KR960043065A - 프루브 조정 방법 - Google Patents

프루브 조정 방법 Download PDF

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Publication number
KR960043065A
KR960043065A KR1019950012231A KR19950012231A KR960043065A KR 960043065 A KR960043065 A KR 960043065A KR 1019950012231 A KR1019950012231 A KR 1019950012231A KR 19950012231 A KR19950012231 A KR 19950012231A KR 960043065 A KR960043065 A KR 960043065A
Authority
KR
South Korea
Prior art keywords
probe
resistance
blocks
pin
station
Prior art date
Application number
KR1019950012231A
Other languages
English (en)
Other versions
KR0149325B1 (ko
Inventor
이시형
박승환
양경호
이근원
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019950012231A priority Critical patent/KR0149325B1/ko
Priority to US08/645,498 priority patent/US5844421A/en
Publication of KR960043065A publication Critical patent/KR960043065A/ko
Application granted granted Critical
Publication of KR0149325B1 publication Critical patent/KR0149325B1/ko

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Liquid Crystal (AREA)

Abstract

이 발명은 프루브 스테이션(Probe Station)의 프루브(Probe) 조정방법에 관한 것으로, 프루브 스테이션을 이용하여 박막트랜지스터 회로기판과 같은 대면적 기판을 테스트하기 전에 프루브가 수평이 되도록 하기 위하여, 저항체에 프루브스테이션의 핀을 접속하고, 인접 핀 간의 저항을 저항측정장치를 이용하여 측정 및 판독을 한 다음, 프루브 스테이션의 핀 조정장치를 이용하여 핀을 수평 조정하는 것으로 이루어지는 것을 특징으로 하는 프루브 조정 방법에 관한 것이다. 또한 상기한 프루브 조정 방법을 이용하여 먼저 여러개의 프루브 블럭을 나누어 프루브 블럭 단위로 저항을 측정하여 수평조정을 한 후 각 프루브 블럭의 저항값이 일치하도록 프루브 블럭 간의 저항을 맞추어 주는 프루브 조정 방법에 관한 것이다.

Description

프루브 조정 방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제3도는 본 발명의 제1실시예에 따른 고저항 기판의 저항 측정 회로도이고, 제11도는 본 발명의 제1실시예에 따른 핀간의 저항을 측정하는 방법을 나타낸 상태도이다.

Claims (2)

  1. 저항체에 프루브스테이션의 핀을 접속하고, 인접 핀간의 저항을 저항측정장치를 이용하여 측정 및 판독을 한 다음, 프루브 스테이션의 핀 조정 장치를 이용하여 핀을 수평조정하는 것으로 이루어지는 것을 특징으로 하는 프루브 조정방법.
  2. 프루브 스테이션의 다수의 프루브에 대하여 여러 개의 프루브 블럭을 나누어 프루브 블럭을 지정한 다음, 프루브 블럭 중 어느 하나의 프루브 블럭에 저항체를 접속하고, 저항측정장치를 이용하여 인접 핀 간의 저항을 측정 및 판독 한 다음, 프루브 스테이션의 핀 조정 장치를 이용하여 프루브 블럭의 핀을 수평조정한 뒤, 프루브 블럭 중 나머지 프루브 블럭에 대해서도 상기와 같은 방법으로 프루브 블럭의 핀을 수평조정하는 것을 되풀이 한 다음, 각 프루브 블럭마다 저항이 동일하도록 프루브의 높이를 조절하여 각 프루브 블럭마다 동일한 저항값이 나오도록 조정하는 것으로 이루어지는 것을 특징으로 하는 프루브 조정방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019950012231A 1995-05-17 1995-05-17 프루브 조정 방법 KR0149325B1 (ko)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR1019950012231A KR0149325B1 (ko) 1995-05-17 1995-05-17 프루브 조정 방법
US08/645,498 US5844421A (en) 1995-05-17 1996-05-16 Probe control method for leveling probe pins for a probe test sequence

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950012231A KR0149325B1 (ko) 1995-05-17 1995-05-17 프루브 조정 방법

Publications (2)

Publication Number Publication Date
KR960043065A true KR960043065A (ko) 1996-12-21
KR0149325B1 KR0149325B1 (ko) 1998-12-01

Family

ID=19414670

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950012231A KR0149325B1 (ko) 1995-05-17 1995-05-17 프루브 조정 방법

Country Status (2)

Country Link
US (1) US5844421A (ko)
KR (1) KR0149325B1 (ko)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6799976B1 (en) 1999-07-28 2004-10-05 Nanonexus, Inc. Construction structures and manufacturing processes for integrated circuit wafer probe card assemblies
US7382142B2 (en) 2000-05-23 2008-06-03 Nanonexus, Inc. High density interconnect system having rapid fabrication cycle
US6812718B1 (en) 1999-05-27 2004-11-02 Nanonexus, Inc. Massively parallel interface for electronic circuits
US6504378B1 (en) * 1999-11-24 2003-01-07 Micron Technology, Inc. Apparatus for evaluating contact pin integrity of electronic components having multiple contact pins
US6281694B1 (en) * 1999-11-30 2001-08-28 United Microelectronics Corp. Monitor method for testing probe pins
US7952373B2 (en) 2000-05-23 2011-05-31 Verigy (Singapore) Pte. Ltd. Construction structures and manufacturing processes for integrated circuit wafer probe card assemblies
US20020105348A1 (en) * 2000-12-12 2002-08-08 Resor Griffith L. Electronically measuring pin-to-pad alignment using resistive pads
US7030636B1 (en) 2005-05-02 2006-04-18 Fargo Assembly Company Low pin testing system
US10698020B2 (en) * 2014-03-26 2020-06-30 Teradyne, Inc. Current regulation for accurate and low-cost voltage measurements at the wafer level
US11041900B2 (en) * 2014-03-26 2021-06-22 Teradyne, Inc. Equi-resistant probe distribution for high-accuracy voltage measurements at the wafer level
CN105785607A (zh) 2016-03-31 2016-07-20 京东方科技集团股份有限公司 显示基板、点灯设备及点灯测试探针对位检测方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4565966A (en) * 1983-03-07 1986-01-21 Kollmorgen Technologies Corporation Method and apparatus for testing of electrical interconnection networks
US4918374A (en) * 1988-10-05 1990-04-17 Applied Precision, Inc. Method and apparatus for inspecting integrated circuit probe cards
US5006808A (en) * 1989-03-21 1991-04-09 Bath Scientific Limited Testing electrical circuits
US4975638A (en) * 1989-12-18 1990-12-04 Wentworth Laboratories Test probe assembly for testing integrated circuit devices
US5065092A (en) * 1990-05-14 1991-11-12 Triple S Engineering, Inc. System for locating probe tips on an integrated circuit probe card and method therefor
US5561377A (en) * 1995-04-14 1996-10-01 Cascade Microtech, Inc. System for evaluating probing networks
US5691467A (en) * 1996-06-28 1997-11-25 International Business Machines Corporation Method for mapping surfaces adapted for receiving electrical components

Also Published As

Publication number Publication date
KR0149325B1 (ko) 1998-12-01
US5844421A (en) 1998-12-01

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