KR970002415A - 반도체 장치의 제조 방법 및 액정표시장치의 제조 방법 - Google Patents

반도체 장치의 제조 방법 및 액정표시장치의 제조 방법 Download PDF

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Publication number
KR970002415A
KR970002415A KR1019960023499A KR19960023499A KR970002415A KR 970002415 A KR970002415 A KR 970002415A KR 1019960023499 A KR1019960023499 A KR 1019960023499A KR 19960023499 A KR19960023499 A KR 19960023499A KR 970002415 A KR970002415 A KR 970002415A
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KR
South Korea
Prior art keywords
manufacturing
liquid crystal
crystal display
display device
semiconductor device
Prior art date
Application number
KR1019960023499A
Other languages
English (en)
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KR100246984B1 (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of KR970002415A publication Critical patent/KR970002415A/ko
Application granted granted Critical
Publication of KR100246984B1 publication Critical patent/KR100246984B1/ko

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Classifications

    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/66007Multistep manufacturing processes
    • H01L29/66075Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
    • H01L29/66227Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
    • H01L29/66409Unipolar field-effect transistors
    • H01L29/66477Unipolar field-effect transistors with an insulated gate, i.e. MISFET
    • H01L29/66742Thin film unipolar transistors
    • H01L29/6675Amorphous silicon or polysilicon transistors
    • H01L29/66757Lateral single gate single channel transistors with non-inverted structure, i.e. the channel layer is formed before the gate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/22Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
    • H01L21/223Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities using diffusion into or out of a solid from or into a gaseous phase
    • H01L21/2236Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities using diffusion into or out of a solid from or into a gaseous phase from or into a plasma phase

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Plasma & Fusion (AREA)
  • Ceramic Engineering (AREA)
  • Nonlinear Science (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Thin Film Transistor (AREA)
  • Liquid Crystal (AREA)
KR1019960023499A 1995-06-23 1996-06-21 반도체 장치의 제조 방법 및 액정표시장치의 제조방법 KR100246984B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP95-158241 1995-06-23
JP15824195A JPH098313A (ja) 1995-06-23 1995-06-23 半導体装置の製造方法および液晶表示装置の製造方法

Publications (2)

Publication Number Publication Date
KR970002415A true KR970002415A (ko) 1997-01-24
KR100246984B1 KR100246984B1 (ko) 2000-03-15

Family

ID=15667353

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960023499A KR100246984B1 (ko) 1995-06-23 1996-06-21 반도체 장치의 제조 방법 및 액정표시장치의 제조방법

Country Status (3)

Country Link
US (1) US5937304A (ko)
JP (1) JPH098313A (ko)
KR (1) KR100246984B1 (ko)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW374196B (en) * 1996-02-23 1999-11-11 Semiconductor Energy Lab Co Ltd Semiconductor thin film and method for manufacturing the same and semiconductor device and method for manufacturing the same
EP0801427A3 (en) * 1996-04-11 1999-05-06 Matsushita Electric Industrial Co., Ltd. Field effect transistor, semiconductor storage device, method of manufacturing the same and method of driving semiconductor storage device
US6499425B1 (en) * 1999-01-22 2002-12-31 Micron Technology, Inc. Quasi-remote plasma processing method and apparatus
US6780687B2 (en) * 2000-01-28 2004-08-24 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing a semiconductor device having a heat absorbing layer
US6403905B1 (en) * 2000-02-02 2002-06-11 Advanced Micro Devices, Inc. Reticle stocking and sorting management system
US6737672B2 (en) * 2000-08-25 2004-05-18 Fujitsu Limited Semiconductor device, manufacturing method thereof, and semiconductor manufacturing apparatus
JP4382375B2 (ja) * 2003-03-13 2009-12-09 Nec液晶テクノロジー株式会社 薄膜トランジスタの製造方法
KR100560793B1 (ko) * 2004-04-27 2006-03-13 삼성에스디아이 주식회사 반도체 소자 형성 방법
US20100015788A1 (en) * 2007-09-10 2010-01-21 Yuichiro Sasaki Method for manufacturing semiconductor device
US10020187B2 (en) 2012-11-26 2018-07-10 Applied Materials, Inc. Apparatus and methods for backside passivation
KR102216678B1 (ko) * 2014-07-14 2021-02-18 삼성디스플레이 주식회사 박막트랜지스터 제조방법
US9704712B1 (en) * 2015-12-30 2017-07-11 Infineon Technologies Ag Method of making a semiconductor device formed by thermal annealing

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60105216A (ja) * 1983-11-11 1985-06-10 Seiko Instr & Electronics Ltd 薄膜半導体装置の製造方法
JP2623276B2 (ja) * 1988-01-22 1997-06-25 株式会社日立製作所 薄膜半導体装置の製造方法
DE69030822T2 (de) * 1989-02-14 1997-11-27 Seiko Epson Corp Halbleitervorrichtung und Verfahren zu ihrer Herstellung
JP2731236B2 (ja) * 1989-05-09 1998-03-25 三菱電機株式会社 薄膜結晶層を有する半導体装置の製造方法
JPH0324717A (ja) * 1989-06-22 1991-02-01 Kyocera Corp 単結晶薄膜の製造方法
JP2973492B2 (ja) * 1990-08-22 1999-11-08 ソニー株式会社 半導体薄膜の結晶化方法
JPH04286369A (ja) * 1991-03-15 1992-10-12 Seiko Epson Corp 半導体装置及びその製造方法
US5578520A (en) * 1991-05-28 1996-11-26 Semiconductor Energy Laboratory Co., Ltd. Method for annealing a semiconductor
US5424230A (en) * 1992-02-19 1995-06-13 Casio Computer Co., Ltd. Method of manufacturing a polysilicon thin film transistor
US5366926A (en) * 1993-06-07 1994-11-22 Xerox Corporation Low temperature process for laser dehydrogenation and crystallization of amorphous silicon

Also Published As

Publication number Publication date
US5937304A (en) 1999-08-10
JPH098313A (ja) 1997-01-10
KR100246984B1 (ko) 2000-03-15

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