LT2891733T - Polikristalinio silikono vaflinės tekstūros suteikimo priedai ir jų panaudojimas - Google Patents
Polikristalinio silikono vaflinės tekstūros suteikimo priedai ir jų panaudojimasInfo
- Publication number
- LT2891733T LT2891733T LTEP13893094.6T LT13893094T LT2891733T LT 2891733 T LT2891733 T LT 2891733T LT 13893094 T LT13893094 T LT 13893094T LT 2891733 T LT2891733 T LT 2891733T
- Authority
- LT
- Lithuania
- Prior art keywords
- silicon wafer
- polycrystalline silicon
- texturizing additive
- texturizing
- additive
- Prior art date
Links
- 239000000654 additive Substances 0.000 title 1
- 230000000996 additive effect Effects 0.000 title 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
- H01L31/182—Special manufacturing methods for polycrystalline Si, e.g. Si ribbon, poly Si ingots, thin films of polycrystalline Si
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K13/00—Etching, surface-brightening or pickling compositions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0236—Special surface textures
- H01L31/02363—Special surface textures of the semiconductor body itself, e.g. textured active layers
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K13/00—Etching, surface-brightening or pickling compositions
- C09K13/04—Etching, surface-brightening or pickling compositions containing an inorganic acid
- C09K13/08—Etching, surface-brightening or pickling compositions containing an inorganic acid containing a fluorine compound
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30604—Chemical etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
- H01L31/068—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/546—Polycrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Electromagnetism (AREA)
- Manufacturing & Machinery (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Photovoltaic Devices (AREA)
- Silicon Compounds (AREA)
- Weting (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310394703.2A CN103409808B (zh) | 2013-09-04 | 2013-09-04 | 多晶硅片制绒添加剂及其使用方法 |
PCT/CN2013/089693 WO2015032154A1 (zh) | 2013-09-04 | 2013-12-17 | 多晶硅片制绒添加剂及其使用方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
LT2891733T true LT2891733T (lt) | 2016-10-10 |
Family
ID=49602845
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
LTEP13893094.6T LT2891733T (lt) | 2013-09-04 | 2013-12-17 | Polikristalinio silikono vaflinės tekstūros suteikimo priedai ir jų panaudojimas |
Country Status (11)
Country | Link |
---|---|
US (1) | US9935233B2 (lt) |
EP (1) | EP2891733B1 (lt) |
JP (1) | JP2016531835A (lt) |
KR (1) | KR101687767B1 (lt) |
CN (1) | CN103409808B (lt) |
ES (1) | ES2591133T3 (lt) |
LT (1) | LT2891733T (lt) |
MY (1) | MY170621A (lt) |
SG (1) | SG11201405972TA (lt) |
TW (1) | TWI526522B (lt) |
WO (1) | WO2015032154A1 (lt) |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103409808B (zh) * | 2013-09-04 | 2015-10-21 | 常州时创能源科技有限公司 | 多晶硅片制绒添加剂及其使用方法 |
CN103668467B (zh) * | 2013-12-20 | 2016-08-31 | 常州时创能源科技有限公司 | 一种多晶硅片制绒添加剂及其应用 |
CN103696021A (zh) * | 2013-12-23 | 2014-04-02 | 泰通(泰州)工业有限公司 | 一种和多晶制绒添加剂匹配的制绒后表面处理工艺 |
CN104241449A (zh) * | 2014-09-18 | 2014-12-24 | 百力达太阳能股份有限公司 | 一种多晶硅太阳能电池制造工艺 |
CN104294369A (zh) * | 2014-11-13 | 2015-01-21 | 苏州润阳光伏科技有限公司 | 一种用于多晶硅片酸制绒的添加剂及使用方法 |
CN104328504A (zh) * | 2014-11-13 | 2015-02-04 | 苏州润阳光伏科技有限公司 | 一种多晶制绒辅助剂及应用方法 |
CN104651949B (zh) * | 2015-02-11 | 2017-09-29 | 常州君合科技股份有限公司 | 一种多晶硅片制绒添加剂 |
CN105040108B (zh) * | 2015-08-21 | 2017-11-17 | 浙江启鑫新能源科技股份有限公司 | 多晶硅太阳能电池的制绒方法 |
CN105304734A (zh) * | 2015-11-03 | 2016-02-03 | 苏州旭环光伏科技有限公司 | 一种多晶硅片制绒辅助剂及其应用方法 |
CN108630786A (zh) * | 2016-06-27 | 2018-10-09 | 苏州阿特斯阳光电力科技有限公司 | 一种晶体硅太阳能电池绒面结构的制备方法 |
CN106119976B (zh) * | 2016-08-19 | 2018-08-14 | 常州时创能源科技有限公司 | 多晶黑硅制绒用扩孔酸液的添加剂及其应用 |
CN107177890A (zh) * | 2017-06-12 | 2017-09-19 | 通威太阳能(合肥)有限公司 | 一种金刚线切割多晶硅片的制绒方法以及电池片制备工艺 |
CN107245761B (zh) * | 2017-08-10 | 2020-01-14 | 常州时创能源科技有限公司 | 金刚线多晶硅片制绒辅助剂及其应用 |
CN109427930B (zh) * | 2017-09-04 | 2022-02-25 | 苏州易益新能源科技有限公司 | 一种在晶体硅片表面选择性制备绒面的方法 |
TWI636156B (zh) * | 2017-09-08 | 2018-09-21 | 常州時創能源科技有限公司 | 金剛線多晶矽片制絨輔助劑、制絨液及制絨方法 |
CN108004597A (zh) * | 2017-11-09 | 2018-05-08 | 润峰电力有限公司 | 一种多晶硅制绒添加剂及其制绒方法 |
CN108250363B (zh) * | 2018-01-19 | 2020-04-10 | 温岭汉德高分子科技有限公司 | 一种单晶硅制绒添加剂 |
CN109537058B (zh) * | 2018-09-30 | 2021-01-05 | 江苏顺风新能源科技有限公司 | 湿法黑硅制备工艺 |
CN109680337A (zh) * | 2018-12-25 | 2019-04-26 | 浙江晶科能源有限公司 | 一种金刚线切割多晶硅的制绒方法 |
CN110137079B (zh) * | 2019-05-22 | 2021-08-13 | 苏州晶瑞化学股份有限公司 | 金刚线切割多晶硅片制绒调控剂及含该调控剂的制绒剂 |
CN113817472B (zh) * | 2021-11-23 | 2022-02-11 | 绍兴拓邦电子科技有限公司 | 一种太阳能电池硅片的制绒工艺 |
CN114420774A (zh) * | 2021-11-29 | 2022-04-29 | 江苏科来材料科技有限公司 | 一种晶硅电池的制绒工艺 |
CN116004233A (zh) * | 2022-12-12 | 2023-04-25 | 嘉兴市小辰光伏科技有限公司 | 一种提升硅片绒面均整度的刻蚀添加剂及使用方法 |
CN116240022A (zh) * | 2022-12-13 | 2023-06-09 | 嘉兴市小辰光伏科技有限公司 | 一种改善单晶硅topcon电池硅片花篮印的碱抛添加剂及其应用方法 |
Family Cites Families (24)
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JPS51123739A (en) * | 1975-04-22 | 1976-10-28 | Mitsubishi Electric Corp | Silicon etching process |
US4171242A (en) * | 1976-12-17 | 1979-10-16 | International Business Machines Corporation | Neutral pH silicon etchant for etching silicon in the presence of phosphosilicate glass |
US20020147300A1 (en) * | 2000-12-18 | 2002-10-10 | Hiroshi Matsumoto | Dampening water composition for lithographic printing plate |
JP4159334B2 (ja) * | 2002-09-30 | 2008-10-01 | 新日本製鐵株式会社 | チタンおよびチタン合金建材用の変色除去洗浄剤、および変色除去洗浄方法 |
JP2006130905A (ja) * | 2004-10-08 | 2006-05-25 | Fuji Photo Film Co Ltd | 平版印刷方法 |
JP2011515872A (ja) * | 2008-03-25 | 2011-05-19 | アプライド マテリアルズ インコーポレイテッド | 結晶太陽電池の表面クリーニング及び凹凸形成プロセス |
CN101735891B (zh) * | 2009-12-24 | 2011-11-30 | 浙江向日葵光能科技股份有限公司 | 太阳能电池硅片清洗剂及其使用方法 |
EP2514799A1 (en) * | 2011-04-21 | 2012-10-24 | Rohm and Haas Electronic Materials LLC | Improved polycrystalline texturing composition and method |
CN102330091B (zh) * | 2011-07-27 | 2012-07-04 | 常州时创能源科技有限公司 | 一种多晶硅片酸性制绒液的添加剂及使用方法 |
CN102330154B (zh) * | 2011-07-27 | 2012-08-01 | 常州时创能源科技有限公司 | 一种用于多晶硅片制绒的酸性制绒液及其使用方法 |
CN102516878B (zh) * | 2011-12-12 | 2016-08-03 | 上海新安纳电子科技有限公司 | 一种改善相变材料抛光后表面质量的抛光液 |
US8986559B2 (en) * | 2012-02-29 | 2015-03-24 | Avantor Performance Materials, Inc. | Compositions and methods for texturing polycrystalline silicon wafers |
CN102586888A (zh) * | 2012-03-15 | 2012-07-18 | 苏州先拓光伏科技有限公司 | 一种无醇单晶硅制绒添加剂 |
CN102978710A (zh) * | 2012-08-13 | 2013-03-20 | 杭州道乐太阳能技术有限公司 | 一种硅太阳电池表面陷光结构及制备方式 |
CN102888656B (zh) * | 2012-09-28 | 2015-04-08 | 绍兴拓邦电子科技有限公司 | 一种高沸点单晶硅片表面制绒添加剂及其使用方法 |
CN102888657B (zh) * | 2012-10-22 | 2015-04-15 | 江苏荣马新能源有限公司 | 一种晶体硅太阳能电池片制绒剂用添加剂 |
CN102912450B (zh) * | 2012-10-22 | 2015-07-01 | 江苏荣马新能源有限公司 | 一种单晶硅制绒添加剂 |
CN102943307A (zh) * | 2012-11-27 | 2013-02-27 | 韩华新能源(启东)有限公司 | 单晶硅无醇制绒添加剂 |
CN103132079B (zh) * | 2013-02-07 | 2015-07-08 | 睿纳能源科技(上海)有限公司 | 一种用于金刚线切割多晶硅片酸制绒的添加剂及使用方法 |
CN103151423B (zh) * | 2013-02-28 | 2015-09-16 | 常州捷佳创精密机械有限公司 | 一种多晶硅片制绒清洗工艺方法 |
CN103266355B (zh) * | 2013-04-27 | 2016-03-23 | 宁波富星太阳能有限公司 | 一种多晶硅片的制绒方法 |
CN103205815A (zh) * | 2013-05-03 | 2013-07-17 | 上海交通大学 | 太阳能单晶硅片制绒液及其应用方法 |
CN103258918A (zh) * | 2013-05-31 | 2013-08-21 | 英利集团有限公司 | 硅片的制绒方法、太阳能电池片及其制作方法 |
CN103409808B (zh) * | 2013-09-04 | 2015-10-21 | 常州时创能源科技有限公司 | 多晶硅片制绒添加剂及其使用方法 |
-
2013
- 2013-09-04 CN CN201310394703.2A patent/CN103409808B/zh active Active
- 2013-12-17 ES ES13893094.6T patent/ES2591133T3/es active Active
- 2013-12-17 SG SG11201405972TA patent/SG11201405972TA/en unknown
- 2013-12-17 WO PCT/CN2013/089693 patent/WO2015032154A1/zh active Application Filing
- 2013-12-17 LT LTEP13893094.6T patent/LT2891733T/lt unknown
- 2013-12-17 KR KR1020147030500A patent/KR101687767B1/ko active IP Right Grant
- 2013-12-17 US US14/376,502 patent/US9935233B2/en not_active Expired - Fee Related
- 2013-12-17 JP JP2016539393A patent/JP2016531835A/ja active Pending
- 2013-12-17 MY MYPI2014702516A patent/MY170621A/en unknown
- 2013-12-17 EP EP13893094.6A patent/EP2891733B1/en not_active Not-in-force
- 2013-12-24 TW TW102148008A patent/TWI526522B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
TW201416418A (zh) | 2014-05-01 |
SG11201405972TA (en) | 2015-04-29 |
TWI526522B (zh) | 2016-03-21 |
EP2891733A4 (en) | 2015-09-09 |
JP2016531835A (ja) | 2016-10-13 |
KR101687767B1 (ko) | 2016-12-19 |
EP2891733B1 (en) | 2016-07-13 |
US9935233B2 (en) | 2018-04-03 |
US20160247957A1 (en) | 2016-08-25 |
CN103409808B (zh) | 2015-10-21 |
ES2591133T3 (es) | 2016-11-25 |
MY170621A (en) | 2019-08-21 |
WO2015032154A1 (zh) | 2015-03-12 |
CN103409808A (zh) | 2013-11-27 |
EP2891733A1 (en) | 2015-07-08 |
KR20150039128A (ko) | 2015-04-09 |
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