Inst De Ing Electronica Si Nanotehnologii D Ghitu Al Asm
Inst De Ing Electronic & Abreve & Scedil I Nanotehnologii D Ghi & Tcedil U Al A & Scedil M
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SPOSÓB WZROSTU MONOKRYSZTAŁÓW FAZY BETA TLENKU GALU (β-Ga<sub>2</sub>O<sub>3</sub>) Z ROZTOPU ZAWARTEGO W METALOWYM TYGLU POPRZEZ KONTROLĘ CIŚNIENIA CZĄSTKOWEGO O<sub>2</sub>
Reaction furnace for producing polycrystalline silicon, apparatus for producing polycrystalline silicon, method for producing polycrystalline silicon, and, polycrystalline silicon rod or polycrystalline silicon ingot