CH381351A - Method and device for generating a vacuum - Google Patents

Method and device for generating a vacuum

Info

Publication number
CH381351A
CH381351A CH1447260A CH1447260A CH381351A CH 381351 A CH381351 A CH 381351A CH 1447260 A CH1447260 A CH 1447260A CH 1447260 A CH1447260 A CH 1447260A CH 381351 A CH381351 A CH 381351A
Authority
CH
Switzerland
Prior art keywords
vacuum
generating
Prior art date
Application number
CH1447260A
Other languages
German (de)
Inventor
Albert Dr Lorenz
Original Assignee
Heraeus Gmbh W C
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Heraeus Gmbh W C filed Critical Heraeus Gmbh W C
Publication of CH381351A publication Critical patent/CH381351A/en

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04FPUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F9/00Diffusion pumps
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/38Exhausting, degassing, filling, or cleaning vessels

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
CH1447260A 1960-03-12 1960-12-27 Method and device for generating a vacuum CH381351A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEH38893A DE1096538B (en) 1960-03-12 1960-03-12 Process for vacuum generation

Publications (1)

Publication Number Publication Date
CH381351A true CH381351A (en) 1964-08-31

Family

ID=7153768

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1447260A CH381351A (en) 1960-03-12 1960-12-27 Method and device for generating a vacuum

Country Status (3)

Country Link
CH (1) CH381351A (en)
DE (1) DE1096538B (en)
GB (1) GB911432A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3307913A (en) * 1962-07-27 1967-03-07 Stone & Webster Eng Corp Vacuum producing apparatus for containment vessels
DE1255850B (en) * 1963-01-24 1967-12-07 Balzers Vakuum G M B H Cryopump arrangement for generating a high vacuum

Also Published As

Publication number Publication date
DE1096538B (en) 1961-01-05
GB911432A (en) 1962-11-28

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