KR960025979A - Vacuum sealing method of flat panel display device - Google Patents

Vacuum sealing method of flat panel display device Download PDF

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Publication number
KR960025979A
KR960025979A KR1019940039805A KR19940039805A KR960025979A KR 960025979 A KR960025979 A KR 960025979A KR 1019940039805 A KR1019940039805 A KR 1019940039805A KR 19940039805 A KR19940039805 A KR 19940039805A KR 960025979 A KR960025979 A KR 960025979A
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KR
South Korea
Prior art keywords
glass
cathode
vacuum sealing
anode
sealing method
Prior art date
Application number
KR1019940039805A
Other languages
Korean (ko)
Inventor
조영래
오재열
정효수
Original Assignee
김준성
사단법인 고등기술연구원 연구조합
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 김준성, 사단법인 고등기술연구원 연구조합 filed Critical 김준성
Priority to KR1019940039805A priority Critical patent/KR960025979A/en
Publication of KR960025979A publication Critical patent/KR960025979A/en

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  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
  • Vessels, Lead-In Wires, Accessory Apparatuses For Cathode-Ray Tubes (AREA)

Abstract

고진공에서 작동되는 평판표시 소자를 제조하기 위하여 실리콘 웨이퍼상에 캐소우드를 제조하고, 상기 실리콘 웨이퍼를 캐소우드 유리 기판에 접합시킨 후, 캐소우드 유리와 애노우드 유리 사이를 프릿유리로 진공실링하는 평판표시 소자의 진공실링 방법.In order to manufacture a flat panel display device operating in a high vacuum, a cathode is manufactured on a silicon wafer, the silicon wafer is bonded to a cathode glass substrate, and a flat plate is vacuum sealed between the cathode glass and the anodized glass with frit glass. Vacuum sealing method of display element.

Description

평판표시 소자의 진공실링 방법Vacuum sealing method of flat panel display device

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제1도는 본 발명의 진공실링 방법에 따라 제조된 전계방출 소자의 정단면도.1 is a front sectional view of a field emission device manufactured according to the vacuum sealing method of the present invention.

Claims (3)

실리콘 웨이퍼 상에 전자방출용 팁, 절연체 및 절연체 상부의 게이터 전극을 형성하는 단계와, 상기 실리콘 웨이퍼를 캐소우드 유리에 접합시키는 단계와, 애노우드 유리상에 애노드 전극과 형광체를 순차적으로 형성하는 단계와, 상기 캐소우드 유리와 애노우드 유리 사이에 공간을 유지하기 위해 지지대를 형성하고, 상기 캐소우드 유리와 애노우드 유리를 프릿유리로 진공실링하여 접합하는 단계를 포함하는 평판 표시 소자의 진공실링방법.Forming a gating electrode on the silicon wafer for the electron emitting tip, the insulator and the upper part of the insulator, bonding the silicon wafer to the cathode glass, and sequentially forming the anode electrode and the phosphor on the anode glass; And forming a support in order to maintain a space between the cathode glass and the anode glass, and vacuum sealing the cathode glass and the anode glass with frit glass to bond them. 제1항에 있어서, 상기 캐소우드 유리의 재질이 소다 유리이면 애노우드 유리와 접합할 캐소우드 유리의 소정부분의 표면을 표면처리하는 단계를 더 포함하는 것을 특징으로 하는 평판 표시 소자의 진공실링 방법.The vacuum sealing method of claim 1, further comprising surface treating a surface of a portion of the cathode glass to be bonded with the anode glass if the cathode glass is made of soda glass. . 제1항에 있어서, 상기 캐소우드 유리의 재질이 실리콘 웨이퍼의 정전 접합이 가능한 유리이면, 프릿유리에 의해 상기 애노우드 유리와 접합될 상기 캐소우드 유리의 소정부분을 표면처리하는 단계를 더 포함하는 것을 특징으로 하는 평판표시 소자의 진공실링 방법.The method of claim 1, further comprising: surface treating a portion of the cathode glass to be bonded to the anode glass by frit glass if the material of the cathode glass is a glass capable of electrostatic bonding of a silicon wafer. A vacuum sealing method for a flat panel display element, characterized in that. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019940039805A 1994-12-30 1994-12-30 Vacuum sealing method of flat panel display device KR960025979A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019940039805A KR960025979A (en) 1994-12-30 1994-12-30 Vacuum sealing method of flat panel display device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019940039805A KR960025979A (en) 1994-12-30 1994-12-30 Vacuum sealing method of flat panel display device

Publications (1)

Publication Number Publication Date
KR960025979A true KR960025979A (en) 1996-07-20

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ID=66647618

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019940039805A KR960025979A (en) 1994-12-30 1994-12-30 Vacuum sealing method of flat panel display device

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Country Link
KR (1) KR960025979A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100307812B1 (en) * 1998-11-26 2001-12-17 김덕중 Flat display device with high aspect ratio spacer and its manufacturing method
KR100701019B1 (en) * 2005-05-31 2007-03-27 에스케이 텔레콤주식회사 System and method for providing multi image service using camera phone

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100307812B1 (en) * 1998-11-26 2001-12-17 김덕중 Flat display device with high aspect ratio spacer and its manufacturing method
KR100701019B1 (en) * 2005-05-31 2007-03-27 에스케이 텔레콤주식회사 System and method for providing multi image service using camera phone

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