KR970010478B1 - Manufacturing method of optical path regulating apparatus - Google Patents

Manufacturing method of optical path regulating apparatus Download PDF

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Publication number
KR970010478B1
KR970010478B1 KR94009506A KR19940009506A KR970010478B1 KR 970010478 B1 KR970010478 B1 KR 970010478B1 KR 94009506 A KR94009506 A KR 94009506A KR 19940009506 A KR19940009506 A KR 19940009506A KR 970010478 B1 KR970010478 B1 KR 970010478B1
Authority
KR
South Korea
Prior art keywords
generating
sacrific
film
connection terminal
manufacturing
Prior art date
Application number
KR94009506A
Other languages
Korean (ko)
Inventor
Jung-Bum Ji
Original Assignee
Daewoo Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daewoo Electronics Co Ltd filed Critical Daewoo Electronics Co Ltd
Priority to KR94009506A priority Critical patent/KR970010478B1/en
Priority to US08/430,628 priority patent/US5636070A/en
Priority to CN95104755A priority patent/CN1064135C/en
Priority to JP7131127A priority patent/JPH07301753A/en
Application granted granted Critical
Publication of KR970010478B1 publication Critical patent/KR970010478B1/en

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Abstract

A manufacturing method for the light pass adjustment device in order to prevent the actuator damage and the thin films from etching and laminating for removing the sacrific film. The said method comprising the steps of: generating the sacrific film that is not connected with the matrix type connection terminal in the operating board, generating the supporter that enclose with the connection terminal in the non-generating portion of the sacrific film, generating the membrain in the upper of the sacrific film and the supporter, generating the groove to protrude the connection terminal, generating the plug connected with the connection terminal, generating the contact between the membrain and the signal electrode, generating the transformation part and the bias in order, dividing the actuator, generating the protection layer, and removing the protection layer after removing the sacrific film using the etching mask.
KR94009506A 1994-04-30 1994-04-30 Manufacturing method of optical path regulating apparatus KR970010478B1 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR94009506A KR970010478B1 (en) 1994-04-30 1994-04-30 Manufacturing method of optical path regulating apparatus
US08/430,628 US5636070A (en) 1994-04-30 1995-04-28 Thin film actuated mirror array
CN95104755A CN1064135C (en) 1994-04-30 1995-04-28 Thin film actuated mirror array
JP7131127A JPH07301753A (en) 1994-04-30 1995-05-01 Manufacture of m x n pieces of actuated mirror array

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR94009506A KR970010478B1 (en) 1994-04-30 1994-04-30 Manufacturing method of optical path regulating apparatus

Publications (1)

Publication Number Publication Date
KR970010478B1 true KR970010478B1 (en) 1997-06-26

Family

ID=19382261

Family Applications (1)

Application Number Title Priority Date Filing Date
KR94009506A KR970010478B1 (en) 1994-04-30 1994-04-30 Manufacturing method of optical path regulating apparatus

Country Status (1)

Country Link
KR (1) KR970010478B1 (en)

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