CN218724901U - Force sensor based on inverse magnetostrictive effect - Google Patents
Force sensor based on inverse magnetostrictive effect Download PDFInfo
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- CN218724901U CN218724901U CN202222289154.XU CN202222289154U CN218724901U CN 218724901 U CN218724901 U CN 218724901U CN 202222289154 U CN202222289154 U CN 202222289154U CN 218724901 U CN218724901 U CN 218724901U
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Abstract
The invention discloses a force sensor based on inverse magnetostriction effect, wherein a deformation surface of a non-magnetic-conductive elastic body in the sensor is attached to the surface of a force detection sheet made of magnetostriction material, an excitation coil is fixed at the position matched with the other surface of the force detection sheet, and a detection coil is arranged between the excitation coil and the force detection sheet. The utility model has the advantages of the interference killing feature is strong, the durability is good, easily to miniaturized development, especially is suitable for the on-line monitoring of moment. The force is measured by adopting the inverse magnetostriction effect, so that the control error caused by the reduction of the system rigidity can be effectively reduced, and errors such as sensor hysteresis and the like can be improved.
Description
Technical Field
The utility model belongs to the technical field of the robot, concretely relates to force sensor based on contrary magnetostrictive effect.
Background
A force sensor is a device and apparatus that can sense tension or pressure and convert it into a usable signal according to a certain rule, and is generally composed of a sensing element and an elastic element. The force sensor is widely applied in the technical field of robots, is generally arranged in each joint of the robot, can comprehensively sense the magnitude of the torque borne by the robot when the robot interacts with the external environment, and provides force sensing information for the flexible control of the robot.
At present, several main methods for measuring force comprise a strain type, a photoelectric type, a capacitance type, a magnetic spring type and the like, each method has specific advantages and respective defects, and the applicable fields are different.
The strain gauge sensor measures force by adhering a strain gauge on an elastic beam to form a measuring bridge, and when the elastic beam is stressed to generate micro deformation, the resistance value in the bridge changes, and the change of the resistance of the strain bridge is converted into the change of an electric signal, so that the force measurement is realized. The method has the advantages of high precision and sensitivity, low cost and the like.
The photoelectric sensor fixes two gratings with the same number of holes on the elastic beam, and fixes the photoelectric element and the fixed light source on two sides of the grating, when the elastic beam is not acted by force, the light and shade stripes of the two gratings are staggered to shield the light path completely. When force is applied, the cross sections of the two gratings generate relative rotation angles, the light and dark stripes are partially overlapped, part of light penetrates through the gratings to irradiate the photosensitive element, and an electric signal is output. The magnitude of the applied force can be measured by measuring the output electrical signal. The method has the advantages of real-time monitoring and quick response; the defects are complex structure, difficult static calibration, poor reliability and poor anti-interference capability.
The capacitive force sensor is characterized in that two electrodes are arranged on the elastic body, when the elastic body is stressed, the area or the distance between the two electrodes can be changed, and the capacitance can be changed at the moment. The magnitude of the force is obtained by detecting a change in capacitance.
The magnetic elastic force sensor is characterized in that magnetostrictive materials are adhered to an elastic beam, stress strain of the elastic beam can cause the magnetostrictive materials adhered to the elastic beam to generate stress strain after force is applied to the elastic beam, the magnetic conductivity of the magnetostrictive materials can change when the magnetostrictive materials are stressed due to the reverse magnetostrictive effect, and the force is obtained by detecting the change of the magnetic conductivity of the magnetostrictive materials.
The existing magnetic spring type force sensor is generally divided into a bypass type and a sleeve type according to the measuring mode. In the bypass mode, a U-shaped magnet is usually arranged beside a magnetostrictive material, and an excitation and detection winding is wound on the U-shaped magnet to close a system into a complete magnetic circuit; the sleeve type is generally that the magnetostrictive material is completely wrapped by two sleeves, the excitation winding is on the outermost layer, and the detection winding is arranged in the excitation winding, so that magnetic lines of force completely cover the magnetostrictive material. The two measurement modes have the advantages that the magnetic leakage phenomenon of the system can be effectively reduced, and a complete magnetic circuit is formed, but the two measurement modes have the defects of large volume and difficulty in miniaturization.
The magnetostrictive effect refers to an effect that the geometric dimension of a magnetic substance is reversibly changed due to the change of the condition of an external magnetic field in the magnetization process. The magnetostrictive intelligent material is a material with strong magnetostrictive effect and high magnetostrictive coefficient, namely, the material has the function of mutual conversion of electromagnetic energy and mechanical energy.
Disclosure of Invention
The utility model aims at providing a force transducer based on contrary magnetostrictive effect has advantages such as the interference killing feature is strong, the durability is good, easily to miniaturized development, especially is suitable for the on-line monitoring of moment. The force is measured by adopting the inverse magnetostriction effect, so that the control error caused by the reduction of the system rigidity can be effectively reduced, and the errors such as sensor hysteresis and the like can be improved.
The invention adopts the following technical scheme:
a force sensor based on reverse magnetostriction effect is characterized in that a deformation surface of a non-magnetic-conductive elastic body in the sensor is attached to the surface of a force detection sheet made of a magnetostriction material, an excitation coil is fixed at the position matched with the other surface of the force detection sheet, and a detection coil is arranged between the excitation coil and the force detection sheet.
The magnetostrictive material is amorphous soft magnetic alloy 1K107.1K107 is an iron-based nanocrystalline alloy, which is an amorphous material formed by taking an iron element as a main component and adding a small amount of Nb, cu, si and B elements to the alloy through a rapid solidification process, and the amorphous material can obtain microcrystals with the diameter of 10-20 nm after being subjected to heat treatment and is dispersed on an amorphous substrate, so that the amorphous substrate is called as a microcrystal, a nanocrystalline material or a nanocrystalline material. The nanocrystalline material has excellent comprehensive magnetic properties: high saturation magnetic induction, high initial permeability, low Hc and low high-frequency loss under high magnetic induction. Is the material with the best comprehensive performance in the current market; the high-frequency inductor core is widely applied to high-power switching power supplies, inverter power supplies, magnetic amplifiers, high-frequency transformers, high-frequency converters, high-frequency choke coil cores, current transformer cores, leakage protection switches and common-mode inductor cores.
The excitation coil and the detection coil are planar coils, and both the excitation coil and the detection coil are printed on a PCB and are manufactured into a whole in a superposed mode. The two are integrated on the PCB to form an integrated excitation detection coil, so that the installation is more convenient.
The elastic body of the force sensor is a strain beam and is positioned in the middle of an S-shaped sensor formed by five beams, the upper horizontal beam and the lower horizontal beam of the S-shaped sensor are loading beams, the vertical beams respectively connected with the end parts of the loading beams are transfer beams, and the strain beams connected with the end parts of the two transfer beams are positioned in the middle of the S-shaped sensor and are horizontally arranged; the force detection piece is fixed on the surface of the middle part of the strain beam, the excitation coil and the detection coil are fixed on the surface of the loading beam, and the positions of the excitation coil and the detection coil are matched with those of the force detection piece.
The external force acts on the loading beam to play a loading role; the transmission beam is used for transmitting the force loaded on the loading beam to the middle strain beam, and finally the force loaded from the outside is applied to the strain beam, so that the stress strain is generated on the strain beam.
The excitation detection coil can be fixed on the elastomer loading beam by high-strength structural adhesive; the force detection sheet can also be fixed on the strain beam by high-strength structural adhesive.
The excitation coil and the detection coil are both plane regular octagons. The aim is to obtain the maximum magnetic field in the smallest area.
The upper surface and the lower surface of the middle part of the strain beam are fixedly provided with force detection sheets, and the matching positions of the upper loading beam and the lower loading beam are provided with an excitation coil and a detection coil. Two groups of data can be obtained by arranging the same force sensing devices up and down, signal amplification processing can be realized, and the data obtained by correcting the two groups of data are more accurate.
In the S-shaped sensor, the middle part of the upper end face of an upper loading beam is provided with a threaded hole, and the middle part of the lower end face of a lower loading beam is also provided with a threaded hole. The threaded hole may be used to secure the force applying component.
The utility model discloses the theory of operation as follows:
when the force sensor based on the inverse magnetostriction effect is used, the tensile force or the pressure is transmitted to the strain beams through the upper loading beam, the lower loading beam, the left transmission beam and the right transmission beam, and at the moment, the strain beams can be bent and deformed to generate stress and strain simultaneously.
At this time, the amorphous alloy force detection piece adhered to the surface of the elastic shaft generates stress, and an inverse magnetostriction effect (vilari effect) is generated. The amorphous alloy force detection sheet is essentially a magnetostrictive material and is characterized in that the magnetic conductivity of the amorphous alloy force detection sheet can be changed when the amorphous alloy force detection sheet is stressed, and the magnetic field can be changed under the condition of an external magnetic field. The amorphous alloy force detection piece changes the magnetic flux in the alternating magnetic field generated by the excitation coil, and the detection coil detects the change of the magnetic flux and then converts the change into an electrical signal to represent the change of the received torque.
The reverse magnetostriction effect is a unique physical property of ferromagnetic materials, which indicates that the permeability of the parameter in the ferromagnetic materials changes under the influence of an external force. When an elastic shaft made of ferromagnetic material is under the action of a stable external excitation field and is influenced by an external force, the change of the magnetization state of the elastic material can be regarded as the result of the change of the magnetic permeability. Under the action of torque or stress, the change of the internal magnetic domain structure of the magnetic material is the reason for influencing the change of the internal magnetization state of the material. Therefore, the inverse magnetostriction effect of the ferromagnetic material can be used for representing the stress state change of the ferromagnetic material by measuring the change of the magnetization intensity of the ferromagnetic material when the ferromagnetic material is loaded with force, so that the problem of measuring force is converted into the problem of measuring the magnetization intensity of the material. In addition, the positive or negative of the magnetostriction coefficient, which is a physical quantity, affects the rotation direction of the magnetic domain. This patent discusses the change in the magnetization state of the elastic shaft material from the change in the magnetic permeability and the change in the magnetic induction. In fact, the change in magnetization is a change in magnetic induction, so we can analyze the applied external force from the macroscopic change in magnetic induction.
The excitation coil in the excitation detection coil can continuously add a stable alternating magnetic field to the amorphous alloy force detection sheet, when the strain beam in the elastomer has stress change, the surface magnetostrictive material can cause the magnetic field change, and the detection coil in the excitation detection coil can recognize the change and convert the change into an electric signal to be transmitted to an external data acquisition device.
The utility model has the advantages that:
1. the utility model discloses the method can be applied to the force sensor field, and the force sensor who obtains has that the interference killing feature is strong, the durability is good, easy to advantages such as miniaturization development, especially is suitable for the on-line monitoring of moment. The force is measured by adopting the inverse magnetostriction effect, so that the control error caused by the reduction of the system rigidity can be effectively reduced, and errors such as sensor hysteresis and the like can be improved.
2. The force sensor can be widely applied to the field of automatic robots, particularly robots working under heavy-load severe working conditions due to the advantages, and can realize the miniaturization of the force sensing device. Is suitable for wide application fields.
Drawings
Fig. 1 is a schematic perspective view of the present invention;
FIG. 2 is a cross-sectional view of the S-shaped sensor beam of the present invention;
fig. 3 is a schematic view showing a positional relationship among the force detection piece, the excitation coil, and the detection coil;
fig. 4 is a front view of the excitation coil and the detection coil;
FIG. 5 is a scatter plot of force sensor test deviation coordinates;
the notation in the figures means: 11-a strain beam; 12-a load beam; 13-a transfer beam; 2-force detection sheet; 3-a field coil; 4-detection coil.
Detailed Description
Example 1
A force sensor based on reverse magnetostriction effect, the deformation surface of the non-magnetic elastomer in the sensor is jointed with the surface of the force detection piece 2 made of magnetostriction material, the other surface of the force detection piece 2 matches the position and fixes the excitation coil 3, set up the detection coil 4 between force detection piece 2 and the excitation coil 3; the force detection sheet 2 is made of magnetostriction material amorphous soft magnetic alloy 1K107, and the thickness of the force detection sheet is only 0.026mm; the force detection sheet is adhered to the central part of the elastic body strain beam through high-strength structural adhesive 4080;
the excitation coil 3 and the detection coil 4 are planar coils, and are printed on a PCB and are manufactured into a whole in a superposed manner; the excitation detection coil is divided into an excitation coil and a detection coil; wherein the excitation coil provides an alternating magnetic field through an external signal generator; the detection coil detects the variation of the magnetic field in the space and outputs the output signal to an external signal acquisition device; the excitation detection coil is fixed on the elastomer loading beam through high-strength structural adhesive;
the elastic body of the force sensor is a strain beam 11 which is positioned in the middle of an S-shaped sensor formed by five beams, the five beams are integrally formed by aluminum alloy materials, the upper horizontal beam and the lower horizontal beam of the S-shaped sensor are loading beams 12, the vertical beams respectively connected with the end parts of the loading beams 12 are transfer beams 13, and the strain beams 11 connected with the end parts of the two transfer beams 13 are positioned in the middle of the S-shaped sensor and are horizontally arranged; the force detection piece 2 is fixed on the surface of the middle part of the strain beam 11, the excitation coil 3 and the detection coil 4 are fixed on the surface of the loading beam 12, and the positions of the excitation coil and the detection coil are matched with the position of the force detection piece 2;
the excitation coil 3 and the detection coil 4 are both plane regular octagons; the plane size of the PCB is 10mm by 10mm, and each PCB has 11 turns;
in the S-shaped sensor, the middle part of the upper end surface of an upper loading beam 12 is provided with a threaded hole, the middle part of the lower end surface of a lower loading beam 12 is also provided with a threaded hole, and the hole does not penetrate through the threaded hole to form a blind hole.
The application example is as follows:
the application of the invention on a force sensing measurer is verified through experiments:
establishing an experiment platform: the sensor in embodiment 1 is fixed on an experiment platform, a weight is used for loading to carry out calibration experiment on the sensor, an initial excitation signal is given to the sensor through a signal generator, and a signal acquired by the sensor is acquired, displayed and recorded through an oscilloscope.
The experimental process comprises the following steps: after the sensor is fixed, the wire ends at the two ends of the excitation coil are connected to the signal generator, and the wire ends at the two ends of the detection coil are connected to the oscilloscope. After the detection wire is connected, a sine signal of 5VPP and 5MHz is given to the exciting coil by using a signal generator. The weight is loaded on the sensor in a unit increment of 25N in a range of 0-200N in stages, and pressure is applied to the sensor. By mounting the weights, the sensor is stressed by 0-200N, and the amplitude displayed on the oscilloscope is recorded after the weights are mounted each time. And (4) carrying out unloading experiments after the weight is hung to 200N, still reducing the weight by 25N as a unit, unloading the weight from 200N to 0, and recording the amplitude displayed on the oscilloscope after each unloading.
The experimental results are as follows:
according to the graph shown in FIG. 5, the experimental data is obtained by averaging in multiple experiments, the obtained average value has high coincidence with the fitting line in the scattered points on the coordinate, and the linearly fitted R is 2 Is 0.9983.
Analysis according to experimental data:
non-linearity error: sensor nonlinearity
The following formula is used to obtain:
wherein
-maximum nonlinear error;
the nonlinear error of the sensor is 2.64% by substituting the experimental data into the formula.
Sensitivity: the sensor sensitivity refers to the ratio of the output change to the input change of the sensor under the steady state, and the sensitivity is calculated to be 6.436mV/N.
Hysteresis error: the hysteresis error of the sensor can be represented by the formula:
is calculated to obtain in the formula
The maximum difference between the forward stroke and the backward stroke is output.
The hysteresis error of the sensor is calculated to be 0.839 percent by substituting the data
The experimental data show that the sensor has good linearity and small hysteresis error.
Claims (6)
1. A force sensor based on the inverse magnetostrictive effect is characterized in that: the deformation surface of the non-magnetic conductive elastomer in the sensor is attached to the surface of a force detection sheet (2) made of magnetostrictive materials, an excitation coil (3) is fixed at the matching position of the other surface of the force detection sheet (2), and a detection coil (4) is arranged between the excitation coil (3) and the force detection sheet (2).
2. The inverse magnetostrictive effect-based force sensor according to claim 1, characterized in that: the excitation coil (3) and the detection coil (4) are planar coils, are printed on a PCB and are manufactured into a whole in a superposed mode.
3. The inverse magnetostrictive effect-based force sensor according to claim 1, wherein: the elastic body of the force sensor is a strain beam (11) which is positioned in the middle of an S-shaped sensor formed by five beams, the upper horizontal beam and the lower horizontal beam of the S-shaped sensor are loading beams (12), the vertical beams respectively connected with the end parts of the loading beams (12) are transfer beams (13), and the strain beam (11) connected with the end parts of the two transfer beams (13) is positioned in the middle of the S-shaped sensor and is horizontally arranged; the force detection piece (2) is fixed on the surface of the middle part of the strain beam (11), the excitation coil (3) and the detection coil (4) are fixed on the surface of the loading beam (12), and the positions of the excitation coil and the detection coil are matched with those of the force detection piece (2).
4. The inverse magnetostrictive effect-based force sensor according to claim 1, characterized in that: the excitation coil (3) and the detection coil (4) are both plane regular octagons.
5. The inverse magnetostrictive effect-based force sensor according to claim 3, characterized in that: the upper surface and the lower surface of the middle part of the strain beam (11) are fixedly provided with a force detection sheet (2), and the matching positions of the upper loading beam and the lower loading beam (12) are provided with an excitation coil (3) and a detection coil (4).
6. The inverse magnetostrictive effect-based force sensor according to claim 3, characterized in that: in the S-shaped sensor, the middle of the upper end face of an upper loading beam (12) is provided with a threaded hole, and the middle of the lower end face of a lower loading beam (12) is also provided with a threaded hole.
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| CN202222289154.XU CN218724901U (en) | 2022-08-30 | 2022-08-30 | Force sensor based on inverse magnetostrictive effect |
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| CN202222289154.XU CN218724901U (en) | 2022-08-30 | 2022-08-30 | Force sensor based on inverse magnetostrictive effect |
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