GB807345A - Control systems for evacuated glow discharge vessels - Google Patents

Control systems for evacuated glow discharge vessels

Info

Publication number
GB807345A
GB807345A GB972356A GB972356A GB807345A GB 807345 A GB807345 A GB 807345A GB 972356 A GB972356 A GB 972356A GB 972356 A GB972356 A GB 972356A GB 807345 A GB807345 A GB 807345A
Authority
GB
United Kingdom
Prior art keywords
resistor
discharge
arc
capacitor
triode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB972356A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dortmund Hoerder Huettenunion AG
Original Assignee
Dortmund Hoerder Huettenunion AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DED20199A external-priority patent/DE1024772B/en
Application filed by Dortmund Hoerder Huettenunion AG filed Critical Dortmund Hoerder Huettenunion AG
Publication of GB807345A publication Critical patent/GB807345A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J19/088—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Plasma & Fusion (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Particle Accelerators (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Discharge Heating (AREA)

Abstract

807,345. Supply systems for discharge vessels. DORTMUND - HORDER HUTTENUNION A.G. March 28, 1956 [April 2, 1955], No. 9723/56. Class 38 (4). In a supply system for a glow discharge vessel, alteration of the circuit conditions on an arc being struck are utilized to initiate a switching process to temporarily reduce the voltage across the vessel to extinguish the arc. In the system shown in Fig. 1, a vessel 10 having electrodes 11, 12 is fed from grid-controlled rectifier 26 through resistor 29. A series combination comprising capacitor 38, polarized relay 37 and resistor 39 is connected across the electrodes, together with resistor 36. Increased current through resistor 29 due to an arc discharge causes the p.d. across resistor 36 to fall, discharging capacitor 36 through relay 37 and reducing the voltage on rectifier grids 28, thus blocking the rectifier and extinguishing the arc. Operating and holding times of relay 37 are determined by the time constant of component 36-40. When discharge of capacitor 38 is completed, relay 37 releases, re-establishing normal circuit conditions. In an alternative circuit, Fig. 2, a D.C. source 43 is connected to vessel 10-13 through resistors 44, 45. A normally non-conducting triode 47 in series with a resistor 49 shunts the D.C. source and function 57 is connected to terminal 58 by capacitor 46. Increase of p.d. across resistor 45, due to arc discharge, fires the triode through amplifier 53, discharging capacitor 46 which has been previously charged over resistor 49, to cause a temporary extinction of the discharge. On the p.d. across resistor 45 dropping, triode 47 will be again rendered non-conductive and normal circuit conditions restored. A thyratron, an ignitron, an electromechanical switch or a Marx spark-gap switch may be used in place of triode 47.
GB972356A 1955-04-02 1956-03-28 Control systems for evacuated glow discharge vessels Expired GB807345A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DED20199A DE1024772B (en) 1955-04-02 1955-04-02 Method for operating high-current glow discharges in discharge vessels, in particular for treating bodies introduced into the discharge vessel
DED22888A DE1029213B (en) 1955-04-02 1956-05-04 Method and device for operating high-current glow discharges in discharge vessels, in particular for the treatment of bodies introduced into the discharge vessel

Publications (1)

Publication Number Publication Date
GB807345A true GB807345A (en) 1959-01-14

Family

ID=25970730

Family Applications (1)

Application Number Title Priority Date Filing Date
GB972356A Expired GB807345A (en) 1955-04-02 1956-03-28 Control systems for evacuated glow discharge vessels

Country Status (5)

Country Link
BE (2) BE546604A (en)
CH (2) CH343554A (en)
DE (1) DE1029213B (en)
GB (1) GB807345A (en)
LU (1) LU34266A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4200805A (en) * 1977-03-23 1980-04-29 Philippe Le Francois Multicathode thermochemical processing oven

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BG41744A1 (en) * 1984-11-26 1987-08-14 Savov Method for control of chimico= thermic processing of work- pieces with glowing dicharge in medium of processing gas and device for implementing this method
DE4242633C2 (en) * 1992-12-17 1996-11-14 Fraunhofer Ges Forschung Process for carrying out stable low-pressure glow processes
DE102006043898A1 (en) * 2006-09-19 2008-04-17 Siemens Ag Plasma system i.e. plasma coating device, for sputtering or coating of e.g. DVD, has control circuit shifting source into idle condition lasting for time period that is allowed after each interruption, and achieves current limiting value
DE102012206225A1 (en) * 2012-04-16 2013-10-17 Vacuumschmelze Gmbh & Co. Kg Soft magnetic core with location-dependent permeability

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE728970C (en) * 1939-10-28 1942-12-07 Aeg Arrangement for the operation of discharge lines with submersible transmitters
DE892489C (en) * 1942-03-31 1953-10-08 Philips Nv Device for extinguishing a discharge tube with a mercury cathode
DE851389C (en) * 1943-01-26 1952-10-02 Philips Nv Device and method for interrupting an electrical current

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4200805A (en) * 1977-03-23 1980-04-29 Philippe Le Francois Multicathode thermochemical processing oven

Also Published As

Publication number Publication date
LU34266A1 (en)
BE557232A (en)
BE546604A (en)
DE1029213B (en) 1958-04-30
CH343554A (en) 1959-12-31
CH347282A (en) 1960-06-30

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