KR970052840U - 반도체장비의 케미칼 공급 시스템 - Google Patents

반도체장비의 케미칼 공급 시스템

Info

Publication number
KR970052840U
KR970052840U KR2019960003190U KR19960003190U KR970052840U KR 970052840 U KR970052840 U KR 970052840U KR 2019960003190 U KR2019960003190 U KR 2019960003190U KR 19960003190 U KR19960003190 U KR 19960003190U KR 970052840 U KR970052840 U KR 970052840U
Authority
KR
South Korea
Prior art keywords
supply system
semiconductor equipment
chemical supply
equipment chemical
semiconductor
Prior art date
Application number
KR2019960003190U
Other languages
English (en)
Other versions
KR200146296Y1 (ko
Inventor
이만영
Original Assignee
삼성전자주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 삼성전자주식회사 filed Critical 삼성전자주식회사
Priority to KR2019960003190U priority Critical patent/KR200146296Y1/ko
Publication of KR970052840U publication Critical patent/KR970052840U/ko
Application granted granted Critical
Publication of KR200146296Y1 publication Critical patent/KR200146296Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
KR2019960003190U 1996-02-27 1996-02-27 반도체장비의 케미칼 공급 시스템 KR200146296Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960003190U KR200146296Y1 (ko) 1996-02-27 1996-02-27 반도체장비의 케미칼 공급 시스템

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960003190U KR200146296Y1 (ko) 1996-02-27 1996-02-27 반도체장비의 케미칼 공급 시스템

Publications (2)

Publication Number Publication Date
KR970052840U true KR970052840U (ko) 1997-09-08
KR200146296Y1 KR200146296Y1 (ko) 1999-06-15

Family

ID=19451015

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960003190U KR200146296Y1 (ko) 1996-02-27 1996-02-27 반도체장비의 케미칼 공급 시스템

Country Status (1)

Country Link
KR (1) KR200146296Y1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100425962B1 (ko) * 2001-06-13 2004-04-03 강정호 웨이퍼 세정장비의 화학약품 유량제어 장치 및 방법

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100425962B1 (ko) * 2001-06-13 2004-04-03 강정호 웨이퍼 세정장비의 화학약품 유량제어 장치 및 방법

Also Published As

Publication number Publication date
KR200146296Y1 (ko) 1999-06-15

Similar Documents

Publication Publication Date Title
DE69637769D1 (de) Halbleitervorrichtung
DE69738008D1 (de) Halbleiterbauelement
DE69739242D1 (de) Halbleitervorrichtung
ID15985A (id) Senyawa kimia
DE69727373D1 (de) Halbleitervorrichtung
DE69637698D1 (de) Halbleitervorrichtung
DE69637809D1 (de) Halbleiteranordnung
DE69811246D1 (de) Elektrowärmegeräte
DE69728850D1 (de) Halbleiteranordnung
KR970052840U (ko) 반도체장비의 케미칼 공급 시스템
KR970062311U (ko) 약품 공급장치
FIU960155U0 (fi) Paperinkeräysväline
KR970052841U (ko) 반도체장비의 케미칼 공급 시스템
KR970052833U (ko) 반도체 제조 장치
KR970025778U (ko) 반도체 제조장치의 용액 공급장치
KR970046695U (ko) 반도체 제조 장비의 케미칼 공급 장치
KR970050339U (ko) 반도체 장치의 가스 공급 시스템
KR970052796U (ko) 반도체 포토레지스트 도포 시스템
KR970052819U (ko) 반도체 제조 장치
KR970052816U (ko) 반도체 제조 장치
KR980005370U (ko) 웨이퍼 건조장치
DE69713658D1 (de) Halbleiterbauelement
SE9601370L (sv) Kemisk förening
KR960003087U (ko) 웨이퍼 건조장치
KR970055700U (ko) 반도체 설비의 조명 장치

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20070125

Year of fee payment: 9

LAPS Lapse due to unpaid annual fee