LU34266A1 - - Google Patents

Info

Publication number
LU34266A1
LU34266A1 LU34266DA LU34266A1 LU 34266 A1 LU34266 A1 LU 34266A1 LU 34266D A LU34266D A LU 34266DA LU 34266 A1 LU34266 A1 LU 34266A1
Authority
LU
Luxembourg
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Publication of LU34266A1 publication Critical patent/LU34266A1/xx
Priority claimed from DED20199A external-priority patent/DE1024772B/de

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/32009Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018Glow discharge
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/087Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J19/088Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/32917Plasma diagnostics
    • H01J37/32935Monitoring and controlling tubes by information coming from the object and/or discharge

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Plasma & Fusion (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Particle Accelerators (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Discharge Heating (AREA)
LU34266D 1955-04-02 LU34266A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DED20199A DE1024772B (de) 1955-04-02 1955-04-02 Verfahren zum Betreiben stromstarker Glimmentladungen in Entladungsgefaessen, insbesondere zur Behandlung von in das Entladungsgefaess eingebrachten Koerpern
DED22888A DE1029213B (de) 1955-04-02 1956-05-04 Verfahren und Vorrichtung zum Betreiben stromstarker Glimmentladungen in Entladungsgefaessen, insbesondere zur Behandlung von in das Entladungsgefaess eingebrachten Koerpern

Publications (1)

Publication Number Publication Date
LU34266A1 true LU34266A1 (de)

Family

ID=25970730

Family Applications (1)

Application Number Title Priority Date Filing Date
LU34266D LU34266A1 (de) 1955-04-02

Country Status (5)

Country Link
BE (2) BE546604A (de)
CH (2) CH343554A (de)
DE (1) DE1029213B (de)
GB (1) GB807345A (de)
LU (1) LU34266A1 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2811942C2 (de) * 1977-03-23 1986-09-18 Vide et Traitement S.A., Neuilly-en-Thelle Ofen zur ionischen Nitrierbehandlung von metallischen Werkstücken
BG41744A1 (en) * 1984-11-26 1987-08-14 Savov Method for control of chimico= thermic processing of work- pieces with glowing dicharge in medium of processing gas and device for implementing this method
DE4242633C2 (de) * 1992-12-17 1996-11-14 Fraunhofer Ges Forschung Verfahren zur Durchführung von stabilen Niederdruck-Glimmprozessen
DE102006043898A1 (de) * 2006-09-19 2008-04-17 Siemens Ag Vorrichtung und Verfahren zum Betrieb einer Plasmaanlage
DE102012206225A1 (de) * 2012-04-16 2013-10-17 Vacuumschmelze Gmbh & Co. Kg Weichmagnetischer Kern mit ortsabhängiger Permeabilität

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE728970C (de) * 1939-10-28 1942-12-07 Aeg Anordnung zum Betrieb von Entladungsstrecken mit Tauchzuendern
DE892489C (de) * 1942-03-31 1953-10-08 Philips Nv Vorrichtung zum Loeschen einer Entladungsroehre mit Quecksilberkathode
DE851389C (de) * 1943-01-26 1952-10-02 Philips Nv Vorrichtung und Verfahren zur Unterbrechung eines elektrischen Stromes

Also Published As

Publication number Publication date
GB807345A (en) 1959-01-14
BE557232A (de)
BE546604A (de)
DE1029213B (de) 1958-04-30
CH343554A (de) 1959-12-31
CH347282A (de) 1960-06-30

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