KR970033202A - Vacuum chamber manufacturing method - Google Patents

Vacuum chamber manufacturing method Download PDF

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Publication number
KR970033202A
KR970033202A KR1019950069290A KR19950069290A KR970033202A KR 970033202 A KR970033202 A KR 970033202A KR 1019950069290 A KR1019950069290 A KR 1019950069290A KR 19950069290 A KR19950069290 A KR 19950069290A KR 970033202 A KR970033202 A KR 970033202A
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KR
South Korea
Prior art keywords
vacuum
chamber
hours
vacuum furnace
stainless steel
Prior art date
Application number
KR1019950069290A
Other languages
Korean (ko)
Other versions
KR0170162B1 (en
Inventor
정석민
조복래
Original Assignee
김만재
학교법인 포항공과대학교
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김만재, 학교법인 포항공과대학교 filed Critical 김만재
Priority to KR1019950069290A priority Critical patent/KR0170162B1/en
Publication of KR970033202A publication Critical patent/KR970033202A/en
Application granted granted Critical
Publication of KR0170162B1 publication Critical patent/KR0170162B1/en

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    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D6/00—Heat treatment of ferrous alloys
    • C21D6/002—Heat treatment of ferrous alloys containing Cr
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/74—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material
    • C21D1/773—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material under reduced pressure or vacuum
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D3/00—Diffusion processes for extraction of non-metals; Furnaces therefor
    • C21D3/02—Extraction of non-metals
    • C21D3/06—Extraction of hydrogen
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
    • C23C8/10—Oxidising

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Thermal Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Vapour Deposition (AREA)
  • Furnace Details (AREA)
  • Heat Treatment Of Articles (AREA)

Abstract

본 발명은 진공챔버 제작방법을 개시한다. 본 발명은, 진공로에서 스테인레스 강재의 챔버를 450℃ 에서 48~60시간 가열하여 스테인레스 강 내부의 수소를 제거함과 동시에 크롬을 표면으로 석출시키는 단계와, 진공로의 온도를 200℃로 낮추어 유지시킨 후 건조질소를 주입하여 진공로를 10~20분에 걸쳐 서서히 벤팅시키는 단계와, 상기 벤팅상태를 24~48시간 유지시켜 챔버의 표면에 크롬산화막을 형성하는 단계를 포함하는 것을 특징으로 한다. 따라서 표면에 형성된 치밀한 크롬 산화막에 의해 수소의 확산 및 투과가 현저히 억제되기 때문에 진공도가 10-11Torr대 이하의 극고진공 영역으로 어렵지 않게 내려가게 되는 효과를 제공한다.The present invention discloses a vacuum chamber manufacturing method. The present invention is to heat the chamber of the stainless steel in the vacuum furnace at 450 ℃ 48 ~ 60 hours to remove the hydrogen in the stainless steel and at the same time to precipitate chromium on the surface, and to keep the temperature of the vacuum furnace to 200 ℃ And then slowly venting the vacuum furnace over 10 to 20 minutes by injecting dry nitrogen, and maintaining the venting state for 24 to 48 hours to form a chromium oxide film on the surface of the chamber. Therefore, since the diffusion and permeation of hydrogen are significantly suppressed by the dense chromium oxide film formed on the surface, it provides an effect that the vacuum degree is not easily lowered to an extremely high vacuum region of 10 -11 Torr band or less.

Description

진공챔버 제작방법Vacuum chamber manufacturing method

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제1도는 본 발명에 따른 진공챔버 제작방법을 설명하기 위한 참고도.1 is a reference diagram for explaining a vacuum chamber manufacturing method according to the present invention.

제2도는 벤팅장치를 도시한 개략도.2 is a schematic view showing a venting device.

Claims (1)

진공로에서 스테인레스 강재의 챔버를 450℃ 에서 48~60시간 가열하여 스테인레스 강 내부의 수소를 제거함과 동시에 크롬을 표면으로 석출시키는 단계와, 진공로의 온도를 200℃로 낮추어 유지시킨 후 건조질소를 주입하여 진공로를 10~20분에 걸쳐 서서히 벤팅시키는 단계와, 상기 벤팅상태를 24~48시간 유지시켜 챔버의 표면에 크롬산화막을 형성하는 단계를 포함하는 것을 특징으로 하는 진공챔버 제작방법.In the vacuum furnace, the stainless steel chamber was heated at 450 ° C. for 48 to 60 hours to remove hydrogen in the stainless steel and to precipitate chromium on the surface. And slowly venting the vacuum furnace over 10 to 20 minutes by injection, and maintaining the venting state for 24 to 48 hours to form a chromium oxide film on the surface of the chamber. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019950069290A 1995-12-30 1995-12-30 Method for making a vacuum chamber KR0170162B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019950069290A KR0170162B1 (en) 1995-12-30 1995-12-30 Method for making a vacuum chamber

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950069290A KR0170162B1 (en) 1995-12-30 1995-12-30 Method for making a vacuum chamber

Publications (2)

Publication Number Publication Date
KR970033202A true KR970033202A (en) 1997-07-22
KR0170162B1 KR0170162B1 (en) 1999-02-18

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950069290A KR0170162B1 (en) 1995-12-30 1995-12-30 Method for making a vacuum chamber

Country Status (1)

Country Link
KR (1) KR0170162B1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100583283B1 (en) * 2005-07-13 2006-05-26 주식회사 브이엠티 Method for manufacturing extremely high vacuum ion pump

Also Published As

Publication number Publication date
KR0170162B1 (en) 1999-02-18

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