LT2022541A - Mikrostruktūrų formavimo polimerinėse medžiagose sistema su 2d pjezopavara - Google Patents

Mikrostruktūrų formavimo polimerinėse medžiagose sistema su 2d pjezopavara

Info

Publication number
LT2022541A
LT2022541A LT2022541A LT2022541A LT2022541A LT 2022541 A LT2022541 A LT 2022541A LT 2022541 A LT2022541 A LT 2022541A LT 2022541 A LT2022541 A LT 2022541A LT 2022541 A LT2022541 A LT 2022541A
Authority
LT
Lithuania
Prior art keywords
matrix
excitation
polymer material
microstructure
control generator
Prior art date
Application number
LT2022541A
Other languages
English (en)
Other versions
LT7075B (lt
Inventor
Giedrius JANUŠAS
Arvydas PALEVIČIUS
Vytautas OSTAŠEVIČIUS
Algimantas BUBULIS
Vytautas JŪRĖNAS
Justas Ciganas
Original Assignee
Kauno technologijos universitetas
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kauno technologijos universitetas filed Critical Kauno technologijos universitetas
Priority to LT2022541A priority Critical patent/LT7075B/lt
Priority to EP22212145.1A priority patent/EP4368565A1/en
Publication of LT2022541A publication Critical patent/LT2022541A/lt
Publication of LT7075B publication Critical patent/LT7075B/lt

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/002—Component parts, details or accessories; Auxiliary operations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C99/00—Subject matter not provided for in other groups of this subclass
    • B81C99/0005—Apparatus specially adapted for the manufacture or treatment of microstructural devices or systems, or methods for manufacturing the same
    • B81C99/0015—Apparatus specially adapted for the manufacture or treatment of microstructural devices or systems, or methods for manufacturing the same for microextrusion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0207—Driving circuits
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B3/00—Methods or apparatus specially adapted for transmitting mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • B29C59/022—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
    • B29C2059/023—Microembossing

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Micromachines (AREA)

Abstract

Sistema pagal išradimą apima vibratorių (1), su laisvame gale įtvirtinta matrica (2), sužadinimo valdymo generatorių (3), polimerinės medžiagos ruošinį (4) įtvirtintą padėkle (5), kuris sujungtas su precizine pozicionavimo pavara, kuri valdoma iš sužadinimo-valdymo generatoriaus (3). Matricoje (2) sužadinami aukšto dažnio mechaniniai virpesiai, spaudimo į polimerinės medžiagos ruošinį (4) pagal nustatytą technologinį režimą atlieka mikrostruktūros formavimą, atitinkantį matricoje (2) sudarytą formą. Norint keisti polimerinės medžiagos ruošinyje (4) mikrostruktūrą, yra atliekamas ruošinio (4) pozicionavimas pagal nustatytą programą iš sužadinimo-valdymo generatoriaus (3). Tokiu būdu, su ta pačia matrica (2) atliekant pozicionavimą plokštumoje pagal nustatytą programą, galima paruošti keliolika mikrostruktūrų variantų, t.y. MEMS elementų.
LT2022541A 2022-11-10 2022-11-10 Mikrostruktūrų formavimo polimerinėse medžiagose sistema su 2d pjezopavara LT7075B (lt)

Priority Applications (2)

Application Number Priority Date Filing Date Title
LT2022541A LT7075B (lt) 2022-11-10 2022-11-10 Mikrostruktūrų formavimo polimerinėse medžiagose sistema su 2d pjezopavara
EP22212145.1A EP4368565A1 (en) 2022-11-10 2022-12-08 System for formation of microstructures in polymeric materials with 2d piezoelectric drive

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
LT2022541A LT7075B (lt) 2022-11-10 2022-11-10 Mikrostruktūrų formavimo polimerinėse medžiagose sistema su 2d pjezopavara

Publications (2)

Publication Number Publication Date
LT2022541A true LT2022541A (lt) 2024-05-27
LT7075B LT7075B (lt) 2024-07-25

Family

ID=84799922

Family Applications (1)

Application Number Title Priority Date Filing Date
LT2022541A LT7075B (lt) 2022-11-10 2022-11-10 Mikrostruktūrų formavimo polimerinėse medžiagose sistema su 2d pjezopavara

Country Status (2)

Country Link
EP (1) EP4368565A1 (lt)
LT (1) LT7075B (lt)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2984441B2 (ja) * 1991-12-06 1999-11-29 光正 小柳 三次元ｌｓｉ積層装置
KR101345337B1 (ko) * 2011-06-13 2013-12-30 한국생명공학연구원 원자간력 현미경（ａｆｍ）을 이용한 딥-펜 나노리소그래피에서의 단일 또는 다중팁을 이용한 나노포지셔닝 기판 제조장치 및 제조방법
US10103008B2 (en) * 2016-01-12 2018-10-16 Fei Company Charged particle beam-induced etching

Also Published As

Publication number Publication date
EP4368565A8 (en) 2024-06-26
LT7075B (lt) 2024-07-25
EP4368565A1 (en) 2024-05-15

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Legal Events

Date Code Title Description
BB1A Patent application published

Effective date: 20240527

FG9A Patent granted

Effective date: 20240725