KR960025983A - Vacuum sealing method of field emission device - Google Patents

Vacuum sealing method of field emission device Download PDF

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Publication number
KR960025983A
KR960025983A KR1019940039803A KR19940039803A KR960025983A KR 960025983 A KR960025983 A KR 960025983A KR 1019940039803 A KR1019940039803 A KR 1019940039803A KR 19940039803 A KR19940039803 A KR 19940039803A KR 960025983 A KR960025983 A KR 960025983A
Authority
KR
South Korea
Prior art keywords
substrate
forming
field emission
depositing
emission device
Prior art date
Application number
KR1019940039803A
Other languages
Korean (ko)
Other versions
KR0163985B1 (en
Inventor
오재열
조영래
정효수
Original Assignee
김준성
사단법인 고등기술연구원 연구조합
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 김준성, 사단법인 고등기술연구원 연구조합 filed Critical 김준성
Priority to KR1019940039803A priority Critical patent/KR0163985B1/en
Publication of KR960025983A publication Critical patent/KR960025983A/en
Application granted granted Critical
Publication of KR0163985B1 publication Critical patent/KR0163985B1/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
    • H01J9/26—Sealing together parts of vessels
    • H01J9/261—Sealing together parts of vessels the vessel being for a flat panel display
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2209/00—Apparatus and processes for manufacture of discharge tubes
    • H01J2209/01—Generalised techniques
    • H01J2209/012—Coating

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)

Abstract

형광체와 투명전극으로 형성된 상부기판과 게이트 이미터, 게이트 전극이 형성된 하부기판 사이에 간극을 형성하여 그 가장자리를 게터물질을 이용하여 진공 봉입 할때 챔버내에서 레이저를 이용하여 접합하는 전계방출 소자의 진공 실링방법.A gap between the upper substrate formed of the phosphor and the transparent electrode, the gate emitter, and the lower substrate formed with the gate electrode is formed, and when the edge is vacuum encapsulated using the getter material, the field emission device is bonded using a laser in the chamber. Vacuum sealing method.

Description

전계 방출 소자의 진공실링 방법Vacuum sealing method of field emission device

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제1도는 본 발명의 방법에 따라 진공실링이 완성된 전계 방출소자의 정단면도, 제2도는 본 발명의 방법에 따라 제조되는 전계 방출 소자의 상부 기판의 정면도, 제3도는 본 발명의 방법에 따라 제조되는 전계방출 소자의 하부 기판의 평면도.1 is a front sectional view of a field emission device in which vacuum sealing is completed according to the method of the present invention, and FIG. 2 is a front view of an upper substrate of a field emission device manufactured according to the method of the present invention, and FIG. 3 is a method of the present invention. Top view of the lower substrate of the field emission device manufactured according to.

Claims (2)

제1기판 상부에 양극전극을 증착하고, 상기 양극전극 상부에 저전압용 형광 물질인 형광체를 형성하여 상부기판을 형성하는 단계와, 제2기판 상부에 이미터 전극을 증착하고, 그 상부에, 이미터 및 하부 절연막을 가진게이트를 형성하여 하부기판을 형성하는 단계와, 상기 상부 기판과 하부기판 사이에 격막을 형성하고, 상기 상부기판 및 하부기판 가장자리는 흡착 물질을 증착하여 초고진공 챔버에서 레이저로 소성하는 단계를 포함하는 전계 방출 소자의 진공 실링 방법.Depositing an anode electrode on the first substrate, forming a phosphor as a low-voltage fluorescent substance on the anode, and forming an upper substrate; depositing an emitter electrode on the second substrate; Forming a lower substrate by forming a gate having a lower insulating layer and a lower insulating layer, and forming a diaphragm between the upper substrate and the lower substrate, wherein the upper substrate and the lower substrate edges are formed by depositing an adsorbent material to the laser in the ultra-high vacuum chamber. Vacuum sealing method of a field emission device comprising the step of firing. 제1항에 있어서, 상기 흡착 물질을 증착하는 공정을 게터물질 주입 또는 스크린 프린팅 공정을 포함하는 것을 특징으로 하는 전계방출 소자의 진공실링방법.The method of claim 1, wherein the depositing of the adsorbent material comprises a getter material injection or screen printing process. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019940039803A 1994-12-30 1994-12-30 Vacuum sealing method of field emission display KR0163985B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019940039803A KR0163985B1 (en) 1994-12-30 1994-12-30 Vacuum sealing method of field emission display

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019940039803A KR0163985B1 (en) 1994-12-30 1994-12-30 Vacuum sealing method of field emission display

Publications (2)

Publication Number Publication Date
KR960025983A true KR960025983A (en) 1996-07-20
KR0163985B1 KR0163985B1 (en) 1998-12-01

Family

ID=19405824

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019940039803A KR0163985B1 (en) 1994-12-30 1994-12-30 Vacuum sealing method of field emission display

Country Status (1)

Country Link
KR (1) KR0163985B1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100283685B1 (en) * 1997-08-29 2001-04-02 김영남 High vacuum sealing method for field emission display device panel

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100283685B1 (en) * 1997-08-29 2001-04-02 김영남 High vacuum sealing method for field emission display device panel

Also Published As

Publication number Publication date
KR0163985B1 (en) 1998-12-01

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