KR970048967A - Photomask with Multiple Overlay Keys - Google Patents
Photomask with Multiple Overlay Keys Download PDFInfo
- Publication number
- KR970048967A KR970048967A KR1019950046356A KR19950046356A KR970048967A KR 970048967 A KR970048967 A KR 970048967A KR 1019950046356 A KR1019950046356 A KR 1019950046356A KR 19950046356 A KR19950046356 A KR 19950046356A KR 970048967 A KR970048967 A KR 970048967A
- Authority
- KR
- South Korea
- Prior art keywords
- photomask
- overlay
- keys
- overlay keys
- mask substrate
- Prior art date
Links
Abstract
복수의 오버레이 키(ovdrlay key)들을 갖는 포토마스크에 관하여 개시한다. 본 발명은 마스크 기판의 중앙에 제1오버레이 키가 형성된 중앙영역과 상기 중앙영역의 주변에 형성된 주변영역으로 구성되는 포토마스크에 있어서, 상기 주변영역에 복수의 제2오버레이 키가 형성되어 있는 것을 특징으로 하는 포토마스크를 제공한다. 상기 제2오버레이 키는 상기 마스크 기판의 엣지에 4개 형성되어 있다. 본 발명의 포토마스크는 주변영역의 엣지에 오버레이 키가 마련되어 장비가 장비간의 트러짐 정도를 직접 확인할 수 있다.A photomask having a plurality of overlay keys is disclosed. The present invention provides a photomask comprising a central area having a first overlay key formed in a center of a mask substrate and a peripheral area formed around the central area, wherein a plurality of second overlay keys are formed in the peripheral area. A photomask is provided. Four second overlay keys are formed on an edge of the mask substrate. In the photomask of the present invention, the overlay key is provided at the edge of the peripheral area so that the equipment can directly check the degree of breakdown between the equipment.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제2도는 본 발명에 의한 포토마스크의 평면도이다.2 is a plan view of a photomask according to the present invention.
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950046356A KR970048967A (en) | 1995-12-04 | 1995-12-04 | Photomask with Multiple Overlay Keys |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950046356A KR970048967A (en) | 1995-12-04 | 1995-12-04 | Photomask with Multiple Overlay Keys |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970048967A true KR970048967A (en) | 1997-07-29 |
Family
ID=66593488
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019950046356A KR970048967A (en) | 1995-12-04 | 1995-12-04 | Photomask with Multiple Overlay Keys |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970048967A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20010029893A (en) * | 1999-09-24 | 2001-04-16 | 다니구찌 이찌로오, 기타오카 다카시 | Photomask, semiconductor device, and method for exposing through photomask |
-
1995
- 1995-12-04 KR KR1019950046356A patent/KR970048967A/en not_active Application Discontinuation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20010029893A (en) * | 1999-09-24 | 2001-04-16 | 다니구찌 이찌로오, 기타오카 다카시 | Photomask, semiconductor device, and method for exposing through photomask |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
WITN | Withdrawal due to no request for examination |