MD360Z - Process for the formation of microstructured surfaces of silicon substrates - Google Patents
Process for the formation of microstructured surfaces of silicon substrates Download PDFInfo
- Publication number
- MD360Z MD360Z MDS20100158A MDS20100158A MD360Z MD 360 Z MD360 Z MD 360Z MD S20100158 A MDS20100158 A MD S20100158A MD S20100158 A MDS20100158 A MD S20100158A MD 360 Z MD360 Z MD 360Z
- Authority
- MD
- Moldova
- Prior art keywords
- silicon substrates
- formation
- microstructured surfaces
- mechanical action
- linear mechanical
- Prior art date
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title abstract 4
- 229910052710 silicon Inorganic materials 0.000 title abstract 4
- 239000010703 silicon Substances 0.000 title abstract 4
- 239000000758 substrate Substances 0.000 title abstract 4
- 238000000034 method Methods 0.000 title abstract 3
- 230000015572 biosynthetic process Effects 0.000 title abstract 2
- 239000012670 alkaline solution Substances 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
- 235000012431 wafers Nutrition 0.000 abstract 1
Landscapes
- Weting (AREA)
Abstract
The invention relates to processes for processing of semiconductor wafers and can be used for the manufacture of silicon substrates used for solar cells.The process for the formation of microstructured surfaces of silicon substrates consists in that the surface of the silicon substrate is subjected to a linear mechanical action with subsequent selective etching with an aqueous alkaline solution, the linear mechanical action being carried out by means of the Vickers indenter at a load of no more than 0.3 g.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| MDS20100158A MD360Z (en) | 2010-09-23 | 2010-09-23 | Process for the formation of microstructured surfaces of silicon substrates |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| MDS20100158A MD360Z (en) | 2010-09-23 | 2010-09-23 | Process for the formation of microstructured surfaces of silicon substrates |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| MD360Y MD360Y (en) | 2011-04-30 |
| MD360Z true MD360Z (en) | 2011-11-30 |
Family
ID=45815106
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| MDS20100158A MD360Z (en) | 2010-09-23 | 2010-09-23 | Process for the formation of microstructured surfaces of silicon substrates |
Country Status (1)
| Country | Link |
|---|---|
| MD (1) | MD360Z (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2056672C1 (en) * | 1993-06-08 | 1996-03-20 | Евгений Макарович Соколов | Method for processing the surface of silicon plates for solar batteries |
| RU2072585C1 (en) * | 1994-02-08 | 1997-01-27 | Научно-исследовательский институт измерительных систем | Method of preparation of semiconductor substrates |
| RU2340979C1 (en) * | 2004-10-28 | 2008-12-10 | Мимасу Семикондактор Индастри Ко., Лтд | Method of semiconductor wafer manufacture, semiconductor wafer for solar plants, and etching solution |
| US20100216308A1 (en) * | 2009-02-25 | 2010-08-26 | Imec | Method for etching 3d structures in a semiconductor substrate, including surface preparation |
-
2010
- 2010-09-23 MD MDS20100158A patent/MD360Z/en not_active IP Right Cessation
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2056672C1 (en) * | 1993-06-08 | 1996-03-20 | Евгений Макарович Соколов | Method for processing the surface of silicon plates for solar batteries |
| RU2072585C1 (en) * | 1994-02-08 | 1997-01-27 | Научно-исследовательский институт измерительных систем | Method of preparation of semiconductor substrates |
| RU2340979C1 (en) * | 2004-10-28 | 2008-12-10 | Мимасу Семикондактор Индастри Ко., Лтд | Method of semiconductor wafer manufacture, semiconductor wafer for solar plants, and etching solution |
| US20100216308A1 (en) * | 2009-02-25 | 2010-08-26 | Imec | Method for etching 3d structures in a semiconductor substrate, including surface preparation |
Non-Patent Citations (1)
| Title |
|---|
| Крапивко Г.И., Хлопёнова И.А. Современные технические средства, комплексы и системы повышения коэффициента полезного действия кремниевых фотоэлектронных преобразователей методом лазерной гравировки, ААЭКС, № 2 (12), 2003 (Regăsită în Internet la 04.02.2011, url: http://aaecs.org/krapivko-gi-hlopenova-ia-povishenie-koafficienta-poleznogo-deistviya-kremnievih-fotoalektronnih-preobrazovatelei-metodom-lazernoi-gravirovki.html) * |
Also Published As
| Publication number | Publication date |
|---|---|
| MD360Y (en) | 2011-04-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| KA4Y | Short-term patent lapsed due to non-payment of fees (with right of restoration) |