KR970003651A - BPS film planarization method of semiconductor device - Google Patents

BPS film planarization method of semiconductor device Download PDF

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Publication number
KR970003651A
KR970003651A KR1019950016424A KR19950016424A KR970003651A KR 970003651 A KR970003651 A KR 970003651A KR 1019950016424 A KR1019950016424 A KR 1019950016424A KR 19950016424 A KR19950016424 A KR 19950016424A KR 970003651 A KR970003651 A KR 970003651A
Authority
KR
South Korea
Prior art keywords
semiconductor device
planarization method
film planarization
bps film
bps
Prior art date
Application number
KR1019950016424A
Other languages
Korean (ko)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR1019950016424A priority Critical patent/KR970003651A/en
Publication of KR970003651A publication Critical patent/KR970003651A/en

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KR1019950016424A 1995-06-20 1995-06-20 BPS film planarization method of semiconductor device KR970003651A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019950016424A KR970003651A (en) 1995-06-20 1995-06-20 BPS film planarization method of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950016424A KR970003651A (en) 1995-06-20 1995-06-20 BPS film planarization method of semiconductor device

Publications (1)

Publication Number Publication Date
KR970003651A true KR970003651A (en) 1997-01-28

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ID=60934310

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950016424A KR970003651A (en) 1995-06-20 1995-06-20 BPS film planarization method of semiconductor device

Country Status (1)

Country Link
KR (1) KR970003651A (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5676534A (en) * 1979-11-28 1981-06-24 Fujitsu Ltd Manufacture of semiconductor device
JPS5968949A (en) * 1982-10-12 1984-04-19 Matsushita Electric Ind Co Ltd Manufacture of semiconductor device
JPS63260050A (en) * 1987-04-16 1988-10-27 Ricoh Co Ltd Manufacture of semiconductor device
JPH03297137A (en) * 1990-04-16 1991-12-27 Mitsubishi Electric Corp Manufacture of semiconductor device
JPH05226479A (en) * 1992-02-12 1993-09-03 Seiko Epson Corp Manufacture of semiconductor device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5676534A (en) * 1979-11-28 1981-06-24 Fujitsu Ltd Manufacture of semiconductor device
JPS5968949A (en) * 1982-10-12 1984-04-19 Matsushita Electric Ind Co Ltd Manufacture of semiconductor device
JPS63260050A (en) * 1987-04-16 1988-10-27 Ricoh Co Ltd Manufacture of semiconductor device
JPH03297137A (en) * 1990-04-16 1991-12-27 Mitsubishi Electric Corp Manufacture of semiconductor device
JPH05226479A (en) * 1992-02-12 1993-09-03 Seiko Epson Corp Manufacture of semiconductor device

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E902 Notification of reason for refusal
E601 Decision to refuse application