LT96116A - Multiple layer piezoelectric deformable bimorphic mirror - Google Patents
Multiple layer piezoelectric deformable bimorphic mirror Download PDFInfo
- Publication number
- LT96116A LT96116A LT96-116A LT96116A LT96116A LT 96116 A LT96116 A LT 96116A LT 96116 A LT96116 A LT 96116A LT 96116 A LT96116 A LT 96116A
- Authority
- LT
- Lithuania
- Prior art keywords
- mirror
- bimorphic
- glass
- piezoceramic
- plates
- Prior art date
Links
- 239000011521 glass Substances 0.000 claims description 24
- 239000000565 sealant Substances 0.000 claims description 10
- 230000010287 polarization Effects 0.000 claims description 6
- 239000013598 vector Substances 0.000 claims description 6
- 239000007787 solid Substances 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 description 20
- 238000005452 bending Methods 0.000 description 18
- 230000035945 sensitivity Effects 0.000 description 15
- 239000010410 layer Substances 0.000 description 10
- 238000010276 construction Methods 0.000 description 6
- 238000006073 displacement reaction Methods 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 238000005498 polishing Methods 0.000 description 4
- 238000005304 joining Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000002356 single layer Substances 0.000 description 3
- 230000001360 synchronised effect Effects 0.000 description 3
- 230000003044 adaptive effect Effects 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 230000008092 positive effect Effects 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000002355 dual-layer Substances 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 238000007669 thermal treatment Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/10—Mirrors with curved faces
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/06—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Elements Other Than Lenses (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Nitrogen And Oxygen Or Sulfur-Condensed Heterocyclic Ring Systems (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| RU9696102312A RU2068191C1 (ru) | 1996-02-12 | 1996-02-12 | Многослойное пьезоэлектрическое деформируемое биморфное зеркало |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| LT96116A true LT96116A (en) | 1997-02-25 |
Family
ID=20176622
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| LT96-116A LT96116A (en) | 1996-02-12 | 1996-08-01 | Multiple layer piezoelectric deformable bimorphic mirror |
Country Status (14)
| Country | Link |
|---|---|
| EP (1) | EP0743541A4 (de) |
| JP (1) | JPH10511188A (de) |
| KR (1) | KR970706512A (de) |
| CN (1) | CN1145667A (de) |
| CA (1) | CA2185320A1 (de) |
| EE (1) | EE9600178A (de) |
| HU (1) | HUP9602396A2 (de) |
| LT (1) | LT96116A (de) |
| LV (1) | LV11713B (de) |
| MD (1) | MD960318A (de) |
| PL (1) | PL322716A1 (de) |
| RU (1) | RU2068191C1 (de) |
| SI (1) | SI9620001A (de) |
| WO (1) | WO1996018919A1 (de) |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3695494B2 (ja) | 1996-11-13 | 2005-09-14 | セイコーエプソン株式会社 | 光変調デバイス、その製造方法および表示装置 |
| US6375329B1 (en) | 1996-11-13 | 2002-04-23 | Seiko Epson Corporation | Projector and method of manufacturing a light modulation device |
| GB2321114B (en) * | 1997-01-10 | 2001-02-21 | Lasor Ltd | An optical modulator |
| US6874897B2 (en) * | 2000-01-27 | 2005-04-05 | Aoptix Technologies, Inc. | Deformable curvature mirror with unipolar-wiring |
| US20030006417A1 (en) * | 2001-07-03 | 2003-01-09 | Motorola, Inc. | Structure and method for fabricating semiconductor srtuctures and devices utilizing the formation of a compliant substrate for materials used to form the same and piezoelectric structures having controllable optical surfaces |
| WO2004057406A2 (en) | 2002-12-23 | 2004-07-08 | Bae Systems Plc | Deformable-mirror cooling |
| WO2004057398A1 (en) | 2002-12-23 | 2004-07-08 | Bae Systems Plc | Deformable-mirror holder |
| AU2003294125A1 (en) | 2002-12-23 | 2004-07-14 | Bae Systems Plc | Deformable mirror |
| FR2866122B1 (fr) * | 2004-02-06 | 2006-05-19 | Europ De Systemes Optiques Soc | Miroir bimorphe. |
| DE102007038872A1 (de) | 2007-08-16 | 2009-02-26 | Seereal Technologies S.A. | Abbildungsvorrichtung zum Beeinflussen von auftreffendem Licht |
| DE102008049647B4 (de) | 2008-09-30 | 2011-11-24 | Technische Universität Dresden | Mikromechanisches Element und Verfahren zum Betreiben eines mikromechanischen Elements |
| EP2258656A1 (de) * | 2009-05-29 | 2010-12-08 | BAE Systems PLC | Selbstverformbare Spiegel und deren Halterung |
| US20120075732A1 (en) * | 2009-05-29 | 2012-03-29 | Bae Systems Plc | Self-deformable mirrors and the support thereof |
| CN102147524A (zh) * | 2010-02-10 | 2011-08-10 | 中国科学院大连化学物理研究所 | 一种可变曲率反射镜装置 |
| DE102010028111B4 (de) | 2010-04-22 | 2016-01-21 | Technische Universität Dresden | Mikromechanisches Element |
| US20130302633A1 (en) * | 2012-04-17 | 2013-11-14 | California Institute Of Technology | Thin film bi-material lattice structures and methods of making the same |
| CN103383092B (zh) * | 2013-07-31 | 2017-04-12 | 广东金达照明科技股份有限公司 | 一种动态多彩灯具 |
| RU2636255C2 (ru) * | 2016-04-14 | 2017-11-21 | федеральное государственное бюджетное образовательное учреждение высшего образования "Пермский национальный исследовательский политехнический университет" | Пьезоактюатор изгибного типа |
| CN108627972A (zh) * | 2018-04-20 | 2018-10-09 | 中国人民解放军国防科技大学 | 悬臂式横向压电驱动变形镜及其装配方法 |
| RU2741035C1 (ru) * | 2020-07-21 | 2021-01-22 | Федеральное государственное бюджетное образовательное учреждение высшего образования "Тверской государственный технический университет" | Лазерная оптическая головка |
| CN113219649B (zh) * | 2021-04-30 | 2022-11-22 | 哈尔滨芯明天科技有限公司 | 一种航天应用的高可靠压电偏摆镜 |
| WO2024185886A1 (ja) * | 2023-03-09 | 2024-09-12 | 国立大学法人東海国立大学機構 | ミラー装置、光学装置およびレーザー核融合炉 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3904274A (en) * | 1973-08-27 | 1975-09-09 | Itek Corp | Monolithic piezoelectric wavefront phase modulator |
| US4257686A (en) * | 1978-12-14 | 1981-03-24 | Itek Corporation | Multiple layer piezoelectric wavefront modulator |
| FR2453423A1 (fr) * | 1979-04-04 | 1980-10-31 | Quantel Sa | Element optique epais a courbure variable |
| FR2530830B1 (de) * | 1982-07-22 | 1985-01-25 | Onera (Off Nat Aerospatiale) | |
| US4969726A (en) * | 1985-06-03 | 1990-11-13 | Northrop Corporation | Ring laser gyro path-length-control mechanism |
| US4915492A (en) * | 1989-02-06 | 1990-04-10 | Toth Theodor A | Mirror transducer assembly with selected thermal compensation |
-
1996
- 1996-02-12 RU RU9696102312A patent/RU2068191C1/ru active
- 1996-03-06 HU HU9602396A patent/HUP9602396A2/hu unknown
- 1996-03-06 SI SI9620001A patent/SI9620001A/sl unknown
- 1996-03-06 MD MD96-0318A patent/MD960318A/ro not_active Application Discontinuation
- 1996-03-06 PL PL96322716A patent/PL322716A1/xx unknown
- 1996-03-06 CN CN96190026A patent/CN1145667A/zh active Pending
- 1996-03-06 CA CA002185320A patent/CA2185320A1/en not_active Abandoned
- 1996-03-06 EE EE9600178A patent/EE9600178A/xx unknown
- 1996-03-06 WO PCT/RU1996/000053 patent/WO1996018919A1/ru not_active Application Discontinuation
- 1996-03-06 EP EP19960907806 patent/EP0743541A4/de not_active Withdrawn
- 1996-03-06 KR KR1019960705021A patent/KR970706512A/ko active IP Right Grant
- 1996-03-06 JP JP8518655A patent/JPH10511188A/ja active Pending
- 1996-07-26 LV LVP-96-316A patent/LV11713B/en unknown
- 1996-08-01 LT LT96-116A patent/LT96116A/lt unknown
Also Published As
| Publication number | Publication date |
|---|---|
| LV11713B (en) | 1997-08-20 |
| CA2185320A1 (en) | 1996-06-20 |
| EE9600178A (et) | 1997-08-15 |
| HU9602396D0 (en) | 1996-11-28 |
| JPH10511188A (ja) | 1998-10-27 |
| EP0743541A1 (de) | 1996-11-20 |
| EP0743541A4 (de) | 1997-03-12 |
| LV11713A (lv) | 1997-02-20 |
| HUP9602396A2 (en) | 1997-11-28 |
| WO1996018919A1 (en) | 1996-06-20 |
| KR970706512A (ko) | 1997-11-03 |
| MD960318A (ro) | 1997-07-31 |
| SI9620001A (en) | 1997-08-31 |
| CN1145667A (zh) | 1997-03-19 |
| RU2068191C1 (ru) | 1996-10-20 |
| PL322716A1 (en) | 1998-02-16 |
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