KR970055700U - 반도체 설비의 조명 장치 - Google Patents

반도체 설비의 조명 장치

Info

Publication number
KR970055700U
KR970055700U KR2019960004567U KR19960004567U KR970055700U KR 970055700 U KR970055700 U KR 970055700U KR 2019960004567 U KR2019960004567 U KR 2019960004567U KR 19960004567 U KR19960004567 U KR 19960004567U KR 970055700 U KR970055700 U KR 970055700U
Authority
KR
South Korea
Prior art keywords
equipment
semiconductor
lighting
lighting equipment
semiconductor equipment
Prior art date
Application number
KR2019960004567U
Other languages
English (en)
Other versions
KR0132930Y1 (ko
Inventor
김성석
장일진
김태영
김동천
Original Assignee
삼성전자주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 삼성전자주식회사 filed Critical 삼성전자주식회사
Priority to KR2019960004567U priority Critical patent/KR0132930Y1/ko
Publication of KR970055700U publication Critical patent/KR970055700U/ko
Application granted granted Critical
Publication of KR0132930Y1 publication Critical patent/KR0132930Y1/ko

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
    • G03F7/70916—Pollution mitigation, i.e. mitigating effect of contamination or debris, e.g. foil traps
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • G03F7/70883—Environment aspects, e.g. pressure of beam-path gas, temperature of optical system
    • G03F7/70891—Temperature

Landscapes

  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Atmospheric Sciences (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Toxicology (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
KR2019960004567U 1996-03-12 1996-03-12 반도체 설비의 조명 장치 KR0132930Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960004567U KR0132930Y1 (ko) 1996-03-12 1996-03-12 반도체 설비의 조명 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960004567U KR0132930Y1 (ko) 1996-03-12 1996-03-12 반도체 설비의 조명 장치

Publications (2)

Publication Number Publication Date
KR970055700U true KR970055700U (ko) 1997-10-13
KR0132930Y1 KR0132930Y1 (ko) 1998-12-15

Family

ID=19451755

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960004567U KR0132930Y1 (ko) 1996-03-12 1996-03-12 반도체 설비의 조명 장치

Country Status (1)

Country Link
KR (1) KR0132930Y1 (ko)

Also Published As

Publication number Publication date
KR0132930Y1 (ko) 1998-12-15

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