MD360Z - Procedeu de formare a suprafeţelor microstructurate ale substraturilor de siliciu - Google Patents

Procedeu de formare a suprafeţelor microstructurate ale substraturilor de siliciu Download PDF

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Publication number
MD360Z
MD360Z MDS20100158A MDS20100158A MD360Z MD 360 Z MD360 Z MD 360Z MD S20100158 A MDS20100158 A MD S20100158A MD S20100158 A MDS20100158 A MD S20100158A MD 360 Z MD360 Z MD 360Z
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MD
Moldova
Prior art keywords
silicon substrates
formation
microstructured surfaces
mechanical action
linear mechanical
Prior art date
Application number
MDS20100158A
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English (en)
Russian (ru)
Inventor
Евгений ХАРЯ
Дарья ГРАБКО
Ольга ШИКИМАКА
Дормидонт ШЕРБАН
Original Assignee
Институт Прикладной Физики Академии Наук Молдовы
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by Институт Прикладной Физики Академии Наук Молдовы filed Critical Институт Прикладной Физики Академии Наук Молдовы
Priority to MDS20100158A priority Critical patent/MD360Z/ro
Publication of MD360Y publication Critical patent/MD360Y/ro
Publication of MD360Z publication Critical patent/MD360Z/ro

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Abstract

Invenţia se referă la procedee de prelucrare a plăcilor semiconductoare şi poate fi utilizată pentru fabricareasubstraturilor de siliciu, utilizate pentru celule solare.Procedeul de formare a suprafeţelor microstructurate ale substraturilor de siliciu constă în aceea că suprafaţa substratului de siliciu este supusă unei acţiuni mecanice liniare cu decaparea selectivă ulterioară cu o soluţie alcalină apoasă, acţiunea mecanică liniară fiind efectuată prin intermediul indentorului Vickers la o sarcină nu mai mare de 0,3 g.
MDS20100158A 2010-09-23 2010-09-23 Procedeu de formare a suprafeţelor microstructurate ale substraturilor de siliciu MD360Z (ro)

Priority Applications (1)

Application Number Priority Date Filing Date Title
MDS20100158A MD360Z (ro) 2010-09-23 2010-09-23 Procedeu de formare a suprafeţelor microstructurate ale substraturilor de siliciu

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
MDS20100158A MD360Z (ro) 2010-09-23 2010-09-23 Procedeu de formare a suprafeţelor microstructurate ale substraturilor de siliciu

Publications (2)

Publication Number Publication Date
MD360Y MD360Y (ro) 2011-04-30
MD360Z true MD360Z (ro) 2011-11-30

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MDS20100158A MD360Z (ro) 2010-09-23 2010-09-23 Procedeu de formare a suprafeţelor microstructurate ale substraturilor de siliciu

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2056672C1 (ru) * 1993-06-08 1996-03-20 Евгений Макарович Соколов Способ текстурирования поверхности кремниевых пластин для солнечных элементов
RU2072585C1 (ru) * 1994-02-08 1997-01-27 Научно-исследовательский институт измерительных систем Способ подготовки полупроводниковых подложек
RU2340979C1 (ru) * 2004-10-28 2008-12-10 Мимасу Семикондактор Индастри Ко., Лтд Способ производства полупроводниковой подложки, полупроводниковая подложка для солнечных установок и раствор для травления
US20100216308A1 (en) * 2009-02-25 2010-08-26 Imec Method for etching 3d structures in a semiconductor substrate, including surface preparation
  • 2010

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2056672C1 (ru) * 1993-06-08 1996-03-20 Евгений Макарович Соколов Способ текстурирования поверхности кремниевых пластин для солнечных элементов
RU2072585C1 (ru) * 1994-02-08 1997-01-27 Научно-исследовательский институт измерительных систем Способ подготовки полупроводниковых подложек
RU2340979C1 (ru) * 2004-10-28 2008-12-10 Мимасу Семикондактор Индастри Ко., Лтд Способ производства полупроводниковой подложки, полупроводниковая подложка для солнечных установок и раствор для травления
US20100216308A1 (en) * 2009-02-25 2010-08-26 Imec Method for etching 3d structures in a semiconductor substrate, including surface preparation

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Крапивко Г.И., Хлопёнова И.А. Современные технические средства, комплексы и системы повышения коэффициента полезного действия кремниевых фотоэлектронных преобразователей методом лазерной гравировки, ААЭКС, № 2 (12), 2003 (Regăsită în Internet la 04.02.2011, url: http://aaecs.org/krapivko-gi-hlopenova-ia-povishenie-koafficienta-poleznogo-deistviya-kremnievih-fotoalektronnih-preobrazovatelei-metodom-lazernoi-gravirovki.html) *

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Publication number Publication date
MD360Y (ro) 2011-04-30

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KA4Y Short-term patent lapsed due to non-payment of fees (with right of restoration)