KR970017812A - Sealing method inside the vacuum chamber of the field emission display - Google Patents

Sealing method inside the vacuum chamber of the field emission display Download PDF

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Publication number
KR970017812A
KR970017812A KR1019950032024A KR19950032024A KR970017812A KR 970017812 A KR970017812 A KR 970017812A KR 1019950032024 A KR1019950032024 A KR 1019950032024A KR 19950032024 A KR19950032024 A KR 19950032024A KR 970017812 A KR970017812 A KR 970017812A
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KR
South Korea
Prior art keywords
getter material
field emission
emission display
vacuum chamber
sealing method
Prior art date
Application number
KR1019950032024A
Other languages
Korean (ko)
Other versions
KR100275263B1 (en
Inventor
오재열
문제도
조영래
정효수
Original Assignee
이우복
사단법인 고등기술연구원 연구조합
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 이우복, 사단법인 고등기술연구원 연구조합 filed Critical 이우복
Priority to KR1019950032024A priority Critical patent/KR100275263B1/en
Publication of KR970017812A publication Critical patent/KR970017812A/en
Application granted granted Critical
Publication of KR100275263B1 publication Critical patent/KR100275263B1/en

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24Manufacture or joining of vessels, leading-in conductors or bases
    • H01J9/26Sealing together parts of vessels
    • H01J9/261Sealing together parts of vessels the vessel being for a flat panel display
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2329/00Electron emission display panels, e.g. field emission display panels
    • H01J2329/94Means for exhausting the vessel or maintaining vacuum within the vessel
    • H01J2329/943Means for maintaining vacuum within the vessel
    • H01J2329/945Means for maintaining vacuum within the vessel by gettering
    • H01J2329/948Means for maintaining vacuum within the vessel by gettering characterised by the material of the getter

Abstract

필드 에미션 디스플레이의 실링을 실시하여 내부가 초고진공 상태인 필드 에미션 디스플레이를 제조하기 위하여 진공챔버내에서 모든 작업을 실시하고 상하부 기판의 테두리를 게터물질과 시런트로 기본 소성을 실시한 후, 램프, 열선 또는 자외선 레이져를 이용하여 최종소성을 실시함으로써, 초고진공 상태의 내부를 갖는 필드 에미션 디스플레이를 제조할 수 있다.In order to manufacture the field emission display by manufacturing the field emission display and to manufacture the field emission display having the ultra-high vacuum inside, all the work is performed in the vacuum chamber, and the edge of the upper and lower substrates is subjected to basic firing with the getter material and the sealant. By performing the final firing using a hot wire or an ultraviolet laser, a field emission display having an inside of an ultra-high vacuum state can be manufactured.

Description

필드 에미션 디스플레이의 진공챔버 내부에서의 실링 방법Sealing method inside the vacuum chamber of the field emission display

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제3도는 본 발명에 따라 상하부기판을 스페이서와 접합시키고, 각 기판에 형성되어 있는 게터물질과 실런트를 이용하여 진공챔버 내에서 실링을 실시할 부분을 나타낸 부분단면도.Figure 3 is a partial cross-sectional view showing a portion of the upper and lower substrates bonded to the spacer in accordance with the present invention, the sealing portion in the vacuum chamber using the getter material and sealant formed on each substrate.

Claims (4)

진공챔버 내부에서 필드 에미터를 제조하여 유리기판에 접합하고, 상기 유리기판 가장자리에 게터물질을 손가락 구조로 형성하는 단계와, 상부기판에 투명전극과 화소단위로 형광체를 순차적으로 형성한 후, 상기 상부기판 가장자리에 하부기판의 게터물질과 맞물리도록 게터물질을 손가락 구조로 형성하는 단계와, 상기 상하부기판 사이에 망사형의 스페이서를 설치하는 단계와, 상기 상하부기판의 게터물질이 맞물리도록 접합하고 상하부기판의 게터물질 외곽의 가장자리에 형성되어 있는 실런트로 기본소성하는 단계와, 상기 기본소성된 필드 에미션 디스플레이를 열선, 램프 또는 자외선 레이져를 이용하여 최종소성하는 단계를 포함하는 것을 특징으로 하는 필드 에미션 디스플레이의 진공챔버 내부에서의 실링 방법.A field emitter is manufactured in a vacuum chamber, bonded to a glass substrate, and a getter material is formed in a finger structure at the edge of the glass substrate, and a phosphor is sequentially formed on the upper substrate by a transparent electrode and a pixel unit. Forming a getter material in a finger structure so as to engage with the getter material of the lower substrate at the edge of the upper substrate; Basic firing with a sealant formed at an edge of a getter material outer surface of the substrate, and final firing of the basic fired field emission display using a hot wire, a lamp, or an ultraviolet laser. Sealing method inside the vacuum chamber of the display. 제1항에 있어서, 상기 스페이서와 게터물질은 최후 소성후 발생되는 가스를 제거하기 위하여 상하부기판에 완전히 부착되지 않게 형성하는 것을 특징으로 하는 필드 에미션 디스플레이의 진공챔버 내부에서의 실링 방법.The sealing method of claim 1, wherein the spacer and the getter material are not completely attached to the upper and lower substrates in order to remove the gas generated after the last firing. 제1항에 있어서, 상기 최종소성은 열선, 램프 또는 자외선 레이져를 이용하는 것을 특징으로 하는 필드 에미션 디스플레이의 진공챔버 내부에서의 실링 방법.The sealing method in a vacuum chamber of a field emission display according to claim 1, wherein the final firing uses a hot wire, a lamp or an ultraviolet laser. 제1항에 있어서, 상기 게터물질은 티타늄 또는 바륨 등으로 형성하는 것을 특징으로 하는 필드 에미션 디스플레이의 진공챔버 내부에서의 실링 방법.The method of claim 1, wherein the getter material is formed of titanium, barium, or the like. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019950032024A 1995-09-27 1995-09-27 Sealing method of field emission display in vacuum chamber KR100275263B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019950032024A KR100275263B1 (en) 1995-09-27 1995-09-27 Sealing method of field emission display in vacuum chamber

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950032024A KR100275263B1 (en) 1995-09-27 1995-09-27 Sealing method of field emission display in vacuum chamber

Publications (2)

Publication Number Publication Date
KR970017812A true KR970017812A (en) 1997-04-30
KR100275263B1 KR100275263B1 (en) 2000-12-15

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Application Number Title Priority Date Filing Date
KR1019950032024A KR100275263B1 (en) 1995-09-27 1995-09-27 Sealing method of field emission display in vacuum chamber

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KR (1) KR100275263B1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8269413B2 (en) 2007-07-04 2012-09-18 Samsung Mobile Display Co., Ltd. Organic light emitting display device with spacer on non-light emission region and manufacturing method of the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8269413B2 (en) 2007-07-04 2012-09-18 Samsung Mobile Display Co., Ltd. Organic light emitting display device with spacer on non-light emission region and manufacturing method of the same

Also Published As

Publication number Publication date
KR100275263B1 (en) 2000-12-15

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