CN108548622A - Contactless joint of robot torque-measuring apparatus based on counter magnetostriction effect - Google Patents

Contactless joint of robot torque-measuring apparatus based on counter magnetostriction effect Download PDF

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Publication number
CN108548622A
CN108548622A CN201810367931.3A CN201810367931A CN108548622A CN 108548622 A CN108548622 A CN 108548622A CN 201810367931 A CN201810367931 A CN 201810367931A CN 108548622 A CN108548622 A CN 108548622A
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CN
China
Prior art keywords
giant magnetostrictive
magnetostrictive material
material coating
torque
indicate
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CN201810367931.3A
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Chinese (zh)
Inventor
王静
王雷
唐钰璇
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Harbin Institute of Technology
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Harbin Institute of Technology
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Priority to CN201810367931.3A priority Critical patent/CN108548622A/en
Publication of CN108548622A publication Critical patent/CN108548622A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L3/00Measuring torque, work, mechanical power, or mechanical efficiency, in general
    • G01L3/02Rotary-transmission dynamometers
    • G01L3/04Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft
    • G01L3/10Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft involving electric or magnetic means for indicating
    • G01L3/101Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft involving electric or magnetic means for indicating involving magnetic or electromagnetic means
    • G01L3/102Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft involving electric or magnetic means for indicating involving magnetic or electromagnetic means involving magnetostrictive means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L3/00Measuring torque, work, mechanical power, or mechanical efficiency, in general
    • G01L3/02Rotary-transmission dynamometers
    • G01L3/04Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft
    • G01L3/10Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft involving electric or magnetic means for indicating
    • G01L3/101Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft involving electric or magnetic means for indicating involving magnetic or electromagnetic means
    • G01L3/105Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft involving electric or magnetic means for indicating involving magnetic or electromagnetic means involving inductive means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/0028Force sensors associated with force applying means
    • G01L5/0042Force sensors associated with force applying means applying a torque

Abstract

Contactless joint of robot torque-measuring apparatus based on counter magnetostriction effect belongs to the sensing measurement technology of robot arm precision control, is characterized in that:Giant magnetostrictive material coating item is coated on the output shaft of joint of robot torque, giant magnetostrictive material coating item is divided into positive giant magnetostrictive material coating item and negative giant magnetostrictive material coating item, and symmetrical in an axial direction tilt is coated on output shaft at equal intervals for positive giant magnetostrictive material coating item and negative giant magnetostrictive material coating item;It is equipped with sleeve in the outer sheath of giant magnetostrictive material coating item on output shaft, excitation coil is equipped on the inner wall of the sleeve, the left measuring coil of same size and right measuring coil is equipped with side by side in an axial direction on the inner wall of excitation coil.The present invention in not Contact Transmission axis, do not change high accuracy, high-precision real time dynamic measurement carried out to torque under stressed transmission shaft situation and rotation and dynamic operating condition, to realize that the precision to mechanical arm controls.

Description

Contactless joint of robot torque-measuring apparatus based on counter magnetostriction effect
Technical field
The invention belongs to the sensing measurement technologies of robot arm precision control, relate generally to one kind and are stretched based on inverse mangneto The contactless joint of robot torque-measuring apparatus of contracting effect.
Background technology
Important composition component of the joint of robot as robot, the quality of performance directly affect the globality of robot Can, in real work, it is desirable that the speed and acceleration that robot end can be according to regulation in the case where bearing certain load-up condition Degree is moved along specified track, and can this depends primarily on each articular system dynamically provide required driving force or power Square.Application and development with robot in fields such as industry, military, service, health care and aerospaces, to robot Mechanical arm control requirement it is higher and higher, such as robot for space execute it is in-orbit safeguard (OOS), need to mechanical arm carry out essence A series of close control, to complete service actions;Pen tip will be protected with certain active force and working face at work for drawing robot Contact is held, needs to carry out accurate control to mechanical arm to realize that robot pen tip is contacted with suitable active force with working face, protect Demonstrate,prove drafting accuracy.And the measurement to joint of mechanical arm torque, therefore, machine are then be unable to do without to the accurate control of robot arm The accurate measuring technique of tool shoulder joint torque is increasingly taken seriously, and more and more researchers are to joint of mechanical arm torque Measurement conduct in-depth research.
The patent document of Publication No. CN206470010U discloses one kind of Chongqing Co., Ltd of Bing Ke robots application Joint of mechanical arm torque-measuring apparatus, the device is by interior connection ring, outer connection ring, pressure sensitive device, arcuation holder and arcuation Probe composition, is popped one's head in by arcuation and triggers pressure sensitive device, further according to the pressure information and pressure of pressure sensitive device feedback Radius of turn residing for sensing device realizes the joint torque measurement under current operation direction.The advantages of measuring device, exists In:Double steering measurement and torque data multiposition parallel measurement, high sensitivity can be achieved;The measuring device there are the problem of In:Complicated, there are multiple probes and multiple conducting wires, influence the stability and measurement accuracy of device.
The patent document of Publication No. CN104215372A discloses Shenyang Inst of Automation, Chinese Academy of Sciences's application A kind of joint of mechanical arm torque-measuring apparatus, the measuring device during elastomer, gauge head and displacement detecting by forming, mainly By the way that torque information to be converted to the deformation of elastomer, the deformation of elastomer is then converted to by displacement information, root by gauge head Study carefully different size of torque and will produce different size of displacement, realizes the measurement to joint of mechanical arm torque.The measuring device Advantage is:It is small, it is light-weight, the influence of the factors such as temperature, humidity and electromagnetic noise can be avoided;The measuring device is deposited The problem of be:Belong to contact-type torque-measuring apparatus, there are problems that stability and uncertainty, measurement accuracy be not high.
Invention content:
In view of the deficiency of the prior art, the present invention provides a kind of based on the non-contact of counter magnetostriction effect Formula joint of robot torque-measuring apparatus, with realize not Contact Transmission axis, do not change stressed transmission shaft situation and rotation and High accuracy, high-precision real time dynamic measurement are carried out to torque under dynamic operating condition, to realize the precision to mechanical arm The purpose of control.
The contactless joint of robot torque-measuring apparatus based on counter magnetostriction effect of the present invention, it is above-mentioned to realize Technical solution used by purpose is:It is applied coated with giant magnetostrictive material on the output shaft of the joint of robot torque Layer item, the giant magnetostrictive material coating item is divided into positive giant magnetostrictive material coating item and negative giant magnetostrictive material applies Layer item, the positive giant magnetostrictive material coating item and negative giant magnetostrictive material coating item are symmetrical in an axial direction at equal intervals It tilts coated on output shaft;On the output shaft sleeve, the set are equipped in the outer sheath of giant magnetostrictive material coating item It is equipped with excitation coil on the inner wall of cylinder, is equipped with the left survey of same size on the inner wall of the excitation coil side by side in an axial direction Measure coil and right measuring coil;
Measurement process is:
Step a, sinusoidal excitation signal is passed through excitation coil 4, for providing sinusoidal excitation magnetic field, keeps two specifications identical Left measuring coil 5a and right measuring coil 5b under the action of sine alternating magnetic field, generate the identical induced electromotive force of size;
Step b, it by the identical left measuring coil 5a of the two specifications and right measuring coil 5b differential concatenations, is surveyed for sensing The zeroing of amount;
Step c, the output shaft 1 coated with giant magnetostrictive material coating item 2 strains under the action of torque, makes to surpass The internal magnetization state of magnetostriction materials coating item 2 changes, and leads to the identical left measuring coil 5a of two specifications and right measurement Magnetic field in coil 5b changes, and output differential sense answers voltage Uo, the output differential sense answers voltage UoCalculation is:
In formula:μ indicates the magnetic conductivity of giant magnetostrictive material, λsIndicate the saturation magnetostriction system of giant magnetostrictive material Number, f indicate the frequency of pumping signal, N2Indicate that the number of turns of measuring coil, H indicate that magnetic field intensity, S indicate ultra-magnetic telescopic material Expect the sectional area of coating item, BsIndicate the saturation induction density of giant magnetostrictive material, WpIndicate the anti-section system of output shaft Number, T indicate torque.
Step d, according to output differential voltage UoWith torque proportional, torque value is obtained.
As a further improvement on the present invention, axially inclined 45 ° of the ﹢ of the positive giant magnetostrictive material coating item is coated in On output shaft, negative axially inclined 45 ° of the ﹣ of giant magnetostrictive material coating item is coated on output shaft.So set, ± 45 ° can be convenient for the internal magnetization state of giant magnetostrictive material coating item to change, and then be convenient for the identical left side of two specifications Magnetic field in measuring coil 5a and right measuring coil 5b changes.
As a further improvement on the present invention, the left measuring coil and right measuring coil are 1/2 along the length of axis Length of the excitation coil along axis.So set, using the basis as differential concatenation zeroing when follow-up measure.
As a further improvement on the present invention, the material that the giant magnetostrictive material coating uses is terbium dysprosium ferrum.So Setting makes giant magnetostrictive material coating have the outstanding features such as strain sensitive, fast response time, ensure that the survey of device Accuracy of measurement and response speed.
As a further improvement on the present invention, the giant magnetostrictive material coating strip adoption magnetron sputtering, vacuum evaporation, Any one technique in pulsed laser deposition or spraying is prepared.
The measurement method of the contactless joint of robot torque-measuring apparatus based on counter magnetostriction effect of the present invention, The technical solution of use is, includes the following steps:
Step a, sinusoidal excitation signal is passed through excitation coil 4, for providing sinusoidal excitation magnetic field, keeps two specifications identical Left measuring coil 5a and right measuring coil 5b under the action of sine alternating magnetic field, generate the identical induced electromotive force of size;
Step b, it by the identical left measuring coil 5a of the two specifications and right measuring coil 5b differential concatenations, is surveyed for sensing The zeroing of amount;
Step c, the output shaft 1 coated with giant magnetostrictive material coating item 2 strains under the action of torque, makes to surpass The internal magnetization state of magnetostriction materials coating item 2 changes, and leads to the identical left measuring coil 5a of two specifications and right measurement Magnetic field in coil 5b changes, and output differential sense answers voltage Uo, the output differential sense answers voltage UoCalculation is:
In formula:μ indicates the magnetic conductivity of giant magnetostrictive material, λsIndicate the saturation magnetostriction system of giant magnetostrictive material Number, f indicate the frequency of pumping signal, N2Indicate that the number of turns of measuring coil, H indicate that magnetic field intensity, S indicate ultra-magnetic telescopic material Expect the sectional area of coating item, BsIndicate the saturation induction density of giant magnetostrictive material, WpIndicate the anti-section system of output shaft Number, T indicate torque.
Step d, according to output differential voltage UoWith torque proportional, torque value is obtained.
The present invention beneficial aspects be:The present invention by giant magnetostrictive material coating item respectively be in ± 45 ° of directions at equal intervals Even application is on the surface of output shaft, is set on output shaft using the core material as sensing, while by sleeve fixation, and In the outside of giant magnetostrictive material coating item, excitation coil is assemblied on the inner wall of sleeve, then two specifications are identical Left measuring coil and the right measuring coil inner wall that is assemblied in excitation coil respectively left-half and right half part on, be used for The contactless environment of sensing measurement is provided.
Compared with the prior art, the advantages of the present invention are as follows:
(1), measuring principle of the invention is mainly based upon applies giant magnetostrictive material coating item and produces on output shaft Raw counter magnetostriction effect, then torque signal will be converted to voltage signal and exported, output signal and tested torque at Direct ratio, to measure the torque in joint, measuring principle is simple;
(2), torque-measuring apparatus of the invention is mainly by coated in giant magnetostrictive material coating item, the set on output shaft Be located at the sleeve on output shaft, the excitation coil on sleeve lining, the left measuring coil on excitation coil inner wall and 5 components of right measuring coil are constituted, and the present invention is made to reach in not Contact Transmission axis, not change stressed transmission shaft situation and rotation Turn to carry out high accuracy, high-precision real time dynamic measurement to torque under dynamic operating condition, and is measured compared to conventional torque Device, structure is more simple, and the fixed connection structure of wherein output shaft and sleeve is more simple, solid and reliable;
(3) present invention makes giant magnetostrictive material coating item using terbium dysprosium ferrum as sensing material, makes it have correspondence Become the outstanding features such as sensitivity, fast response time, ensure that the measurement accuracy and response speed of measuring device.
In addition, the present invention also have small, measurement accuracy higher, dynamic responding speed and in real time monitoring property faster, Measure the stronger advantage of reliability of analysis.
In addition, the measuring device of the present invention and " the contactless torque survey based on counter magnetostriction effect declared on the same day Measure device " this patent application difference lies in:The present invention measuring device mainly for joint of robot torque measurement, Make every effort to it is compact-sized rationally, do not interfere the normal operation of joint of robot as possible, output shaft designed in this way, facilitate sleeve with It is directly connected, and simplifies the structure of torque-measuring apparatus, almost without friction, mechanical loss is small, long lifespan, and structure More simple and compact is suitable for small space measurement, and assembly is more simple, is more suitable for the measurement of joint of robot torque.
Description of the drawings:
Fig. 1 is the structural schematic diagram that giant magnetostrictive material coating item is applied on output shaft;
Fig. 2 is the structural schematic diagram that measuring device is mounted on output shaft;
As shown in the figure:1 is output shaft, and 2 be giant magnetostrictive material coating item, and 2a is positive giant magnetostrictive material coating Item, 2b are negative giant magnetostrictive material coating item, and 3 be sleeve, and 4 be excitation coil, and 5a is left measuring coil, and 5b is right measurement Coil.
Specific implementation mode:
Embodiment one
Referring to Figures 1 and 2, the contactless joint of robot torque measuring based on counter magnetostriction effect in the present embodiment Device is measured, is coated with giant magnetostrictive material coating item 2 on the output shaft 1 of the joint of robot torque, the super mangneto is stretched Compression material coating item 2 divides for positive giant magnetostrictive material coating 2a and negative giant magnetostrictive material coating 2b, described positive excess Symmetrical inclination is coated in magnetostriction materials coating 2a and negative giant magnetostrictive material coating 2b in an axial direction at equal intervals On output shaft 1;It is equipped with sleeve 3 in the outer sheath of giant magnetostrictive material coating item 2 on the output shaft 1, the sleeve 3 It is equipped with excitation coil 4 on inner wall, is equipped with the left measurement of same size on the inner wall of the excitation coil 4 side by side in an axial direction Coil 5a and right measuring coil 5b;
Measurement process is:
Step a, sinusoidal excitation signal is passed through excitation coil 4, for providing sinusoidal excitation magnetic field, keeps two specifications identical Left measuring coil 5a and right measuring coil 5b under the action of sine alternating magnetic field, generate the identical induced electromotive force of size;
Step b, it by the identical left measuring coil 5a of the two specifications and right measuring coil 5b differential concatenations, is surveyed for sensing The zeroing of amount;
Step c, the output shaft 1 coated with giant magnetostrictive material coating item 2 strains under the action of torque, makes to surpass The internal magnetization state of magnetostriction materials coating item 2 changes, and leads to the identical left measuring coil 5a of two specifications and right measurement Magnetic field in coil 5b changes, and output differential sense answers voltage Uo, the output differential sense answers voltage UoCalculation is:
In formula:μ indicates the magnetic conductivity of giant magnetostrictive material, λsIndicate the saturation magnetostriction system of giant magnetostrictive material Number, f indicate the frequency of pumping signal, N2Indicate that the number of turns of measuring coil, H indicate that magnetic field intensity, S indicate ultra-magnetic telescopic material Expect the sectional area of coating item, BsIndicate the saturation induction density of giant magnetostrictive material, WpIndicate the anti-section system of output shaft Number, T indicate torque.
Step d, according to output differential voltage UoWith torque proportional, torque value is obtained.
Embodiment two
Referring to Fig.1, the present embodiment inclines positive giant magnetostrictive material coating 2a on the basis of embodiment one in an axial direction The axially inclined ﹣ of negative giant magnetostrictive material coating 2b are coated in output shaft 1 for 45 ° by 45 ° of oblique ﹢ coated on output shaft 1 On.
Embodiment three
With reference to Fig. 2, left measuring coil 5a and right measuring coil 5b are all provided with along the length of axis and are set to equal to 1/2 excitation line Length of the circle 4 along axis.
Example IV
The present embodiment is made on the basis of embodiment one, by giant magnetostrictive material coating 2 using terbium dysprosium ferrum.
Embodiment five
The present embodiment is steamed on the basis of embodiment one, by giant magnetostrictive material coating item 2 using magnetron sputtering, vacuum Any one technique in hair, pulsed laser deposition or spraying is prepared.
The measurement method of the contactless joint of robot torque-measuring apparatus based on counter magnetostriction effect of the present invention, Include the following steps:
Step a, sinusoidal excitation signal is passed through excitation coil 4, for providing sinusoidal excitation magnetic field, keeps two specifications identical Left measuring coil 5a and right measuring coil 5b under the action of sine alternating magnetic field, generate the identical induced electromotive force of size;
Step b, it by the identical left measuring coil 5a of the two specifications and right measuring coil 5b differential concatenations, is surveyed for sensing The zeroing of amount;
Step c, the output shaft 1 coated with giant magnetostrictive material coating item 2 strains under the action of torque, makes to surpass The internal magnetization state of magnetostriction materials coating item 2 changes, and leads to the identical left measuring coil 5a of two specifications and right measurement Magnetic field in coil 5b changes, and output differential sense answers voltage Uo, the output differential sense answers voltage UoCalculation is:
In formula:μ indicates the magnetic conductivity of giant magnetostrictive material, λsIndicate the saturation magnetostriction system of giant magnetostrictive material Number, f indicate the frequency of pumping signal, N2Indicate that the number of turns of measuring coil, H indicate that magnetic field intensity, S indicate ultra-magnetic telescopic material Expect the sectional area of coating item, BsIndicate the saturation induction density of giant magnetostrictive material, WpIndicate the anti-section system of output shaft Number, T indicate torque.
Step d, voltage U is answered by output differential senseoFormula is it is found that output differential voltage UoWith torque proportional, into And corresponding torque is obtained, realize the measurement of joint of robot torque.

Claims (6)

1. the contactless joint of robot torque-measuring apparatus based on counter magnetostriction effect, it is characterised in that:The machine Giant magnetostrictive material coating item (2), the giant magnetostrictive material coating item are coated on the output shaft (1) of person joint's torque (2) it is divided into positive giant magnetostrictive material coating item (2a) and negative giant magnetostrictive material coating item (2b), the positive excess mangneto is stretched Compression material coating item (2a) and negative giant magnetostrictive material coating item (2b) are symmetrical in an axial direction at equal intervals to be tilted coated in defeated On shaft (1);On the output shaft (1) sleeve (3), the set are equipped in the outer sheath of giant magnetostrictive material coating item (2) It is equipped with excitation coil (4) on the inner wall of cylinder (3), identical rule are equipped with side by side in an axial direction on the inner wall of the excitation coil (4) The left measuring coil (5a) and right measuring coil (5b) of lattice;
Measurement process is:
Step a, sinusoidal excitation signal is passed through excitation coil (4), for providing sinusoidal excitation magnetic field, keeps two specifications identical Left measuring coil (5a) and right measuring coil (5b) generate the identical induction electric of size under the action of sine alternating magnetic field Gesture;
Step b, it by the identical left measuring coil (5a) of the two specifications and right measuring coil (5b) differential concatenation, is surveyed for sensing The zeroing of amount;
Step c, the output shaft (1) for being coated with giant magnetostrictive material coating item (2) strains under the action of torque, makes to surpass The internal magnetization state of magnetostriction materials coating item (2) changes, and leads to the identical left measuring coil (5a) of two specifications and the right side Magnetic field in measuring coil (5b) changes, and output differential sense answers voltage Uo, the output differential sense answers voltage UoCalculation For:
In formula:μ indicates the magnetic conductivity of giant magnetostrictive material, λsIndicate the saturation magnetostriction constant of giant magnetostrictive material, f Indicate the frequency of pumping signal, N2Indicate that the number of turns of measuring coil, H indicate that magnetic field intensity, S indicate giant magnetostrictive material coating The sectional area of item, BsIndicate the saturation induction density of giant magnetostrictive material, WpIndicate that the anti-section factor of output shaft, T indicate Torque.
Step d, according to output differential voltage UoWith torque proportional, torque value is obtained.
2. the contactless joint of robot torque-measuring apparatus based on counter magnetostriction effect as described in claim 1, It is characterized in that:Axially inclined 45 ° of the ﹢ of positive giant magnetostrictive material coating item (2a) is coated on output shaft (1), described negative 45 ° of the axially inclined ﹣ of giant magnetostrictive material coating item (2b) is coated on output shaft (1).
3. the contactless joint of robot torque-measuring apparatus based on counter magnetostriction effect as described in claim 1, It is characterized in that:The left measuring coil (5a) and right measuring coil (5b) are 1/2 excitation coil (4) along axis along the length of axis The length of line.
4. the contactless joint of robot torque-measuring apparatus based on counter magnetostriction effect as described in claim 1, It is characterized in that:The material that the giant magnetostrictive material coating (2) uses is terbium dysprosium ferrum.
5. the contactless joint of robot torque-measuring apparatus based on counter magnetostriction effect as described in claim 1, It is characterized in that:The giant magnetostrictive material coating item (2) uses magnetron sputtering, vacuum evaporation, pulsed laser deposition or spraying In any one technique be prepared.
6. a kind of contactless joint of robot based on counter magnetostriction effect as described in any one of claim 1-5 The measurement method of torque-measuring apparatus, which is characterized in that include the following steps:
Step a, sinusoidal excitation signal is passed through excitation coil (4), for providing sinusoidal excitation magnetic field, keeps two specifications identical Left measuring coil (5a) and right measuring coil (5b) generate the identical induction electric of size under the action of sine alternating magnetic field Gesture;
Step b, it by the identical left measuring coil (5a) of the two specifications and right measuring coil (5b) differential concatenation, is surveyed for sensing The zeroing of amount;
Step c, the output shaft (1) for being coated with giant magnetostrictive material coating item (2) strains under the action of torque, makes to surpass The internal magnetization state of magnetostriction materials coating item (2) changes, and leads to the identical left measuring coil (5a) of two specifications and the right side Magnetic field in measuring coil (5b) changes, and output differential sense answers voltage Uo, the output differential sense answers voltage UoCalculation For:
In formula:μ indicates the magnetic conductivity of giant magnetostrictive material, λsIndicate the saturation magnetostriction constant of giant magnetostrictive material, f Indicate the frequency of pumping signal, N2Indicate that the number of turns of measuring coil, H indicate that magnetic field intensity, S indicate giant magnetostrictive material coating The sectional area of item, BsIndicate the saturation induction density of giant magnetostrictive material, WpIndicate that the anti-section factor of output shaft, T indicate Torque.
Step d, according to output differential voltage UoWith torque proportional, torque value is obtained.
CN201810367931.3A 2018-04-23 2018-04-23 Contactless joint of robot torque-measuring apparatus based on counter magnetostriction effect Pending CN108548622A (en)

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CN114918921A (en) * 2022-06-08 2022-08-19 苏州艾利特机器人有限公司 Redundant force sensor who detects and robot
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Publication number Priority date Publication date Assignee Title
CN109443622A (en) * 2019-01-08 2019-03-08 北京奇力建通工程技术有限公司 Suo Li detection method and device and cable tension sensor
CN111537122A (en) * 2020-05-08 2020-08-14 上海钧嵌传感技术有限公司 Detection shaft of torque detection sensor and preparation method
CN114705328A (en) * 2021-12-24 2022-07-05 南京航空航天大学 Torque sensor based on magnetic-elastic effect
CN114705328B (en) * 2021-12-24 2023-12-01 南京航空航天大学 Moment sensor based on magneto-elastic effect
CN114918921A (en) * 2022-06-08 2022-08-19 苏州艾利特机器人有限公司 Redundant force sensor who detects and robot
CN114918921B (en) * 2022-06-08 2024-01-26 苏州艾利特机器人有限公司 Redundant force sensor and robot that detects
CN115452204A (en) * 2022-08-30 2022-12-09 华能广西清洁能源有限公司 Force sensing measurement method based on inverse magnetostriction effect
CN115683436A (en) * 2022-10-12 2023-02-03 华能广西清洁能源有限公司 Three-dimensional force sensor based on inverse magnetostriction effect

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Application publication date: 20180918