LU505001B1 - Force sensing measurement method based on reverse magnetostrictive effect - Google Patents
Force sensing measurement method based on reverse magnetostrictive effect Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/12—Measuring force or stress, in general by measuring variations in the magnetic properties of materials resulting from the application of stress
- G01L1/125—Measuring force or stress, in general by measuring variations in the magnetic properties of materials resulting from the application of stress by using magnetostrictive means
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Abstract
The present invention discloses a force sensing measurement method based on a reverse magnetostrictive effect, a deformation surface of an elastomer is bonded to one side of a force detection piece, a magnet exciting coil is arranged at the corresponding position on the other side of the force detection piece, a detection coil is arranged between the magnet exciting coil and the force detection piece, the change of a magnetic flux is detected by the detection coil and converted into an electrical signal, and then the magnitude of the force on the elastomer is sensed. The force sensor obtained according to the principle of the present invention has advantages of strong anti-interference ability. The reverse magnetostrictive effect is used to measure the force, which can effectively reduce a control error caused by the decrease of system stiffness.
Description
FORCE SENSING MEASUREMENT METHOD BASED ON REVERSE 0505007
MAGNETOSTRICTIVE EFFECT
The present invention belongs to the technical field of the robot, and relates to a force sensing measurement method based on a reverse magnetostrictive effect.
Force sensor is a device and equipment that can sense tension or pressure and convert it into available signals according to certain rules, it usually includes sensitive elements and elastic elements. The force sensor is widely used in the field of robot technology, it is generally mounted inside each joint of the robot, can fully perceive the torque of the interaction between the robot and the external environment, and provide force information for the compliant control of the robot.
At present, a plurality of main methods for measuring force include straining type, photoelectric type, capacitive type and magneto-elastic type, each method has its unique advantages, but also has its own shortcomings, and the fields suitable for application are often different.
The straining gauge sensor measures the force by pasting strain gauges on the elastic beam to form a measuring bridge. When the elastic beam is subjected to a small deformation, the resistance value in the bridge will change, and the change of the resistance of the strain bridge is transformed into the change of the electrical signal to realize the measurement of the force. The straining gauge sensor has the advantages of high precision and sensitivity, low cost and so on.
The photoelectric sensor fixes two gratings with the same number of holes on the elastic beam, and the photoelectric element and the fixed light source are fixed on both sides of the grating, when the elastic beam is unable to act, the bright and dark stripes of the two gratings are staggered, completely blocking the optical path. When the force acts, the cross sections of the two gratings produce a relative rotation angle, the bright and dark stripes are partially overlapped, and part of light ray is shined on the photosensitive element through the grating to output an electrical signal. The magnitude of the applied force can be measured by measuring the output electrical signal. The photoelectric sensor features real-time monitoring and fast response, but has the disadvantages of complex structure, difficult static calibration, poor reliability and poor anti-interference ability. 0505001
The capacitive force sensor is used by mounting two electrodes to an elastomer, when the elastomer is stressed, the area or distance between the two electrodes will change, and the capacitance will change. The magnitude of the force is obtained by detecting the change of the capacitance.
Magnetoelastic force sensor is used by pasting a magnetostrictive material on an elastic beam, after applying force on the elastic beam, the stress and strain of the elastic beam will lead to the stress and strain of the magnetostrictive material pasted thereon. Due to the reverse magnetostrictive effect, when the magnetostrictive material is subjected to stress, its magnetic permeability will change, the magnitude of the force is obtained by detecting the change of the magnetic permeability.
The existing magnetoelastic force sensors are generally divided into bypass type and sleeve type according to the measurement method. The bypass type is usually used by placing a
U-shaped magnet beside a magnetostrictive material, and the excitation and detection winding is winded on the U-shaped magnet, the system is closed into a complete magnetic circuit; the sleeve type 1s usually used by completely wrapping a magnetostrictive material with two sleeves, the excitation winding is in the outermost layer, and the detection winding is in the excitation winding, so that a magnetic line completely covers the magnetostrictive material. The advantage of these two measurement methods is that the magnetic flux leakage of the system can be effectively reduced and a complete magnetic circuit is formed, but the disadvantage is that the volume is large and is difficult to miniaturize.
Magnetostrictive effect refers to the reversible change of geometric size of magnetic materials due to the change of external magnetic field conditions during magnetization.
Magnetostrictive smart material is a kind of material with strong magnetostrictive effect and high magnetostrictive coefficient, in other words, it is a kind of material with the function of mutual conversion between electromagnetic energy and mechanical energy.
An object of the present invention is to provide a force sensing measurement method based on a reverse magnetostrictive effect. According to the principle of the present invention, the force sensor has the advantages of strong anti-interference ability, good durability, and easy development to miniaturization, especially suitable for on-line monitoring of torque. The reverse 505001 magnetostrictive effect is used to measure the force, which can effectively reduce a control error caused by the decrease of system stiffness, and improve a magnetic hysteresis error of the sensor and other errors.
The present invention adopts the following technical solutions: a force sensing measurement method based on a reverse magnetostrictive effect, a detection coil is arranged between a magnetostrictive material and a magnet exciting coil, in the process of deformation of the magnetostrictive material, the change of a magnetic flux is detected by the detection coil and converted into an electrical signal, then, the magnitude of the deformation of the magnetostrictive material is sensed by the electrical signal, and then the magnitude of the force on the magnetostrictive material is inferred; the magnetostrictive material is a thin force detection piece, the force detection piece is pasted on a surface of a measured object, the position is matched with the magnet exciting coil and the detection coil, and the measured object is a non-magnetic conductance elastic material.
The magnetostrictive material is an amorphous state soft magnetic alloy 1K107. 1K107 is an iron-based nanocrystal alloy, which mainly includes iron, and is an amorphous state material formed by adding a small amount of Nb, Cu, Si and B elements into the alloy through rapid solidification process. Microcrystals with a diameter of 10-20 nm can be obtained after heat treatment of this amorphous state material, and are dispersed on an amorphous state matrix, and the amorphous state material is called microcrystalline, microcrystal or nanocrystalline material.
The nanocrystalline material has excellent comprehensive magnetic properties: high saturation magnetic induction, high initial magnetic permeability, low Hc, and low high frequency loss under high magnetic induction. The nanocrystalline material is the best material with comprehensive performance on the market at present, and is widely used in high power switching power supply, inverter power supply, magnetic amplifier, high frequency transformer, high frequency converter, high frequency choke coil core, current transformer core, leakage protection switch, and common mode inductor core.
A bending elastomer of the force sensor is a straining beam, and is located in a middle of an
S-shaped sensor with five beams, upper and lower horizontal beams of the S-shaped sensor are loading beams, a vertical beam connected to ends of the loading beam respectively is a transfer beam, the straining beam connected to ends of the two transfer beams is located in the middle oF 505001 the S-shaped sensor and is arranged horizontally, the force detection piece is fixed in a surface of a middle part of the straining beam, the magnet exciting coil and the detection coil are fixed on a surface of the loading beam, and the position matches with the force detection piece.
The external force acts on the loading beam and plays a loading role; the role of the transfer beam is to transfer the force loaded on the loading beam to the intermediate straining beam, and finally the externally loaded force is applied to the straining beam, thereby the stress and the strain are generated on the strain beam.
The excitation detection coil may be pasted and fixed on the elastomer loading beam through high-strength structural adhesion, and the force detection piece may be also pasted and fixed on the straining beam through high-strength structural adhesion.
Upper and lower surfaces of a middle part of the straining beam are arranged with force detection pieces, the matching positions of the upper and lower loading beams are arranged with magnet exciting coils and detection coils. The same force sensor device is arranged up and down to obtain two sets of data, which can realize signal amplification processing, and the two sets of data are proofread, and the obtained data is more accurate.
The magnet exciting coil and the detection coil are planar coils, both of them are printed on the PCB board and laminated manufacturing as one. The two are made into one on the PCB board to become an integrated excitation detection coil, which is easier to mount.
The magnet exciting coil and the detection coil are planar regular octagons. The purpose is to obtain the maximum magnetic field in the smallest area.
The upper and lower surfaces of the middle part of the straining beam are arranged with force detection pieces, the matching positions of the upper and lower loading beams are arranged with magnet exciting coils and detection coils.
In the S-shaped sensor, a middle part of an upper end surface of the upper loading beam is arranged with a screw thread hole, and a middle part of a lower end surface of the lower loading beam is also arranged with a screw thread hole. The screw thread hole is used for fixing a force-applied part.
An operation principle of the present invention is described as follows: when the force sensor based on the reverse magnetostrictive effect is used, the tension or pressure is transmitted to the straining beam through an upper and a lower two loading beams 505001 and the left and right two transfer beams. At this time, the straining beam will bend and deform, and stress and strain will be generated at the same time.
Stress force is generated by the amorphous state alloy force detection piece pasted on the 5 surface of the elastic shaft at this time, which will produce a reverse magnetostrictive effect (Villari effect). The amorphous state alloy force detection piece is essentially a magnetostrictive material, its characteristic is that when it is subjected to stress force, it will cause a change in its permeability. Under the condition of an external magnetic field, it will cause a change in the magnetic field. Since the amorphous state alloy force detection sheet changes its magnetic flux in the alternating magnetic field generated by the magnet exciting coil, the detection coil detects the change of the magnetic flux and then converts it into an electrical signal to indicate the change of the torque.
The reverse magnetostrictive effect is a unique physical property of ferromagnetic materials, which indicates that the internal parameter permeability will change under the influence of external forces. When the elastic axis made of ferromagnetic material is under the action of stable external excitation field, and at the same time, it is affected by external force, the change of magnetization state of elastomer material may be regarded as the result of the change of permeability. Under the action of torque or stress force, the change of internal magnetic domain structure of magnetic materials is the reason that affects the change of internal magnetization state of materials. Therefore, the inverse magnetostrictive effect of ferromagnetic materials may be used to characterize the change of stress force state by measuring the change of magnetization intensity when loading force, so that the problem of measuring force may be transformed into the problem of measuring the magnetization intensity of materials. In addition, the magnetostrictive coefficient of the physical quantity of the positive and negative will also affect the rotation direction of the magnetic domain. This patent discusses the change of magnetization state of elastic shaft material from the change of magnetic permeability and magnetic induction intensity.
In fact, the change of magnetization intensity is the change of magnetic induction intensity, so we can analyze the applied external force from the change of macroscopic magnetic induction intensity.
The magnet exciting coil in the excitation detection coil will continuously add a stable alternating magnetic field to the amorphous state alloy force detection sheet. When the straining 505001 beam in the elastomer has stress changes, the surface magnetostrictive material will cause its magnetic field to change, the detection coil in the excitation detection coil will identify its changes and convert the changes into electrical signals to the external data acquisition device.
The present invention has advantages that: 1. the method of the present invention can be applied to the field of force sensor, the obtained force sensor has the advantages of strong anti-interference ability, a good durability and an easy development to miniaturization, it is especially suitable for on-line monitoring of torque.
The reverse magnetostrictive effect is adopted measure the force, which can effectively reduce the control error caused by the decrease of system stiffness, and improve the magnetic hysteresis of the sensor and other errors; 2. because of its above advantages, this force sensor can be widely used in the field of automated robots, it is especially in robots working under heavy load and harsh conditions, and can realize the miniaturization of force sensing devices. It is suitable for a wide range of applications.
FIG. 1 is a perspective appearance schematic diagram of an Example 1;
FIG. 2 1s a sectional view of an S-shaped sensor beam body of an Example 1;
FIG. 3 is schematic diagram of a position relationship between a force detection piece, a magnet exciting coil and a detection coil;
FIG. 4 is a main view of the magnet exciting coil and the detection coil,
FIG. 5 is a scatter plot view of the force sensor detection deviation coordinates; and
FIG. 6 1s a physical photo view of the force sensor according to the present invention.
Among them: 11-straining beam; 12-loading beam; 13-transfer beam; 2-force detection piece; 3-magnet exciting coil; 4-detection coil.
Example 1
A force sensing measurement method based on reverse magnetostrictive effect, wherein a detection coil 4 is arranged between a magnetostrictive material and a magnet exciting coil 3, in the process of deformation of the magnetostrictive material, the change of a magnetic flux is detected by the detection coil 4 and converted into an electrical signal, then, the magnitude of the 505001 deformation of the magnetostrictive material is sensed by the electrical signal, and then the magnitude of the force on the magnetostrictive material is inferred; the magnetostrictive material is a thin piece of a force detection piece 2, the force detection piece 2 is pasted on a surface of a measured object, the position is matched with the magnet exciting coil 3 and the detection coil 4, and the measured object is a non-magnetic conductance elastic material.
When the above method is applied to the force sensor, a bending elastomer of the force sensor is a straining beam 11, it is located in the middle of an S-shaped sensor with five beams, an upper and a lower two horizontal beams of the S-shaped sensor are loading beams 12, the vertical beam connected to the ends of the loading beam 12 are transfer beams 13, the straining beam 11 connected to the ends of the two transfer beams 13 is located in the middle of the
S-shaped sensor and is arranged horizontally, the force detection piece 2 is fixed in a surface of a middle part of the straining beam 11, the magnet exciting coil 3 and the detection coil 4 are fixed with a surface of the loading beam 12, the position matches with the force detection piece 2, the excitation detection coil is placed directly above (below) the force detection piece to achieve the purpose of maximum detection.
The sensor is S-shaped and has five beams, five beams are all made of aluminum alloy materials, including an upper and a lower beams are loading beams, the external force acts on these two beams and plays a loading role, a left and a right beams are transfer beams, the function is to transfer the force loaded on the loading beam to an middle beam, the middle beam is a straining beam, the function is to convert the force on the loading beam into stress force and strain.
The magnet exciting coil 3 and the detection coil 4 are planar coils, both of them are printed on the PCB board and superimposed to manufacture as one, the excitation detection coil is divided into two parts: the magnet exciting coil and the detection coil, including the magnet exciting coil provides an alternating magnetic field through external signal generator, the variation of the magnetic field in the detection space of the detection coil, the output signal is output to the external signal acquisition device; the excitation detection coil is fixed on the elastomer loading beam through high intensity structural adhesive.
The magnet exciting coil 3 and the detection coil 4 are planar regular octagons; the plane 505001 size of PCB is 10 mm * 10 mm, 11 circles each.
An upper and a lower surfaces of a middle part of the straining beam 11 are arranged with force detection pieces 2, the force detection piece 2 is made of magnetostrictive material amorphous state soft magnetic alloy 1K107, its thickness is only 0.026 mm; the force detection piece is pasted on the center of the elastomer straining beam by high strength structural adhesive 4080, the matching positions of an upper and a lower loading beams 12 are arranged with magnet exciting coils 3 and detection coils; and in the S-shaped sensor, a middle part of an upper end surface of the upper loading beam 12 is arranged with screw thread hole, a middle part of a lower end surface of the lower loading beam 12 is also arranged with screw thread hole. The screw thread hole is used for connecting with the external force-applying object, and the hole does not penetrate into the blind hole.
The application of the present invention in the force sensor measuring device is verified by experiments:
Experimental platform construction: the sensor described in Example 1 is fixed on the experimental platform, and the sensor is calibrated by weight loading, the initial excitation signal of the sensor is given by the signal generator, and the signal collected by the sensor is collected, displayed and recorded by the oscilloscope.
Experimental process: after the sensor is fixed, the two ends of the magnet exciting coil are connected to the signal generator, and the two ends of the detection coil are connected to the oscilloscope. After the detection wire is connected, the signal generator is used to give the magnet exciting coil a SVPP, SMHz sinusoidal signal. The weight is increased by 25 N as a increment, and the weight is loaded onto the sensor in stages from the interval of 0-200 N to apply pressure to the sensor. By mounting a weight, the sensor will be subjected to a pressure of 0-200N, and the amplitude displayed on the oscilloscope is recorded after each loading of the weight. After mounting to 200 N, the unloading experiment is carried out, the weight is still reduced by 25 N as a decrement, unloaded from 200 N to 0, and the amplitude displayed on the oscilloscope after each unloading is recorded.
Experimental results:
Londingfree Loading Unbooding Loading Unleding leading Unlading loding Dulading Loading | Uuladiag 165 6807 6805 631 688 581 | 680 AM | 686 680 500 6M 636 637 636 68 US GS RR
HO RIE AM GS OR CE RI GE ON eR ems 6 6005 696 609 6002 GNT 8 GS GME M
COI GI RS SR SE ST AN SEN CN SM CE
1588 8) OO ME SR CB SE ML
COB UN RED SSH SAS SBM SED SAM SSH SES SM
18 SE A364 A OR OB AM ER um un
Com OUR 9 RR UM uM M8 MB Am sn
As shown in FIG. 5, the experimental data are obtained by taking the average value of a plurality of experiments, the scatter points of the average value in the coordinates are highly coincident with the fitting line, and the R? of the linear fitting is 0.9983. 5 According to the experimental data analysis:
Nonlinear error : the sensor nonlinear e, is obtained according to the following formula:
A e, =+—"* 100%
Yıs
Wherein A max ---the maximum nonlinear error;
Yrs ---output full scale;
The nonlinear error of the sensor obtained by substituting the experimental data into the formula is 2.64 %.
Sensitivity : the sensitivity of the sensor refers to the ratio of the output change of the sensor to the input change in the steady state, and the sensitivity is calculated to be 6.436 mV / N.
Magnetic hysteresis error : the magnetic hysteresis error of the sensor can be expressed by the formula:
e =+ Aug ¢ 100%
Vig
It is calculated that the formula Ama is the maximum difference between the output values of the forward return stroke.
By substituting the data into the calculation, the magnetic hysteresis error of the sensor is 0.839%.
Through the above experimental data, it can be seen that the sensor has good linearity and the magnetic hysteresis error is small.
Claims (9)
1. A force sensing measurement method based on a reverse magnetostrictive effect, wherein a detection coil (4) is arranged between a magnetostrictive material and a magnet exciting coil (3), in the process of deformation of the magnetostrictive material, the change of a magnetic flux is detected by the detection coil (4) and converted into an electrical signal, then, the magnitude of the deformation of the magnetostrictive material is sensed by the electrical signal, and then the magnitude of the force on the magnetostrictive material is inferred.
2. The force sensing measurement method based on a reverse magnetostrictive effect according to claim 1, wherein the magnetostrictive material is a thin force detection piece (2), the force detection piece (2) is pasted on a surface of a measured object, the position is matched with the magnet exciting coil (3) and the detection coil (4), and the measured object is a non-magnetic conductance elastic material.
3. The force sensing measurement method based on a reverse magnetostrictive effect according to claim 1, wherein the magnetostrictive material is an amorphous state soft magnetic alloy 1K107.
4. The force sensing measurement method based on a reverse magnetostrictive effect according to claim 1, wherein the method is applied in a force sensor.
5. The force sensing measurement method based on a reverse magnetostrictive effect according to claim 4, wherein a bending elastomer of the force sensor is a straining beam (11), and is located in a middle of an S-shaped sensor with five beams, upper and lower horizontal beams of the S-shaped sensor are loading beams (12), a vertical beam connected to ends of the loading beam (12) is a transfer beam (13), a straining beam (11) connected to ends of the two transfer beams (13) is located in the middle of the S-shaped sensor and is arranged horizontally, the force detection piece (2) is fixed in a surface of a middle part of the straining beam (11), the magnet exciting coil (3) and the detection coil (4) are fixed on a surface of the loading beam (12), and the position matches with the force detection piece (2).
6. The force sensing measurement method based on a reverse magnetostrictive effect according to claim 5, wherein the magnet exciting coil (3) and the detection coil (4) are planar coils, both of them are printed on a PCB board and superimposed to be made as one.
7. The force sensing measurement method based on a reverse magnetostrictive effect 505001 according to claim 5, wherein the magnet exciting coil (3) and the detection coil (4) are planar regular octagons.
8. The force sensing measurement method based on a reverse magnetostrictive effect according to claim 5, wherein upper and lower surfaces of a middle part of the straining beam (11) are fixedly arranged with the force detection pieces (2), matching positions of the upper and lower loading beams (12) are arranged with the magnet exciting coils (3) and the detection coils
(4).
9. The force sensing measurement method based on a reverse magnetostrictive effect according to claim 5, wherein in the S-shaped sensor, a middle part of an upper end surface of the upper loading beam (12) is arranged with a screw thread hole, a middle part of a lower end surface of the lower loading beam (12) is also arranged with a screw thread hole.
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| US4896544A (en) * | 1986-12-05 | 1990-01-30 | Mag Dev Inc. | Magnetoelastic torque transducer |
| JP3307465B2 (en) * | 1992-09-10 | 2002-07-24 | 株式会社安川電機 | Magnetostrictive strain sensor |
| JP2000292295A (en) * | 1999-04-05 | 2000-10-20 | Tokin Corp | Inner pressure sensor for enclosed container |
| CN1302263C (en) * | 2001-12-07 | 2007-02-28 | 尼尔斯·艾吉·朱尔·艾勒森 | Sealed load cell |
| JP4876393B2 (en) * | 2004-12-27 | 2012-02-15 | 日産自動車株式会社 | Torque detection device |
| JP4283263B2 (en) * | 2005-10-20 | 2009-06-24 | 本田技研工業株式会社 | Manufacturing method of magnetostrictive torque sensor |
| CN101608960B (en) * | 2009-07-27 | 2011-02-16 | 广州粤能电力科技开发有限公司 | Method for determining paste position of strain gauge of sensor |
| CN102128697B (en) * | 2010-12-15 | 2012-04-04 | 西安理工大学 | High-speed motorized spindle non-contact loading force and torque testing device and method |
| CN202547742U (en) * | 2012-02-09 | 2012-11-21 | 上海第二工业大学 | Piezoresistance sensor based electronic scale |
| TWI513960B (en) * | 2013-05-20 | 2015-12-21 | Nat Univ Tsing Hua | A sensor chip having a micro inductor structure |
| CN103454024B (en) * | 2013-05-24 | 2016-01-13 | 招商局重庆交通科研设计院有限公司 | Based on the concrete-bridge tendon tension measuring method of converse magnetostriction |
| CN105527047B (en) * | 2015-12-30 | 2019-03-19 | 中交路桥技术有限公司 | One kind being based on the modified magnetic flux cable force detecting device of MEMS acceleration transducer |
| CN105606268B (en) * | 2016-03-13 | 2018-01-19 | 北京工业大学 | Welding residual stress ultrasonic evaluation method based on the measurement of dynamic magnetostriction coefficient |
| US10359324B2 (en) * | 2016-08-18 | 2019-07-23 | General Electric Company | Non-contact magnetostrictive sensors and methods of operation of such sensors |
| CN108375437A (en) * | 2018-01-23 | 2018-08-07 | 武汉理工大学 | Ship shaft power measurement method based on counter magnetostriction effect |
| CN108562388A (en) * | 2018-04-23 | 2018-09-21 | 哈尔滨工业大学 | A kind of contactless torque measuring device based on counter magnetostriction effect |
| CN108548622A (en) * | 2018-04-23 | 2018-09-18 | 哈尔滨工业大学 | Contactless joint of robot torque-measuring apparatus based on counter magnetostriction effect |
| CN114705328B (en) * | 2021-12-24 | 2023-12-01 | 南京航空航天大学 | Moment sensor based on magneto-elastic effect |
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Effective date: 20240226 |