KR970003651A - BPS film planarization method of semiconductor device - Google Patents
BPS film planarization method of semiconductor device Download PDFInfo
- Publication number
- KR970003651A KR970003651A KR1019950016424A KR19950016424A KR970003651A KR 970003651 A KR970003651 A KR 970003651A KR 1019950016424 A KR1019950016424 A KR 1019950016424A KR 19950016424 A KR19950016424 A KR 19950016424A KR 970003651 A KR970003651 A KR 970003651A
- Authority
- KR
- South Korea
- Prior art keywords
- semiconductor device
- planarization method
- film planarization
- bps film
- bps
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950016424A KR970003651A (en) | 1995-06-20 | 1995-06-20 | BPS film planarization method of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950016424A KR970003651A (en) | 1995-06-20 | 1995-06-20 | BPS film planarization method of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970003651A true KR970003651A (en) | 1997-01-28 |
Family
ID=60934310
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019950016424A KR970003651A (en) | 1995-06-20 | 1995-06-20 | BPS film planarization method of semiconductor device |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970003651A (en) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5676534A (en) * | 1979-11-28 | 1981-06-24 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS5968949A (en) * | 1982-10-12 | 1984-04-19 | Matsushita Electric Ind Co Ltd | Manufacture of semiconductor device |
JPS63260050A (en) * | 1987-04-16 | 1988-10-27 | Ricoh Co Ltd | Manufacture of semiconductor device |
JPH03297137A (en) * | 1990-04-16 | 1991-12-27 | Mitsubishi Electric Corp | Manufacture of semiconductor device |
JPH05226479A (en) * | 1992-02-12 | 1993-09-03 | Seiko Epson Corp | Manufacture of semiconductor device |
-
1995
- 1995-06-20 KR KR1019950016424A patent/KR970003651A/en not_active Application Discontinuation
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5676534A (en) * | 1979-11-28 | 1981-06-24 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS5968949A (en) * | 1982-10-12 | 1984-04-19 | Matsushita Electric Ind Co Ltd | Manufacture of semiconductor device |
JPS63260050A (en) * | 1987-04-16 | 1988-10-27 | Ricoh Co Ltd | Manufacture of semiconductor device |
JPH03297137A (en) * | 1990-04-16 | 1991-12-27 | Mitsubishi Electric Corp | Manufacture of semiconductor device |
JPH05226479A (en) * | 1992-02-12 | 1993-09-03 | Seiko Epson Corp | Manufacture of semiconductor device |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E601 | Decision to refuse application |