CH343554A - Method and device for operating glow discharges - Google Patents

Method and device for operating glow discharges

Info

Publication number
CH343554A
CH343554A CH343554DA CH343554A CH 343554 A CH343554 A CH 343554A CH 343554D A CH343554D A CH 343554DA CH 343554 A CH343554 A CH 343554A
Authority
CH
Switzerland
Prior art keywords
glow discharges
operating glow
operating
discharges
glow
Prior art date
Application number
Other languages
German (de)
Inventor
Fritz Dr Phil Dr Ing Harders
Knueppel Helmut Ing Dr
Karl Dipl Phys Brotzmann
Original Assignee
Hoerder Huettenunion Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DED20199A external-priority patent/DE1024772B/en
Application filed by Hoerder Huettenunion Ag filed Critical Hoerder Huettenunion Ag
Publication of CH343554A publication Critical patent/CH343554A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J19/088—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Plasma & Fusion (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Particle Accelerators (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Discharge Heating (AREA)
CH343554D 1955-04-02 1956-03-27 Method and device for operating glow discharges CH343554A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DED20199A DE1024772B (en) 1955-04-02 1955-04-02 Method for operating high-current glow discharges in discharge vessels, in particular for treating bodies introduced into the discharge vessel
DED22888A DE1029213B (en) 1955-04-02 1956-05-04 Method and device for operating high-current glow discharges in discharge vessels, in particular for the treatment of bodies introduced into the discharge vessel

Publications (1)

Publication Number Publication Date
CH343554A true CH343554A (en) 1959-12-31

Family

ID=25970730

Family Applications (2)

Application Number Title Priority Date Filing Date
CH343554D CH343554A (en) 1955-04-02 1956-03-27 Method and device for operating glow discharges
CH347282D CH347282A (en) 1955-04-02 1957-05-02 Method and device for operating a glow discharge

Family Applications After (1)

Application Number Title Priority Date Filing Date
CH347282D CH347282A (en) 1955-04-02 1957-05-02 Method and device for operating a glow discharge

Country Status (5)

Country Link
BE (2) BE546604A (en)
CH (2) CH343554A (en)
DE (1) DE1029213B (en)
GB (1) GB807345A (en)
LU (1) LU34266A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2811942C2 (en) * 1977-03-23 1986-09-18 Vide et Traitement S.A., Neuilly-en-Thelle Furnace for the ionic nitriding treatment of metallic workpieces
BG41744A1 (en) * 1984-11-26 1987-08-14 Savov Method for control of chimico= thermic processing of work- pieces with glowing dicharge in medium of processing gas and device for implementing this method
DE4242633C2 (en) * 1992-12-17 1996-11-14 Fraunhofer Ges Forschung Process for carrying out stable low-pressure glow processes
DE102006043898A1 (en) * 2006-09-19 2008-04-17 Siemens Ag Plasma system i.e. plasma coating device, for sputtering or coating of e.g. DVD, has control circuit shifting source into idle condition lasting for time period that is allowed after each interruption, and achieves current limiting value
DE102012206225A1 (en) * 2012-04-16 2013-10-17 Vacuumschmelze Gmbh & Co. Kg Soft magnetic core with location-dependent permeability

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE728970C (en) * 1939-10-28 1942-12-07 Aeg Arrangement for the operation of discharge lines with submersible transmitters
DE892489C (en) * 1942-03-31 1953-10-08 Philips Nv Device for extinguishing a discharge tube with a mercury cathode
DE851389C (en) * 1943-01-26 1952-10-02 Philips Nv Device and method for interrupting an electrical current

Also Published As

Publication number Publication date
GB807345A (en) 1959-01-14
LU34266A1 (en)
BE557232A (en)
BE546604A (en)
DE1029213B (en) 1958-04-30
CH347282A (en) 1960-06-30

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