20 Mcneill William Anodic spark reaction processes and articles
SU926083A1 (en) * 1980-01-04 1982-05-07 Институт Неорганической Химии Со Ан Ссср Method for electrolytically applying silicate coatings

Also Published As

Publication number Publication date
MD814B1 (en) 1997-08-31

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Legal Events

Date Code Title Description
FG4A Patent for invention issued
IF99 Valid patent on 19990615

Free format text: EXPIRES: 20060318