KR970010478B1 - Manufacturing method of optical path regulating apparatus - Google Patents
Manufacturing method of optical path regulating apparatus Download PDFInfo
- Publication number
- KR970010478B1 KR970010478B1 KR94009506A KR19940009506A KR970010478B1 KR 970010478 B1 KR970010478 B1 KR 970010478B1 KR 94009506 A KR94009506 A KR 94009506A KR 19940009506 A KR19940009506 A KR 19940009506A KR 970010478 B1 KR970010478 B1 KR 970010478B1
- Authority
- KR
- South Korea
- Prior art keywords
- generating
- sacrific
- film
- connection terminal
- manufacturing
- Prior art date
Links
Abstract
A manufacturing method for the light pass adjustment device in order to prevent the actuator damage and the thin films from etching and laminating for removing the sacrific film. The said method comprising the steps of: generating the sacrific film that is not connected with the matrix type connection terminal in the operating board, generating the supporter that enclose with the connection terminal in the non-generating portion of the sacrific film, generating the membrain in the upper of the sacrific film and the supporter, generating the groove to protrude the connection terminal, generating the plug connected with the connection terminal, generating the contact between the membrain and the signal electrode, generating the transformation part and the bias in order, dividing the actuator, generating the protection layer, and removing the protection layer after removing the sacrific film using the etching mask.
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR94009506A KR970010478B1 (en) | 1994-04-30 | 1994-04-30 | Manufacturing method of optical path regulating apparatus |
US08/430,628 US5636070A (en) | 1994-04-30 | 1995-04-28 | Thin film actuated mirror array |
CN95104755A CN1064135C (en) | 1994-04-30 | 1995-04-28 | Thin film actuated mirror array |
JP7131127A JPH07301753A (en) | 1994-04-30 | 1995-05-01 | Manufacture of m x n pieces of actuated mirror array |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR94009506A KR970010478B1 (en) | 1994-04-30 | 1994-04-30 | Manufacturing method of optical path regulating apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970010478B1 true KR970010478B1 (en) | 1997-06-26 |
Family
ID=19382261
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR94009506A KR970010478B1 (en) | 1994-04-30 | 1994-04-30 | Manufacturing method of optical path regulating apparatus |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970010478B1 (en) |
-
1994
- 1994-04-30 KR KR94009506A patent/KR970010478B1/en not_active IP Right Cessation
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