MA51143A - Installation de dépôt sous vide et procédé de revêtement d'un substrat - Google Patents
Installation de dépôt sous vide et procédé de revêtement d'un substratInfo
- Publication number
- MA51143A MA51143A MA051143A MA51143A MA51143A MA 51143 A MA51143 A MA 51143A MA 051143 A MA051143 A MA 051143A MA 51143 A MA51143 A MA 51143A MA 51143 A MA51143 A MA 51143A
- Authority
- MA
- Morocco
- Prior art keywords
- coating process
- substrate coating
- vacuum deposit
- deposit installation
- installation
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/IB2017/057943 WO2019116081A1 (fr) | 2017-12-14 | 2017-12-14 | Installation de dépôt sous vide et procédé pour revêtir un substrat |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| MA51143A true MA51143A (fr) | 2021-03-24 |
Family
ID=60937822
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| MA051143A MA51143A (fr) | 2017-12-14 | 2018-12-11 | Installation de dépôt sous vide et procédé de revêtement d'un substrat |
Country Status (13)
| Country | Link |
|---|---|
| US (1) | US12054821B2 (fr) |
| EP (1) | EP3724367A1 (fr) |
| JP (1) | JP7089031B2 (fr) |
| KR (1) | KR102503599B1 (fr) |
| CN (1) | CN111479950B (fr) |
| AU (1) | AU2018385554B2 (fr) |
| CA (1) | CA3084328C (fr) |
| MA (1) | MA51143A (fr) |
| MX (1) | MX2020006058A (fr) |
| RU (1) | RU2741042C1 (fr) |
| UA (1) | UA125835C2 (fr) |
| WO (2) | WO2019116081A1 (fr) |
| ZA (1) | ZA202003072B (fr) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102021101383A1 (de) | 2021-01-22 | 2022-07-28 | Thyssenkrupp Steel Europe Ag | Verfahren zur kontinuierlichen Beschichtung eines Bands und Beschichtungsanlage |
| CN118726933B (zh) * | 2024-09-02 | 2024-11-22 | 内蒙古科技大学 | 一种过喷金属蒸汽回收装置、真空镀膜装置及方法 |
Family Cites Families (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE1010351A6 (fr) | 1996-06-13 | 1998-06-02 | Centre Rech Metallurgique | Procede et dispositif pour revetir en continu un substrat en mouvement au moyen d'une vapeur metallique. |
| JP2002294456A (ja) | 2001-03-30 | 2002-10-09 | Oki Electric Ind Co Ltd | 膜の形成方法及びその方法を実施するためのｃｖｄ装置 |
| JP3694470B2 (ja) | 2001-05-31 | 2005-09-14 | 沖電気工業株式会社 | 半導体装置の製造方法 |
| EP1423553A4 (fr) | 2001-08-01 | 2008-12-17 | Danieli Technology Inc | Revetement par vapeur metallique |
| DE102004041855B4 (de) | 2004-04-27 | 2007-09-13 | Von Ardenne Anlagentechnik Gmbh | Vorrichtung und Verfahren zur kontinuierlichen thermischen Vakuumbeschichtung |
| DE102004041854B4 (de) | 2004-04-27 | 2008-11-13 | Von Ardenne Anlagentechnik Gmbh | Verfahren und Vorrichtung zur thermischen Vakuumbeschichtung |
| MX2007014483A (es) | 2005-05-31 | 2008-02-05 | Corus Technology Bv | Aparato y metodo para revestir un sustrato. |
| WO2007054229A1 (fr) * | 2005-11-08 | 2007-05-18 | Hilmar Weinert | Support dote d’un revetement poreux depose sous vide |
| US20080072822A1 (en) * | 2006-09-22 | 2008-03-27 | White John M | System and method including a particle trap/filter for recirculating a dilution gas |
| RU2471015C2 (ru) | 2007-03-02 | 2012-12-27 | Эрликон Солар АГ | Вакуумная установка для нанесения покрытий |
| JP5730496B2 (ja) * | 2009-05-01 | 2015-06-10 | 株式会社日立国際電気 | 熱処理装置、半導体デバイスの製造方法および基板処理方法 |
| CN101608301B (zh) | 2009-06-24 | 2011-12-07 | 江苏常松机械集团有限公司 | 连续真空等离子蒸发金属复合材料生产线 |
| US8187555B2 (en) * | 2009-12-15 | 2012-05-29 | Primestar Solar, Inc. | System for cadmium telluride (CdTe) reclamation in a vapor deposition conveyor assembly |
| KR101010196B1 (ko) * | 2010-01-27 | 2011-01-21 | 에스엔유 프리시젼 주식회사 | 진공 증착 장비 |
| US20120034733A1 (en) * | 2010-08-05 | 2012-02-09 | Aventa Technologies Llc | System and method for fabricating thin-film photovoltaic devices |
| KR101114832B1 (ko) * | 2011-05-31 | 2012-03-06 | 에스엔유 프리시젼 주식회사 | 진공증착장치 |
| EP2739765B1 (fr) | 2011-08-05 | 2019-01-16 | 3M Innovative Properties Company | Systèmes et procédés pour traiter de la vapeur |
| KR101184679B1 (ko) * | 2012-04-26 | 2012-09-24 | (주)이화 | 엘씨디 유기물 처리용 콜드트랩 장치 |
| UA116262C2 (uk) * | 2013-08-01 | 2018-02-26 | Арселорміттал | Сталевий лист з цинковим покриттям |
| WO2017051790A1 (fr) | 2015-09-24 | 2017-03-30 | シャープ株式会社 | Source de dépôt, dispositif de dépôt et procédé de fabrication de film par dépôt |
| CN106198125A (zh) | 2016-08-30 | 2016-12-07 | 中国科学院寒区旱区环境与工程研究所 | 一种气体提取与收集装置 |
| WO2019239185A1 (fr) * | 2018-06-13 | 2019-12-19 | Arcelormittal | Installation de dépôt sous vide et procédé de revêtement d'un substrat |
-
2017
- 2017-12-14 WO PCT/IB2017/057943 patent/WO2019116081A1/fr not_active Ceased
-
2018
- 2018-12-11 MX MX2020006058A patent/MX2020006058A/es unknown
- 2018-12-11 AU AU2018385554A patent/AU2018385554B2/en active Active
- 2018-12-11 RU RU2020123166A patent/RU2741042C1/ru active
- 2018-12-11 UA UAA202004225A patent/UA125835C2/uk unknown
- 2018-12-11 WO PCT/IB2018/059856 patent/WO2019116214A1/fr not_active Ceased
- 2018-12-11 JP JP2020532619A patent/JP7089031B2/ja active Active
- 2018-12-11 US US16/770,850 patent/US12054821B2/en active Active
- 2018-12-11 MA MA051143A patent/MA51143A/fr unknown
- 2018-12-11 CA CA3084328A patent/CA3084328C/fr active Active
- 2018-12-11 KR KR1020207018127A patent/KR102503599B1/ko active Active
- 2018-12-11 CN CN201880080355.2A patent/CN111479950B/zh active Active
- 2018-12-11 EP EP18833519.4A patent/EP3724367A1/fr active Pending
-
2020
- 2020-05-25 ZA ZA2020/03072A patent/ZA202003072B/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| US12054821B2 (en) | 2024-08-06 |
| ZA202003072B (en) | 2021-08-25 |
| US20210164088A1 (en) | 2021-06-03 |
| AU2018385554A1 (en) | 2020-06-11 |
| RU2741042C1 (ru) | 2021-01-22 |
| JP2021507101A (ja) | 2021-02-22 |
| JP7089031B2 (ja) | 2022-06-21 |
| MX2020006058A (es) | 2020-08-20 |
| CN111479950A (zh) | 2020-07-31 |
| BR112020010757A2 (pt) | 2020-11-17 |
| AU2018385554B2 (en) | 2021-02-25 |
| EP3724367A1 (fr) | 2020-10-21 |
| CA3084328C (fr) | 2022-05-31 |
| KR102503599B1 (ko) | 2023-02-23 |
| UA125835C2 (uk) | 2022-06-15 |
| WO2019116081A1 (fr) | 2019-06-20 |
| WO2019116214A1 (fr) | 2019-06-20 |
| CA3084328A1 (fr) | 2019-06-20 |
| CN111479950B (zh) | 2026-03-31 |
| KR20200092996A (ko) | 2020-08-04 |
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