MD3029B1 - Procedeu de obtinere a senzorilor (variante) - Google Patents

Procedeu de obtinere a senzorilor (variante) Download PDF

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Publication number
MD3029B1
MD3029B1 MDA20040208A MD20040208A MD3029B1 MD 3029 B1 MD3029 B1 MD 3029B1 MD A20040208 A MDA20040208 A MD A20040208A MD 20040208 A MD20040208 A MD 20040208A MD 3029 B1 MD3029 B1 MD 3029B1
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MD
Moldova
Prior art keywords
obtained materials
metal
chemical components
ultra
variant
Prior art date
Application number
MDA20040208A
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English (en)
Other versions
MD3029C2 (ro
Inventor
Sergiu SISIANU
Teodor Sisianu
Oleg LUPAN
Original Assignee
Sergiu SISIANU
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sergiu SISIANU filed Critical Sergiu SISIANU
Priority to MDA20040208A priority Critical patent/MD3029C2/ro
Publication of MD3029B1 publication Critical patent/MD3029B1/ro
Publication of MD3029C2 publication Critical patent/MD3029C2/ro

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  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

Inventia se refera la electronica, in particular la tehnologiile de obtinere a senzorilor, si poate fi utilizata pentru obtinerea senzorilor pe baza straturilor de oxizi de semiconductor sau de metal. Procedeul de obtinere a senzorilor, dupa prima varianta, include depunerea chimica a straturilor de oxizi de semiconductor sau de metal pe un substrat, in prezenta razelor ultraviolete. Apoi se efectueaza prelucrarea fototermica rapida a materialelor obtinute in vid, in aer sau in camera de gaze, de exemplu, cu oxigen. Procedeul de obtinere a senzorilor, dupa a doua varianta, include depunerea chimica a straturilor de oxizi de semiconductor sau de metal pe un substrat, in prezenta razelor ultraviolete. Suplimentar are loc doparea materialelor obtinute cu cel putin o impuritate, donor sau acceptor, odata cu depunerea chimica. Ŕpoi, are loc prelucrarea fototermica rapida a materialelor obtinute, care are loc in vid, in aer sau in camera de gaze, de exemplu, cu oxigen. Procedeul de obtinere a senzorilor, dupa a treia varianta, include depunerea chimica a straturilor de oxizi de semiconductor sau de metal pe un substrat, in prezenta razelor ultraviolete. Apoi, suplimentar are loc doparea materialelor obtinute cu cel putin o impuritate donor sau acceptor, apoi se efectueaza prelucrarea fototermica rapida a materialelor obtinute, care are loc in vid, in aer sau in camera de gaze, de exemplu, cu oxigen. Procedeul de obtinere a senzorilor, dupa a patra varianta, include depunerea chimica a straturilor de oxizi de semiconductor sau de metal pe un substrat, in prezenta razelor ultraviolete. Apoi, suplimentar are loc prelucrarea fototermica rapida a materialelor obtinute, care are loc in vid, in aer sau in camera de gaze, de exemplu, cu oxigen, si in acelasi timp se efectueaza doparea prin difuzie a lor cu cel putin o impuritate, donor sau acceptor. Procedeul de obtinere a senzorilor, dupa a cincia varianta, include depunerea chimica a straturilor de oxizi de semiconductor sau de metal pe un substrat, in prezenta razelor ultraviolete. Apoi, suplimentar se efectueaza doparea prin difuzie cu cel putin o impuritate, donor sau acceptor, concentratia impuritatilor fiind maxim posibila pentru materialul obtinut, mai apoi se efectueaza prelucrarea fototermica rapida a materialelor obtinute, care are loc in vid, in aer sau in camera de gaze, de exemplu, cu oxigen, cu conditia micsorarii temperaturii de la temperatura doparii, pana la temperatura mediului inconjurator.
MDA20040208A 2004-09-06 2004-09-06 Procedeu de obţinere a senzorilor (variante) MD3029C2 (ro)

Priority Applications (1)

Application Number Priority Date Filing Date Title
MDA20040208A MD3029C2 (ro) 2004-09-06 2004-09-06 Procedeu de obţinere a senzorilor (variante)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
MDA20040208A MD3029C2 (ro) 2004-09-06 2004-09-06 Procedeu de obţinere a senzorilor (variante)

Publications (2)

Publication Number Publication Date
MD3029B1 true MD3029B1 (ro) 2006-04-30
MD3029C2 MD3029C2 (ro) 2006-11-30

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ID=36202584

Family Applications (1)

Application Number Title Priority Date Filing Date
MDA20040208A MD3029C2 (ro) 2004-09-06 2004-09-06 Procedeu de obţinere a senzorilor (variante)

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MD (1) MD3029C2 (ro)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
MD20080058A (ro) * 2008-02-25 2009-08-31 Институт Электронной Инженерии И Промышленных Технологий Академии Наук Молдовы Dispozitiv de obţinere a peliculelor supraconductoare
MD175Z (ro) * 2008-02-25 2010-10-31 Институт Электронной Инженерии И Промышленных Технологий Академии Наук Молдовы Dispozitiv de obţinere a peliculelor supraconductoare
AU2010306798B2 (en) * 2009-10-15 2015-05-28 Arkema Inc. Deposition of doped ZnO films on polymer substrates by UV-assisted chemical vapor deposition
MD353Z (ro) * 2010-02-24 2011-10-31 Институт Электронной Инженерии И Промышленных Технологий Ventil supraconductor de spin

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5991350A (ja) * 1982-11-17 1984-05-26 Toyota Central Res & Dev Lab Inc 薄膜酸素センサ
US5271821A (en) * 1988-03-03 1993-12-21 Ngk Insulators, Ltd. Oxygen sensor and method of producing the same
US6294374B1 (en) * 1999-10-08 2001-09-25 The Scripps Research Institute Use of catalytic antibodies for synthesizing epothilone

Also Published As

Publication number Publication date
MD3029C2 (ro) 2006-11-30

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MM4A Patent for invention definitely lapsed due to non-payment of fees