MD360Y - Procedeu de formare a suprafeţelor microstructurate ale substraturilor de siliciu - Google Patents

Procedeu de formare a suprafeţelor microstructurate ale substraturilor de siliciu Download PDF

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Publication number
MD360Y
MD360Y MDS20100158A MDS20100158A MD360Y MD 360 Y MD360 Y MD 360Y MD S20100158 A MDS20100158 A MD S20100158A MD S20100158 A MDS20100158 A MD S20100158A MD 360 Y MD360 Y MD 360Y
Authority
MD
Moldova
Prior art keywords
silicon substrates
formation
microstructured surfaces
mechanical action
linear mechanical
Prior art date
Application number
MDS20100158A
Other languages
English (en)
Moldavian (mo)
Inventor
Evghenii Harea
Daria Grabco
Olga SIKIMAKA
Dormidont Sherban
Olga Şikimaka
Dormidont Şerban
Original Assignee
Inst Fizica Aplicata Stiinte
Inst De Fizic & Abreve Aplicat & Abreve Al Academiei De & Scedil Tiin & Tcedil E A Moldovei
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by Inst Fizica Aplicata Stiinte, Inst De Fizic & Abreve Aplicat & Abreve Al Academiei De & Scedil Tiin & Tcedil E A Moldovei filed Critical Inst Fizica Aplicata Stiinte
Priority to MDS20100158A priority Critical patent/MD360Z/ro
Publication of MD360Y publication Critical patent/MD360Y/ro
Publication of MD360Z publication Critical patent/MD360Z/ro

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Abstract

Invenţia se referă la procedee de prelucrare a plăcilor semiconductoare şi poate fi utilizată pentru fabricareasubstraturilor de siliciu, utilizate pentru celule solare.Procedeul de formare a suprafeţelor microstructurate ale substraturilor de siliciu constă în aceea că suprafaţa substratului de siliciu este supusă unei acţiuni mecanice liniare cu decaparea selectivă ulterioară cu o soluţie alcalină apoasă, acţiunea mecanică liniară fiind efectuată prin intermediul indentorului Vickers la o sarcină nu mai mare de 0,3 g.
MDS20100158A 2010-09-23 2010-09-23 Procedeu de formare a suprafeţelor microstructurate ale substraturilor de siliciu MD360Z (ro)

Priority Applications (1)

Application Number Priority Date Filing Date Title
MDS20100158A MD360Z (ro) 2010-09-23 2010-09-23 Procedeu de formare a suprafeţelor microstructurate ale substraturilor de siliciu

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
MDS20100158A MD360Z (ro) 2010-09-23 2010-09-23 Procedeu de formare a suprafeţelor microstructurate ale substraturilor de siliciu

Publications (2)

Publication Number Publication Date
MD360Y true MD360Y (ro) 2011-04-30
MD360Z MD360Z (ro) 2011-11-30

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ID=45815106

Family Applications (1)

Application Number Title Priority Date Filing Date
MDS20100158A MD360Z (ro) 2010-09-23 2010-09-23 Procedeu de formare a suprafeţelor microstructurate ale substraturilor de siliciu

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MD (1) MD360Z (ro)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2056672C1 (ru) * 1993-06-08 1996-03-20 Евгений Макарович Соколов Способ текстурирования поверхности кремниевых пластин для солнечных элементов
RU2072585C1 (ru) * 1994-02-08 1997-01-27 Научно-исследовательский институт измерительных систем Способ подготовки полупроводниковых подложек
JP4394693B2 (ja) * 2004-10-28 2010-01-06 三益半導体工業株式会社 半導体基板の製造方法及びエッチング液
EP2224469A3 (en) * 2009-02-25 2015-03-25 Imec Method for etching 3d structures in a semiconductor substrate, including surface preparation
  • 2010

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Publication number Publication date
MD360Z (ro) 2011-11-30

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KA4Y Short-term patent lapsed due to non-payment of fees (with right of restoration)