KR970015788A - Metal layer formation method - Google Patents
Metal layer formation method Download PDFInfo
- Publication number
- KR970015788A KR970015788A KR1019950033528A KR19950033528A KR970015788A KR 970015788 A KR970015788 A KR 970015788A KR 1019950033528 A KR1019950033528 A KR 1019950033528A KR 19950033528 A KR19950033528 A KR 19950033528A KR 970015788 A KR970015788 A KR 970015788A
- Authority
- KR
- South Korea
- Prior art keywords
- layer
- seed layer
- seed
- metal
- forming
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
- C23C28/322—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer only coatings of metal elements only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
- C23C28/345—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Electroplating Methods And Accessories (AREA)
Abstract
본 발명은 전기 도금 공정에 의하여 시드층상에 형성된 메탈층을 손상시킴이 없이 형성시키기 위한 방법에 관한 것으로 기판상의 제 1절연층상에 소정 두께의 시드층을 형성시키는 제 1단계와, 상기 시드층상에 감광층을 형성시키고 패터닝시키는 제 2단계와, 상기 감광층의 패턴을 통하여 노출된 상기 시드층상에 전기 도금 공정에 의하여 메탈층을 형성시키는 제 3단계와, 상기 메탈층상에 제 2절연층을 형성시키는 제 4단계와, 상기 감광층을 제거하여 상기 시드층의 일부를 노출시키는 제 5단계와, 상기 노출된 시드층의 일부를 제거하는 제 6단계와, 그리고 상기 메탈층상에 형성된 상기 제 2절연층을 제거하는 제 7단계로 이루어지며 이에 의해서 상기 메탈층의 패턴 치수 및 형상을 원하는 형태로 유지시킬 수 있다.The present invention relates to a method for forming a metal layer formed on a seed layer without damage by an electroplating process, the method comprising: forming a seed layer having a predetermined thickness on a first insulating layer on a substrate; A second step of forming and patterning a photosensitive layer, a third step of forming a metal layer by an electroplating process on the seed layer exposed through the pattern of the photosensitive layer, and a second insulating layer formed on the metal layer A fourth step of exposing the portion of the seed layer by removing the photosensitive layer, a sixth step of removing a portion of the exposed seed layer, and the second insulation formed on the metal layer The seventh step of removing the layer, thereby maintaining the pattern dimensions and shape of the metal layer in a desired form.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제 2도 (가) 내지 (마)는 본 발명에 따른 메탈층 형성 방법을 순차적으로 도시한 공정도,2 (a) to (e) is a process diagram sequentially showing a metal layer forming method according to the present invention,
제 3도는 본 발명의 다른 실시예에 따른 메탈층 형성 방법을 도시한 단면도.3 is a cross-sectional view showing a metal layer forming method according to another embodiment of the present invention.
Claims (13)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950033528A KR0171137B1 (en) | 1995-09-30 | 1995-09-30 | Method for fabricating a metallic layer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950033528A KR0171137B1 (en) | 1995-09-30 | 1995-09-30 | Method for fabricating a metallic layer |
Publications (2)
Publication Number | Publication Date |
---|---|
KR970015788A true KR970015788A (en) | 1997-04-28 |
KR0171137B1 KR0171137B1 (en) | 1999-02-18 |
Family
ID=19428929
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019950033528A KR0171137B1 (en) | 1995-09-30 | 1995-09-30 | Method for fabricating a metallic layer |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR0171137B1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101220416B1 (en) * | 2010-08-26 | 2013-01-10 | 전남대학교산학협력단 | Method for manufacturing super water-repellent polymer film |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6361675B1 (en) * | 1999-12-01 | 2002-03-26 | Motorola, Inc. | Method of manufacturing a semiconductor component and plating tool therefor |
KR102347793B1 (en) * | 2015-01-12 | 2022-01-06 | 주식회사 아모센스 | Method for manufacturing Touch Screen Pannel and Touch Screen Pannel manufactured by the method |
-
1995
- 1995-09-30 KR KR1019950033528A patent/KR0171137B1/en not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101220416B1 (en) * | 2010-08-26 | 2013-01-10 | 전남대학교산학협력단 | Method for manufacturing super water-repellent polymer film |
Also Published As
Publication number | Publication date |
---|---|
KR0171137B1 (en) | 1999-02-18 |
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